Abstract: The present invention relates to an etching apparatus including an etching chamber in which a target object is etched by an etchant, an etchant supply part which collects the etchant in the etching chamber and supplies the etchant to the etching chamber using an etchant pump, a first pressure adjusting unit which injects a gas into the etchant pump to apply an operation pressure, a second pressure adjusting unit which pressurizes the etching chamber and the etchant supply part at the same predetermined pressure, a back pressure adjusting unit which adjusts a pressure of the gas discharged when the etchant pump operates, and a valve which controls an order and a direction in which the gas is injected into or discharged from the etchant pump.

Abstract: The present invention relates to an etching apparatus including an etching chamber in which a target object is etched by an etchant, an etchant supply part which collects the etchant in the etching chamber and supplies the etchant to the etching chamber using an etchant pump, a gas circulation pipe connected from a predetermined point of an upper portion of the etchant supply part to a predetermined point of an upper portion of the etching chamber and formed to circulate a gas, and an air pump formed at one side of the gas circulation pipe and configured to forcibly circulate the gas.

Abstract: Provided is a resistor for controlling a fan motor rotating speed for use in an air conditioner. The resistor comprises a base body, a radiator attached to a top portion of the base body, a printed resistor circuit board covered with insulating sheets and received within the radiator, a fixture plate placed on a front surface of the radiator to isolate the printed resistor circuit board from the outside, and a temperature fuse spot-welded to upper connecting tip ends of the printed resistor circuit board at a top portion of the radiator. A fastener portion of an arc shape is formed on a top portion of the fixture plate to wrap around and fixedly support the temperature fuse. This reduces the manufacturing cost of the resistor, while improving the manufacturability and reliability thereof.

Abstract: Provided is a resistor for controlling a fan motor rotating speed for use in an air conditioner. The resistor comprises a base body, a radiator attached to a top portion of the base body, a printed resistor circuit board covered with insulating sheets and received within the radiator, a fixture plate placed on a front surface of the radiator to isolate the printed resistor circuit board from the outside, and a temperature fuse spot-welded to upper connecting tip ends of the printed resistor circuit board at a top portion of the radiator. A fastener portion of an arc shape is formed on a top portion of the fixture plate to wrap around and fixedly support the temperature fuse. This reduces the manufacturing cost of the resistor, while improving the manufacturability and reliability thereof.