Abstract: A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.

Abstract: A MEMS scanning micromirror including a mirror body 50, the mirror body 50 having a rotation axis 58 with a pair of extension bars 56 parallel to the rotation axis 58; a frame 60 forming a mirror recess 62 with a recess periphery 64, the frame 60 having a pair of opposed frame bars 66 on the recess periphery 64 along the rotation axis 58; a pair of cantilever beam assemblies 70, each of the pair of cantilever beam assemblies 70 being fixed to one of the pair of opposed frame bars 66 and coupled to one end of the pair of extension bars 56; and a pair of vertical support beams 40 connected between each of the pair of opposed frame bars 66 to the mirror body 50 along the rotation axis 58.

Abstract: A MEMS scanning micromirror with reduced dynamic deformation with a mirror support including a rotation axis beam 120 having a rotation axis 58; a pair of extension bars 56 parallel to the rotation axis 58, each having a first end 140, a midpoint 142, and a second end 144; and a pair of X beams 130, each of the pair of X beams 130 having a cross midpoint 134. One of the pair of X beams 130 is connected to the first end 140 and the midpoint 142 of each of the pair of extension bars 56; the other of the pair of X beams 130 is connected to the midpoint 142 and the second end 144 of each of the pair of extension bars 56; and the rotation axis beam 120 is connected to the cross midpoint 134 of each of the pair of X beams 130.

Abstract: A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members.

Abstract: A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

Abstract: A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members.

Abstract: An object table is supported in a vacuum chamber by an elongate beam or beams extending through elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

Abstract: A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.

Abstract: A lithographic apparatus for step-and-scan operation has a three stage structure for the wafer stage. During step-and-scan operation, the long-stroke stage is moved steadily along the row or column of dies to be exposed sequentially. An intermediate scanning stage moves in a figure-of-eight motion relative to the long-stroke stage so that the net movement of the fine stage, which is carried by the scanning stage, is a meander path.

Abstract: In a lithographic projection apparatus, a slider is provided for motion of the substrate table or mask table. The slider is supported on a gas-bearing and separates a region at atmospheric pressure from a vacuum space region. A differential pressure pump is provided to maintain the pressure difference in the presence of the gas-bearing. A pressure compensation vessel is provided on top of the slider and also contains a vacuum. Over most of the area of the slider, the pressure on its opposed first and second sides is the same and so deformation of the slider is avoided. The sidewalls of the pressure compensation vessel transmit the external gas pressure to the slider such that they are in line with the forces of the gas-bearing.

Abstract: A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

Abstract: An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

Abstract: A long-stroke movement is fed-through into a vacuum chamber by providing a sliding seal over an aperture in the vacuum chamber wall. The object to be moved, which may be a mask or wafer table in a lithographic apparatus, within the vacuum chamber is connected to or mounted on the sliding seal and moved by movement of the sliding seal. The sliding seal may be a plate, a bowl or a labyrinth of interleaved plates.

Abstract: An object table is supported in a vacuum chamber by an elongate beam or beams extending though elongate slots in opposite walls of the vacuum chamber. Displacement of the beam in two orthogonal directions is achieved by displacing the beam laterally and longitudinally. The elongate slots are sealed by sliding plates supported by a gas bearing. The beam is driven longitudinally by linear motors acting against between a balance mass and the beam. The beam is driven laterally by linear motors acting between a balance mass and the sliding plates. The two balance masses may be separate or combined.

Abstract: A transmission system comprising at least two wheels and a belt wound around the wheels with an unambiguous transmission ratio in that the transmission system is free from clearance and is comparatively stiff, while geometric errors, such as the polygon effect, and manufacturing errors and the occurrence of slip are neutralized in that the wheels are subdivided into segments, which can separately perform a tangential displacement. The belt has spaced opening for receiving the segments, which tangentially displace in case of misalignment of the segments to the belt openings. The belt has spaced opening for receiving the segments, which tangentially displace in case of misalignment of the segments to the belt openings.

Abstract: A manipulator having an end effector (1) displaceable by means of a four-rod mechanism, a comparatively light and stiff construction being obtained in that each of the rods (3,5,9,11) has a tubular support (73,79,159,181), which is secured by a bridge (147,149,169,191) to the bearing plate (87,93,119,193). The manipulator is particularly suitable for use in automatic mounting equipment.

Abstract: The invention describes a method of accurately mounting a deflection unit on a cathode ray tube envelope. The deflection unit is provided with three V-shaped connecting devices and globally positioned with respect to metal mounting pads thermal compression bonded to the envelope. Three adjustable manipulators, each provided with a socket for engaging a semi-spherical part on one of the V apexes, accurately position the deflection unit on the envelope to obtain an accurate test pattern on the cathode ray tube screen. Finally the V-shaped devices are laser-welded to the mounting pads by laser devices incorporated with said manipulators.

Abstract: A cathode ray tube display device which has an arrangement for mounting a deflection unit on the conical portion of a cathode ray tube envelope. In order to permit a rapid mounting of the deflection unit in a manner which provides shock resistance, and resistance temperature fluctuations in the deflection unit and the envelope, three V-shaped, sheet metal connecting devices connect the deflection unit to the conical portion of the envelope. The free ends of the devices are attached to the deflection unit in such a manner that the vertices of the devices are substantially tangential to the surface of the conical portion. After adjustment of the deflection unit the vertices of the devices are secured to the conical portion in such a manner that the connections are loaded with a shearing force.

Abstract: The invention relates to a friction-disk transmission with a first shaft (19) and a coaxial second shaft (23) which are rotatable about a common axis of rotation (Z). The first shaft (19) is being coupled with a disk (1) which is tilted with respect to the axis of rotation (Z) and engages with friction a disk-shaped supporting member (11) secured to the second shaft (23) and rotatable about the axis of rotation (Z). The disk (1) is supported by an annular spring (3) and is tiltable about two axes (X, Y) which intersect each other perpendicularly and are located in a plane at right angles to the axis of rotation (Z). The tilting point (P) is located substantially at the point of intersection of the X-, Y- and Z-axes. The rotation of the disk (1) about the Z-axis is prevented by the annular spring (3).The friction-disk transmission can be used in apparatus requiring comparatively large transmission ratios, for example if a vacuum-tight separation is desired between the first and the second shaft.