Patents by Inventor Herman Soemers

Herman Soemers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8018664
    Abstract: A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6?. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6? and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.
    Type: Grant
    Filed: April 20, 2004
    Date of Patent: September 13, 2011
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stefan Xalter, Peter Deufel, Yim Bun Patrick Kwan, Bernard Stommen, Herman Soemers, Franz Van Deuren, Paul Peter Anne Brom
  • Publication number: 20110216428
    Abstract: A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6?. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6? and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.
    Type: Application
    Filed: May 16, 2011
    Publication date: September 8, 2011
    Applicant: CARL ZEISS SMT GMBH
    Inventors: Stefan Xalter, Peter Deufel, Yim Bun Patrick Kwan, Bernard Stommen, Herman Soemers, Franz Van Deuren, Paul Peter Anne Brom
  • Publication number: 20110176234
    Abstract: The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror.
    Type: Application
    Filed: March 29, 2011
    Publication date: July 21, 2011
    Applicant: CARL ZEISS SMT GMBH
    Inventors: Herman Soemers, Franciskus Hendrikus van Deuren, Hendrik Dirk Visser, Sander C. Broers
  • Patent number: 7699480
    Abstract: The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror.
    Type: Grant
    Filed: December 22, 2008
    Date of Patent: April 20, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Herman Soemers, Franciskus Hendrikus van Deuren, Hendrik Dirk Visser, Sander C. Broers
  • Publication number: 20090303626
    Abstract: A housing structure has a frame structure 1 on which there are arranged via connecting elements 7 several optical elements 5 which are held in mounts 6 or structural modules 6?. The optical elements 5 are detachably connected to the frame structure 1 with their mounts 6 or structural modules 6? and connecting elements 7 in such a way that in the installed state they are integrated as bearing units in the frame structure 1.
    Type: Application
    Filed: April 20, 2004
    Publication date: December 10, 2009
    Applicant: CARL ZEISS SMT AG
    Inventors: Stefan Xalter, Peter Deufel, Yim-Bun Patrick Kwan, Bernard Stommen, Herman Soemers, Franz van Deuren, Paul Peter Anne Brom
  • Patent number: 7604359
    Abstract: The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror.
    Type: Grant
    Filed: April 27, 2005
    Date of Patent: October 20, 2009
    Assignee: Carl Zeiss SMT AG
    Inventors: Herman Soemers, Franciskus Hendrikus van Deuren, Hendrik Dirk Visser, Sander C. Broers
  • Publication number: 20090103199
    Abstract: The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror.
    Type: Application
    Filed: December 22, 2008
    Publication date: April 23, 2009
    Inventors: Herman Soemers, F. H. Van Deuren, H. d. Visser, S. Broers
  • Publication number: 20050248860
    Abstract: The present high positioning reproducible mirror-actuator interface disclosed herein overcomes the deficiencies associated with conventional interface systems and offer a number of advantages that are disclosed herein. Generally, the mirror mounts provide a reliable and robust interface between the mirrors and actuators, that serve to move and position the mirrors, as wells as providing an interface between the mirrors and gravity compensator pins. The mirror mount is characterized as having a body that has an outer peripheral wall that includes a plurality of flexible elements around the perimeter of the body, each having a high stiffness in plane and a high flexibility out of plane. The body is open at the first end to allow flexing of the flexible elements. The flexible elements providing a direct coupling interface between the mirror mount and the mirror.
    Type: Application
    Filed: April 27, 2005
    Publication date: November 10, 2005
    Inventors: Herman Soemers, F.H. Deuren, H.d. Visser, S. Broers