Abstract: A parallelepipedal low-pressure plasma chamber body of glass is disclosed. The low-pressure plasma chamber may have electrodes at opposing sides of the low-pressure plasma chamber body. Furthermore, the low-pressure plasma chamber may have at opposing sides a door and a rear wall closure. The door and rear wall closure may in each case have at least one media connection in order to achieve a uniform gas flow in the low-pressure plasma chamber. The door may be assembled on the collar of the low-pressure plasma chamber body which extends radially away from the longitudinal axis of the low-pressure plasma chamber body. The low-pressure plasma chamber body is preferably produced using the pressing method or blow-and-blow method, in an analogous manner to industrial glass bottle production.

Abstract: The invention relates to a coating method for energetic material (12), in particular in a vacuum. The energetic material (12) is coated by chemical or physical vapor deposition. The coating material (16) is electrically conductive and/or hydrophobic or hydrophilic. The energetic material (12) is shaped as grains and/or pellets and/or is in the form of a powder.

Abstract: The invention relates to an expandable vacuum chamber (10) having flat frame elements (14) and end plates (12) and to a method for producing such a vacuum chamber (10). The end plates (12) are lined up in front of and behind the frame elements (14) in the axial direction (Ra) and, together with the frame elements (14), delimit a chamber volume of the vacuum chamber (10).

Abstract: The invention relates to a vacuum device having a vacuum chamber and to a vacuum pump for evacuating the vacuum chamber. The vacuum device can have a plasma generator in order to be able to treat items to be treated in the vacuum chamber with a plasma. An exhaust gas particle filter is connected upstream of the vacuum pump in order to protect the vacuum pump from aggressive reagents from the vacuum chamber. The exhaust gas particle filter has a filter element having a plurality of sintered metal filter bags. The sintered metal filter bags are preferably each formed from two tapered sintered sheet metal strips. The filter element can be connected to the plasma generator as an electrode of the plasma generator. The invention further relates to the use of an exhaust gas particle filter having sintered metal filter bags for protecting a vacuum pump.

Abstract: The invention relates to a coating method for energetic material (12), in particular in a vacuum. The energetic material (12) is coated by chemical or physical vapor deposition. The coating material (16) is electrically conductive and/or hydrophobic or hydrophilic. The energetic material (12) is shaped as grains and/or pellets and/or is in the form of a powder.

Abstract: A circuit assembly (12) includes a direct voltage supply (13) providing a direct voltage (Ucc), a step-up converter circuit (16), and a control unit (17). The step-up converter circuit (16) contains a series circuit consisting of an inductor (18) and a controllable switch (19), wherein the inductor (18) is connected between a pole (21) of the direct voltage supply (13) and a first electrode (D) of the switch (19). The control unit (17) controls the switch (19) with a high-frequency to generate high-frequency energy with a periodic pulse-like output voltage (UDS) at the first electrode (D) of the switch (19), said output voltage having a peak value larger than the value of the direct voltage (Ucc). The high-frequency energy is directly output without transformation at an output connection (24) designed to directly connect to an electrode (8) of the vacuum chamber (2).

Abstract: A parallelepipedal low-pressure plasma chamber body of glass is disclosed. The low-pressure plasma chamber may have electrodes at opposing sides of the low-pressure plasma chamber body. Furthermore, the low-pressure plasma chamber may have at opposing sides a door and a rear wall closure. The door and rear wall closure may in each case have at least one media connection in order to achieve a uniform gas flow in the low-pressure plasma chamber. The door may be assembled on the collar of the low-pressure plasma chamber body which extends radially away from the longitudinal axis of the low-pressure plasma chamber body. The low-pressure plasma chamber body is preferably produced using the pressing method or blow-and-blow method, in an analogous manner to industrial glass bottle production.

Abstract: A circuit assembly (12) includes a direct voltage supply (13) providing a direct voltage (Ucc), a step-up converter circuit (16), and a control unit (17). The step-up converter circuit (16) contains a series circuit consisting of an inductor (18) and a controllable switch (19), wherein the inductor (18) is connected between a pole (21) of the direct voltage supply (13) and a first electrode (D) of the switch (19). The control unit (17) controls the switch (19) with a high-frequency to generate high-frequency energy with a periodic pulse-like output voltage (UDS) at the first electrode (D) of the switch (19), said output voltage having a peak value larger than the value of the direct voltage (Ucc). The high-frequency energy is directly output without transformation at an output connection (24) designed to directly connect to an electrode (8) of the vacuum chamber (2).

Abstract: A vacuum system, such as the form of a plasma system, includes a vacuum chamber. The side walls of the vacuum chamber are configured in the form of a completely closed chamber extruded profile. A first end face of the chamber extruded profile is closed off with a plate. A second end face of the chamber extruded profile, which lies opposite the first end face, has a reversibly openable and closable door. The door is fastened by at least one hinge pivotably to the chamber extruded profile. The side walls, which are fully closed transversely to the longitudinal axis of the chamber extruded profile, enable a simple and cost-effective production of the vacuum chamber. The vacuum chamber may be accommodated at least partially in a housing, which may likewise be configured at least partially in the form of an extruded profile.

Abstract: The low pressure plasma system includes a treatment chamber which is pumped out in a first process step by means of a pump. In a second process step a gas supply valve is opened in order to achieve a defined gas composition in the treatment chamber at low pressure. In a third process step a plasma generator is switched on in order to ignite a plasma in the treatment chamber. In a fourth process step a flushing valve can be opened in order to flush the treatment chamber. In a fifth process step the treatment chamber can be ventilated by way of a ventilation valve. The sequential switching element can be a rotary switch and include a zero switching position where the low pressure plasma system is off. The sequential switching element renders possible a simple embodiment of the low pressure plasma system and its intuitive operation.

Abstract: A vacuum system, such as the form of a plasma system, includes a vacuum chamber. The side walls of the vacuum chamber are configured in the form of a completely closed chamber extruded profile. A first end face of the chamber extruded profile is closed off with a plate. A second end face of the chamber extruded profile, which lies opposite the first end face, has a reversibly openable and closable door. The door is fastened by at least one hinge pivotably to the chamber extruded profile. The side walls, which are fully closed transversely to the longitudinal axis of the chamber extruded profile, enable a simple and cost-effective production of the vacuum chamber. The vacuum chamber may be accommodated at least partially in a housing, which may likewise be configured at least partially in the form of an extruded profile.

Abstract: The low pressure plasma system includes a treatment chamber which is pumped out in a first process step by means of a pump. In a second process step a gas supply valve is opened in order to achieve a defined gas composition in the treatment chamber at low pressure. In a third process step a plasma generator is switched on in order to ignite a plasma in the treatment chamber. In a fourth process step a flushing valve can be opened in order to flush the treatment chamber. In a fifth process step the treatment chamber can be ventilated by way of a ventilation valve. The sequential switching element can be a rotary switch and include a zero switching position where the low pressure plasma system is off. The sequential switching element renders possible a simple embodiment of the low pressure plasma system and its intuitive operation.

Abstract: A plasma installation includes at least two separate components being a vessel for an object to be processed and a plasma unit having an electrical plasma source for igniting a plasma in the vessel. The plasma unit has no additional subassembly for other media so that the plasma unit can be constructed in a structurally particularly simple manner and readily operated. In a particularly preferred manner, the vessel comprises a vessel body of glass. The vessel body is preferably constructed in one piece and surrounds the object completely. The plasma can be ignited spaced apart from the plasma unit by means of a high-frequency generator, an induction coil and/or a magnetron of the electrical plasma source.

Abstract: The invention relates to an automatic machine tool for machining workpieces, including a number n of workpiece receivers that can be adjusted in angular and/or spatial position and including an equal number n of work stations, one of said work stations being an exchange station, said receivers or stations being disposed at mutual angular separations of 360.degree./n on a rotatable index table, said stations or said receivers being locally fixed thereon and said index table being advanceable in such a manner that each workpiece traverses all stations in the same sequence. By applying the invention reliable and precise machining, coupled with simple construction should be achieved. This is made possible by the fact that the drive of the index table is controllable so that a sequence of (n-1) rotary steps by 360.degree./n in one direction is followed by a rotary step of 360.degree. (n-1)/n in the opposite direction.