Abstract: A semiconductor manufacturing apparatus according to an embodiment of the present invention comprises: an ultraviolet generating part which is disposed in an ultraviolet generating chamber and generates ultraviolet rays of a target wavelength; a substrate driving part including a chuck which is disposed in a process chamber where a substrate fed therein is treated with ultraviolet rays and supports the fed substrate, and an axis which rotates and moves up and down the chuck; and a window which is disposed between the ultraviolet generating chamber and the process chamber and transmits the generated ultraviolet rays to the process chamber.

Abstract: A power transmission device of a steering system. A first connector includes a cylindrical first support coupled to one of coaxial first and second shafts and first coupling portions extending axially from inner circumferential portions of the first support. A second connector includes a second support coupled to the other of the first and second shafts and fitted into the first support and second coupling portions extending axially from outer circumferential portions of the second support. A damper includes outer support recesses provided in outer circumferential portions thereof, with the first coupling portions being fitted into the outer support recesses, and inner support recesses provided in inner circumferential portions thereof, with the second coupling portions being fitted into the inner support recesses, wherein the damper is coupled between the first connector and the second connector.

Abstract: The present disclosure provides a rack bar supporting device of a steering apparatus for a vehicle. The rack bar supporting device includes: a support yoke to support a rack bar; a first cam member configured to have a front surface supporting the support yoke toward the rack bar and to have a rear surface provided with a first cam surface inclined in a circumferential direction thereof; a second cam member configured to have a front surface provided with a second cam surface inclined in a circumferential direction thereof to correspond to the first cam surface, to have a rear surface to which one end of a torsion spring is supported and coupled; a yoke plug; and an elastic pin.

Abstract: A power transmission device of a steering system. A first connector includes a cylindrical first support coupled to one of coaxial first and second shafts and first coupling portions extending axially from inner circumferential portions of the first support. A second connector includes a second support coupled to the other of the first and second shafts and fitted into the first support and second coupling portions extending axially from outer circumferential portions of the second support. A damper includes outer support recesses provided in outer circumferential portions thereof, with the first coupling portions being fitted into the outer support recesses, and inner support recesses provided in inner circumferential portions thereof, with the second coupling portions being fitted into the inner support recesses, wherein the damper is coupled between the first connector and the second connector.

Abstract: The present disclosure provides a rack bar supporting device of a steering apparatus for a vehicle. The rack bar supporting device includes: a support yoke to support a rack bar; a first cam member configured to have a front surface supporting the support yoke toward the rack bar and to have a rear surface provided with a first cam surface inclined in a circumferential direction thereof; a second cam member configured to have a front surface provided with a second cam surface inclined in a circumferential direction thereof to correspond to the first cam surface, to have a rear surface to which one end of a torsion spring is supported and coupled; a yoke plug; and an elastic pin.

Abstract: An attachable high-manganese steel brake disk includes a first disk member including air vents disposed radially therein to be spaced apart from each other, and a pair of second disk members installed to be attached to two surfaces of the first disk member and having a braking surface in contact with a brake pad. Between the first disk member and the second disk members, at least the second disk members are provided as high manganese steel members.

Abstract: The present disclosure relates to a power steering apparatus of a vehicle that includes: a rack housing configured to surround a rack bar and having an opening portion formed at one side thereof through which a steering shaft passes; a torque sensor cover that has a torque sensor therein and has a communicating hole formed therein through which the steering shaft passes and a first penetration portion having a first through-hole formed therein through which the fastening member passes; and a cover connecting member that has an insertion portion and a second penetration portion in order to connect the rack housing and the torque sensor cover, the insertion portion having an insertion hole formed therein where the opening portion is inserted and coupled and the second penetration portion having a second through-hole that is formed therein to correspond to the fastening hole and through which the fastening member passes.

Abstract: An attachable high-manganese steel brake disk includes a first disk member including air vents disposed radially therein to be spaced apart from each other, and a pair of second disk members installed to be attached to two surfaces of the first disk member and having a braking surface in contact with a brake pad. Between the first disk member and the second disk members, at least the second disk members are provided as high manganese steel members.

Abstract: According to an aspect of present invention provides method of sharing contents, method comprising, receiving an integrated link for accessing any one of a first link and a second link from an external device and attempting to access a first link through an integrated link and then attempting to access a second link only when failing to access first link, wherein first link is used to receive content through peer-to-peer (p2p) data transmission and reception, and second link is used to download content from a data storage device which is connected to a network so as to provide a content storage service.

Abstract: The present disclosure relates to a power steering apparatus of a vehicle that includes: a rack housing configured to surround a rack bar and having an opening portion formed at one side thereof through which a steering shaft passes; a torque sensor cover that has a torque sensor therein and has a communicating hole formed therein through which the steering shaft passes and a first penetration portion having a first through-hole formed therein through which the fastening member passes; and a cover connecting member that has an insertion portion and a second penetration portion in order to connect the rack housing and the torque sensor cover, the insertion portion having an insertion hole formed therein where the opening portion is inserted and coupled and the second penetration portion having a second through-hole that is formed therein to correspond to the fastening hole and through which the fastening member passes.

Abstract: Disclosed is a rack bush and a rack pinion type steering apparatus having the rack bush for a vehicle, which can smoothly support a load in an axial direction and a vertical direction of a rack bar so that it is possible to reduce abnormal abrasion of the rack bush, reduce a rattle noise caused by external force transferred through the rack bar during movement of the rack bar, and prevent damage to the rack bar and a pinion through distribution of the load due to an external impact on the shaft.

Abstract: Disclosed is a rack bush and a rack pinion type steering apparatus having the rack bush for a vehicle, which can smoothly support a load in an axial direction and a vertical direction of a rack bar so that it is possible to reduce abnormal abrasion of the rack bush, reduce a rattle noise caused by external force transferred through the rack bar during movement of the rack bar, and prevent damage to the rack bar and a pinion through distribution of the load due to an external impact on the shaft.

Abstract: A hydraulic power steering apparatus for a vehicle is disclosed. The hydraulic power steering apparatus for a vehicle forms a working fluid film between a piston reciprocating within a cylinder tube and a piston ring in order to provide an accurate auxiliary steering force by preventing leakage of a working fluid between right and left cylinders during the operation of a steering wheel by the driver.