Patents by Inventor Hidekazu Motoya

Hidekazu Motoya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Colored ceramic vacuum chuck and manufacturing method thereof
    Patent number: 8899564
    Abstract: In the present invention, a ceramic vacuum chuck 2 having an upper surface for adsorbing a substrate is formed from a colored ceramic sintered body comprising 55-75% by weight alumina (Al2O3), at least 3% by weight Si in terms of oxide (SiO2), at least 0.4% by weight Ca in terms of oxide (CaO), at least 0.4% by weight Mg in terms of oxide (MgO), coloring agent, and 1% or less of impurities. A plurality of pins 4 for supporting the substrate, and a rim 6 are formed on the upper surface by shot blasting using abrasive grains, and the whole of the upper surface is shot peened using spherical particles.
    Type: Grant
    Filed: February 19, 2010
    Date of Patent: December 2, 2014
    Assignee: Sodick Co., Ltd.
    Inventors: Yoshiharu Ishimi, Hidekazu Motoya, Kiyoka Suzuki
  • COLORED CERAMIC VACUUM CHUCK AND MANUFACTURING METHOD THEREOF
    Publication number: 20120193878
    Abstract: In the present invention, a ceramic vacuum chuck 2 having an upper surface for adsorbing a substrate is formed from a colored ceramic sintered body comprising 55-75% by weight alumina (Al2O3), at least 3% by weight Si in terms of oxide (SiO2), at least 0.4% by weight Ca in terms of oxide (CaO), at least 0.4% by weight Mg in terms of oxide (MgO), coloring agent, and 1% or less of impurities. A plurality of pins 4 for supporting the substrate, and a rim 6 are formed on the upper surface by shot blasting using abrasive grains, and the whole of the upper surface is shot peened using spherical particles.
    Type: Application
    Filed: February 19, 2010
    Publication date: August 2, 2012
    Applicant: SODICK CO., LTD.
    Inventors: Shigemi Suzuki, Yoshiharu Ishimi, Hidekazu Motoya, Kiyoka Suzuki