Abstract: In one embodiment, a charged particle beam writing apparatus includes a storage storing coefficients of a calculation formula for calculating a correction amount of a beam emission position according to an atmospheric pressure, a correction amount calculator calculating a correction amount of the beam emission position from a measured value of an atmospheric pressure sensor and the calculation formula using the coefficients, a writer writing a pattern on a substrate using a charged particle beam with the beam emission position adjusted based on shot data and the correction amount, a correction residual calculator calculating a correction residual for the emission position of the charged particle beam using a result of detection by a detector, and an updater updating the coefficients, when there is correlation between change in the correction residual and change in the atmospheric pressure.

Abstract: Even in a case in which a comb-teeth shape is provided at an end portion of a cover covering an opening in a magnetic shield case that accommodates a magnetic sensor, the present disclosure obtains a magnetic sensor device and a housing therefor capable of maintaining the strength of a comb-teeth portion. The magnetic sensor device and the housing therefor include: a comb-teeth portion in which protrusions are formed in the shape of comb teeth along an intersecting direction intersecting a conveying direction, the comb-teeth portion being formed at an end portion of a cover with respect to the conveying direction, the cover covering an opening in a magnetic shield case that accommodates a magnetic sensor; and support members formed on a lateral face of the magnetic shield case, the support members supporting the protrusions on the side opposite to the conveying path.

Abstract: First data and second data are transmitted by a simple configuration by including a generation unit that generates a wavelength-changed signal on the basis of the second data, and a transmission unit that transmits the wavelength-changed signal together with a first signal that indicates the first data.

Abstract: A capacitance detection device includes a first electrode and a second electrode that at least partially face each other on opposite sides of a transfer path. An oscillator circuit forms an electric field between the first electrode and the second electrode. A detection circuit detects a change in capacitance between the first electrode and the second electrode. At least one of the oscillator circuit and the detection circuit is included in each of a first board and a second board. The first board is disposed such that a side surface of the first board faces the first electrode in an electric field direction, and the second board is disposed such that a side surface of the second board faces the second electrode in the electric field direction.

Abstract: In one embodiment, a charged particle beam writing apparatus includes a deflector deflecting a charged particle beam, a first correcting lens and a second correcting lens correcting a focus position of the charged particle beam, a focus correction amount calculator calculating a first correction amount for the focus position according to a change in a height position of a sample surface, and calculating a second correction amount for the focus position according to a change in shot size of the charged particle beam, a first DAC (digital to analog converter) amplifier applying a voltage for a ground potential based on the first correction amount to the first correcting lens, and a second DAC amplifier applying a voltage for a ground potential based on the second correction amount to the second correcting lens, an output of the second DAC amplifier being smaller than an output of the first DAC amplifier.

Abstract: A capacitance detection device includes a first electrode and a second electrode that at least partially face each other on opposite sides of a transfer path. An oscillator circuit forms an electric field between the first electrode and the second electrode. A detection circuit detects a change in capacitance between the first electrode and the second electrode. At least one of the oscillator circuit and the detection circuit is included in each of a first board and a second board. The first board is disposed such that a side surface of the first board faces the first electrode in an electric field direction, and the second board is disposed such that a side surface of the second board faces the second electrode in the electric field direction.

Abstract: A capacitance detection device includes a first electrode and a second electrode that at least partially face each other on opposite sides of a transfer path. An oscillator circuit forms an electric field between the first electrode and the second electrode. A detection circuit detects a change in capacitance between the first electrode and the second electrode. At least one of the oscillator circuit and the detection circuit is included in each of a first board and a second board. The first board is disposed such that a side surface of the first board faces the first electrode in an electric field direction, and the second board is disposed such that a side surface of the second board faces the second electrode in the electric field direction.

Abstract: A capacitance detection device includes a first electrode and a second electrode that at least partially face each other on opposite sides of a transfer path. An oscillator circuit forms an electric field between the first electrode and the second electrode. A detection circuit detects a change in capacitance between the first electrode and the second electrode. At least one of the oscillator circuit and the detection circuit is included in each of a first board and a second board. The first board is disposed such that a side surface of the first board faces the first electrode in an electric field direction, and the second board is disposed such that a side surface of the second board faces the second electrode in the electric field direction.

Abstract: A magnetic sensor device includes: a magnetic circuit for forming a magnetic field, a magnetoresistance effect element, and a heat dissipater. The magnetoresistance effect element outputs changes in the magnetic field as changes in a resistance value, and is arranged on a surface (of a +Z side) of the magnetic circuit at a conveyance path side thereof. The heat dissipater is arranged in close contact with the magnetic circuit at the opposite side thereof (?Z side) from the conveyance path.

Abstract: A magnetic sensor device includes: a magnet; a magnetic-resistance-effect-element mounted substrate on which a magnetic-resistance-effect-element mounted body is mounted on a surface thereof opposite to a surface thereof facing the magnet, the magnetic-resistance-effect-element mounted body extending in the longitudinal direction of the magnet; a case that accommodates or retains the magnet and the magnetic-resistance-effect-element mounted substrate; and a magnetic shield that covers the case except for the surface of the magnetic-resistance-effect-element mounted substrate on which is mounted the magnetic-resistance-effect-element mounted body. The magnetic shield covers the case at a position corresponding to the surface of the magnetic-resistance-effect-element mounted substrate facing the magnet, or from the position corresponding to the surface of the magnetic-resistance-effect-element mounted substrate facing the magnet to a side of the case opposite to the magnet.

Abstract: A transmit-and-receive module includes a wiring substrate, a low-noise amplifier, a power amplifier, an insulating resin, and a conductive shield. The wiring substrate has a first surface and a second surface which is a back side of the first surface. The low-noise amplifier includes a first signal terminal and a first ground terminal. The first signal terminal is surface-mounted on the first surface. The power amplifier includes a second signal terminal and a second ground terminal. The second signal terminal and the second ground terminal are surface-mounted on the first surface. The insulating resin covers the low-noise amplifier and the power amplifier. The conductive shield covers a surface of the insulating resin. The first ground terminal is connected to the conductive shield.

Abstract: A magnetic sensor device that includes: a bar-shaped magnet; a soft magnetic carrier that is arranged parallel to magnet along the longitudinal direction of magnet, that has a magnetoresistive effect element on a surface thereof opposite to a surface facing magnet, and that extends across the lateral length of magnet; and a guide that has a bottom interposed between magnet and carrier and a side wall standing upright from the bottom along a side of magnet contacting a surface of magnet facing carrier, the bottom and the side wall being formed of a nonmagnetic body contacting magnet and extending in the longitudinal direction of magnet. The magnet is attracted to and held by the carrier, with the guide interposed therebetween, due to the magnetic attractive force between the magnet and the carrier.

Abstract: A magnetic sensor device including: a board mounted with a magnetoresistive effect element, a magnet to form a bias magnetic field for the magnetoresistive effect element, an enclosure having an opening on a side of a conveyance path where a to-be-detected object is conveyed, also including a housing portion to house the magnet and the board, and a cover to cover a surface on a side of the opening of the housing portion. The enclosure includes step portions on which the board is supported such that the board lies across the opening and extends parallel to the conveyance path, and grooves, continuous with the step portions, extending from the opening to an outer surface of the enclosure on a side of the conveyance direction.

Abstract: A magnetic sensor device that includes: a bar-shaped magnet; a soft magnetic carrier that is arranged parallel to magnet along the longitudinal direction of magnet, that has a magnetoresistive effect element on a surface thereof opposite to a surface facing magnet, and that extends across the lateral length of magnet; and a guide that has a bottom interposed between magnet and carrier and a side wall standing upright from the bottom along a side of magnet contacting a surface of magnet facing carrier, the bottom and the side wall being formed of a nonmagnetic body contacting magnet and extending in the longitudinal direction of magnet. The magnet is attracted to and held by the carrier, with the guide interposed therebetween, due to the magnetic attractive force between the magnet and the carrier.

Abstract: A method of detecting clogging of a chuck table includes an imaging step of capturing an image of a holding surface of the chuck table while air and water are being ejected to the holding surface of the chuck table, an image processing step of binarizing the captured image into a binary image, and a decision step of deciding a clogged ratio of the chuck table on the basis of the binary image.

Abstract: A transmit-and-receive module includes a wiring substrate, a low-noise amplifier, a power amplifier, an insulating resin, and a conductive shield. The wiring substrate has a first surface and a second surface which is a back side of the first surface. The low-noise amplifier includes a first signal terminal and a first ground terminal. The first signal terminal is surface-mounted on the first surface. The power amplifier includes a second signal terminal and a second ground terminal. The second signal terminal and the second ground terminal are surface-mounted on the first surface. The insulating resin covers the low-noise amplifier and the power amplifier. The conductive shield covers a surface of the insulating resin. The first ground terminal is connected to the conductive shield.

Abstract: First data and second data are transmitted by a simple configuration by including a generation unit that generates a wavelength-changed signal on the basis of the second data, and a transmission unit that transmits the wavelength-changed signal together with a first signal that indicates the first data.