Patents by Inventor Hideka Banba

Hideka Banba has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for observing specimen and device therefor
    Patent number: 6756589
    Abstract: During closer inspection with a local defect area being magnified, it is desirable to reduce image acquisition time by making the number of stage moves as few as possible so that a defect can be observed efficiently.
    Type: Grant
    Filed: January 9, 2001
    Date of Patent: June 29, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Kenji Obara, Yuji Takagi, Atsushi Shimoda, Ryou Nakagaki, Seiji Isogai, Yasuhiko Ozawa, Hideka Banba, Kenji Watanabe, Chie Shishido