Abstract: An exposure apparatus exposes a substrate by filling a liquid between a projection optical system and the substrate, and projecting the image of a pattern onto the substrate through the projection optical system and the liquid, and includes a liquid removing mechanism that intermittently blows a gas against a reference member, movable mirror, and the like, to which the liquid is adhered in order to remove that liquid.

Abstract: A subject of the present invention is to find utility of a combination of a Rho kinase inhibitor having a novel action and a ?-blocker as a therapeutic agent for glaucoma. Actions of reducing intraocular pressure are complemented and/or enhanced each other by combining the Rho kinase inhibitor with the ?-blocker. For the administration mode, each drug can be administered in combination or in mixture.

Abstract: An exposure apparatus wherein an image of a pattern is projected onto a substrate via a projection optical system to expose the substrate, includes: a substrate moving device that is movable while holding the substrate above the projection optical system; and a liquid immersion unit that fills at least a portion of the space between the projection optical system and the substrate with a liquid, wherein the image of the pattern is projected onto the substrate via the projection optical system and the liquid.

Abstract: An exposure apparatus wherein an image of a pattern is projected onto a substrate via a projection optical system to expose the substrate, includes: a substrate moving device that is movable while holding the substrate above the projection optical system; and a liquid immersion unit that fills at least a portion of the space between the projection optical system and the substrate with a liquid, wherein the image of the pattern is projected onto the substrate via the projection optical system and the liquid.

Abstract: A subject of the present invention is to find utility of a combination of a Rho kinase inhibitor and prostaglandins as a therapeutic agent for glaucoma. Actions of reducing intraocular pressure are complemented and/or enhanced each other by combining the Rho kinase inhibitor with prostaglandins. For the administration mode, each drug can be administered in combination or in mixture.

Abstract: An exposure apparatus exposes a substrate by projecting an image of a pattern onto the substrate via a projection optical system and a liquid that fills a gap between the projection optical system and the substrate. The exposure apparatus has a liquid recovery mechanism with a drive section powered by electric power supplied from a commercial power source and an uninterruptible power source separate from the commercial power source. When the commercial power source has a failure, the supply of electric power to the drive section is switched to the uninterruptible power source.

Abstract: A processing solution tank of forming an agitating flow by flowing and circulating a processing solution in directions opposite to each other between the side of a liquid surface and the side of a tank bottom, in which a guide plate substantially of an arcuate shape is formed to an end of the tank situated at least to the downstream on the side of the liquid surface or the downstream on the side of the tank bottom in the agitating flow for reversing the flow downward to the tank bottom or upward to the liquid surface, and a swirl chamber having a swirl generating portion of a substantially arcuate face for capturing dusts is provided at the bottom of the tank, whereby high quality surface treatment, for example, electrodeposition coating can be conducted by uniformly stirring the processing solution so as not to cause backflow or turbulence in the processing solution tank while dipping a work on a conveyor in the processing solution.

Abstract: The object of the present invention is to find utility of a combination of bunazosin, having a new action mechanism, and prostaglandins as a therapeutic agent of glaucoma. The invention relates to a therapeutic agent of glaucoma, comprising bunazosin or a salt thereof and prostaglandins in combination, where bunazosin or a salt thereof and prostaglandins mutually supplement and/or enhance each action, and where bunazosin and prostaglandin may be formulated in a single preparation to be administered or may be separately administered in combination.

Abstract: A novel pharmacological effect of an &agr;1 receptor blocker is found out. As the results of studies on the novel pharmacological effect of the &agr;1 receptor blocker, it is clarified that this blocker has an effect of protecting optic nerve. Thus, the &agr;1 receptor blocker is expected as being useful in optic nerve protecting agents to be used in treating retinal disease typified by normal tension glaucoma, retinal blood vessel occlusion, diabetic retinophathy ischemic optic neuropathy, macular degeneration, retinitis pigmentosa and Leber's disease.

Abstract: This invention relates to an agent for the protection of retinal neurons which comprises, as an effective ingredient, sulfamate derivative having the following formula: 1

Abstract: A pressure sensor has a sensor chip with a diaphragm formed therein and bumps formed thereon, and a stem with leads extending from a surface thereof to the sensor chip. The bumps and the leads are electrically connected by face down bonding so that a surface of the sensor chip faces the surface of the stem. In this manner, bonding wires are unnecessary. Therefore, an area for disposing the bonding wires in the stem can be cut down, so that the pressure sensor can be miniaturized.

Abstract: The present invention provides therapeutic agents for ophthalmopathy such as glaucoma or retinal diseases. Compounds having inhibitory activities of interleukin-1 such as intrinsic interleukin-1 receptor antagonist protein and an interleukin-1 neutralizing antibody have remarkable effects of inhibiting a decrease in cell number of a retinal ganglion cell layer, effects of inhibiting thinning of an inner plexiform layer and effects of lowering intraocular pressure.

Abstract: A jacket is provided to surround coils in a stationary member of a linear motor. An inlet of the jacket is directed toward the optical path of a laser beam from a laser interferometer, and a temperature-controlled fluid is circulated through the jacket. Temperature sensors are provided at the outlet and inlet, respectively, of a temperature controller. The temperature of the fluid supplied to the stationary member is controlled so as to become equal to the temperature around the optical path of the laser beam on the basis of the values of temperature measured by the temperature sensors, thereby suppressing fluctuations of air in the optical path of the laser beam. An exhaust groove is provided in a guide bar transport member so as to surround a bearing surface around a gas outlet, and partition walls flush with the bearing surface are provided outside the exhaust groove.

Abstract: A novel drug for improving the circulation in the optic nerve head, which comprises as an active ingredient Lomerizine (I): or a pharmaceutically acceptable acid addition salt. The optic nerve head circulation improving drug of this invention can increase the blood flow in the optic nerve head with no or little systemic side effects such as hypotensive activity or heart rate increasing activity and is useful particularly for the treatment of normal tension glaucoma.

Abstract: A jacket is provided to surround coils in a stationary member of a linear motor. An inlet of the jacket is directed toward the optical path of a laser beam from a laser interferometer, and a temperature-controlled fluid is circulated through the jacket. Temperature sensors are provided at the outlet and inlet, respectively, of a temperature controller. The temperature of the fluid supplied to the stationary member is controlled so as to become equal to the temperature around the optical path of the laser beam on the basis of the values of temperature measured by the temperature sensors, thereby suppressing fluctuations of air in the optical path of the laser beam. An exhaust groove is provided in a guide bar transport member so as to surround a bearing surface around a gas outlet, and partition walls flush with the bearing surface are provided outside the exhaust groove.

Abstract: A pressure sensor has a sensor chip with a diaphragm formed therein and bumps formed thereon, and a stem with leads extending from a surface thereof to the sensor chip. The bumps and the leads are electrically connected by face down bonding so that a surface of the sensor chip faces the surface of the stem. In this manner, bonding wires are unnecessary. Therefore, an area for disposing the bonding wires in the stem can be cut down, so that the pressure sensor can be miniaturized.

Abstract: A leakage inspection method and apparatus having a pressure wave generating means, including an air supply source, a regulator, and a solenoid valve. A pressure wave of a fluid is applied to a normal flow path of an measurement object by the pressure wave generating means to detect internal leakage by measuring, by means of a microphone, a difference between the transfer time during which the pressure wave passes through the normal flow path and the transfer time during which the pressure wave passes through the leakage flow path. Accordingly, the internal leakage of the fluid, flowing in the leakage flow path bypassing the normal flow path of an equipment having a partition and the normal flow path separated by the partition, is detected, if any.

Abstract: An exposure apparatus comprises a projection optical system, which projects a pattern formed on a mask on a photosensitive substrate, a mounting object table, which holds the photosensitive substrate, a positioning stage, which positions the mounting object table along a 2-dimensional movement coordinate system, a stage coordinate measurement device, which detects the position of the mounting object table in the 2-dimensional movement coordinate system, a height measurement device, which detects the deviation in the optical axis direction of the projection optical system from the surface of the photosensitive substrate to a specified standard surface in a measurement point fixed with regard to the 2-dimensional movement coordinate system, a levelling device, which adjusts the inclination of the mounting object table with regard to the positioning stage, a computation device, which calculates the amount of levelling necessary to match the surface of the photosensitive substrate with the standard surface, a con

Abstract: A stage apparatus comprises a pedestal, an X axis guide bar which is fixed on the pedestal, an X stage which is movable along an upper surface of the pedestal and the guide bar, and a Y stage which is placed over the X state and movable along the pedestal in a direction of the Y axis. Vacuum-pre-loadable static pressure air bearings, in which pressures of vacuum ports are independently controllable, are provided on a surface of the X stage opposing to the pedestal and on another surface of the X stage opposing to the X axis guide bar. By using the stage apparatus, the electric power consumption of driving means for movable units can be reduced, the amount of heat generation can be reduced, and the bearing gap can be adjusted highly accurately after assembling.

Abstract: A jacket is provided to surround coils in a stationary member of a linear motor. An inlet of the jacket is directed toward the optical path of a laser beam from a laser interferometer, and a temperature-controlled fluid is circulated through the jacket. Temperature sensors are provided at the outlet and inlet, respectively, of a temperature controller. The temperature of the fluid supplied to the stationary member is controlled so as to become equal to the temperature around the optical path of the laser beam on the basis of the values of temperature measured by the temperature sensors, thereby suppressing fluctuations of air in the optical path of the laser beam. An exhaust groove is provided in a guide bar transport member so as to surround a bearing surface around a gas outlet, and partition walls flush with the bearing surface are provided outside the exhaust groove.