Patents by Inventor Henry L. Wolfe

Henry L. Wolfe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Surface cleaning using an argon or nitrogen aerosol
    Patent number: 5294261
    Abstract: A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon or nitrogen particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
    Type: Grant
    Filed: November 2, 1992
    Date of Patent: March 15, 1994
    Assignees: Air Products and Chemicals, Inc., International Business Machines Corporation
    Inventors: Wayne T. McDermott, Richard C. Ockovic, Jin J. Wu, Douglas W. Cooper, Alexander Schwarz, Henry L. Wolfe
  • Surface cleaning using a cryogenic aerosol
    Patent number: 5062898
    Abstract: A method is disclosed for cleaning microelectronics surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
    Type: Grant
    Filed: June 5, 1990
    Date of Patent: November 5, 1991
    Assignees: Air Products and Chemicals, Inc., International Business Machines Corporation
    Inventors: Wayne T. McDermott, Richard C. Ockovic, Jin J. Wu, Douglas W. Cooper, Alexander Schwarz, Henry L. Wolfe
  • Electrostatic removal of contaminants
    Patent number: 4744833
    Abstract: An apparatus and method for electrostatic removal of micron and sub-micron sized contaminant particles is disclosed herein. The apparatus and method comprise creating a potential difference with a megavolt/cm electrostatic field between two conducting bases in a predetermined geometrical relation to each other. An insulator (e.g. a dielectric film) is maintained at or near contact between one of the bases and the surface to be cleaned to electrostatically remove particles from said surface. The bases can be made to move relative to each other and the surface to be cleaned.
    Type: Grant
    Filed: June 11, 1987
    Date of Patent: May 17, 1988
    Assignee: International Business Machines Corporation
    Inventors: Douglas W. Cooper, Henry L. Wolfe, James T. C. Yeh