Abstract: An apparatus for removing solder bonded devices from a substrate which includes a hollow housing element having an open end with a seating portion adapted to engage the flat backside of a semiconductor device, an inlet for admitting heated gases to the interior of the housing, and an outlet for the heated gases, a baffle within the housing having an end portion recessed from the seating portion of the housing wherein the baffle directs heated gas downwardly against the backside of the device when in engagement with the seating portion of the housing, and a clamping means to secure a semiconductor device in seated relation on the seating portion.A rework method for removing a solder bonded semiconductor device from a ceramic substrate leaving only a coating of solder on the pad site sufficient to solder bond another device without the need for additional pad site preparation which includes the steps of preheating the substrate and solder bonded devices to a temperature not greater than 100.degree. C.

Abstract: An individual chip joining machine is designed primarily to bond a single chip to a multi-chip substrate. The machine includes an X-Y table for moving a substrate to locate a chip site beneath a probe. The probe serves to pick up a chip and either place it on the substrate or remove it therefrom and further serves to heat the chip to join it to the substrate by solder reflow or to melt the solder and allow the chip to be removed. The probe is mounted on a Z direction placement mechanism that also includes means to allow the probe to be backed off a fixed distance from a chip, once the chip has been placed on the substrate preparatory to joining thereto. A second heater heats the substrate to a bias temperature, this heating being controlled through use of a surrogate substrate having a thermocouple attached thereto.