Abstract: Provided are a novel method and device for treating a liquid that can be utilized for treating ballast water used in ships, etc. The method and device for treating a liquid provided herein allow aquatic organisms contained in a liquid to be sufficiently inactivated or separated by being configured in such a manner as to, in supplying the liquid containing aquatic organisms, carry out at least one of an aquatic organism-inactivating treatment and a physical treatment using a centrifugal force and then store the liquid in a storage means, and in discharging the liquid thus stored, determine whether or not the aquatic organism-inactivating treatment is required, carry out the treatment based on the determination, and carry out the physical treatment using a centrifugal force.

Abstract: When a plurality of cyclones are used as a separation device of a water treatment device, there have been as many lower liquid containers as the number of cyclones, resulting in high cost. Provided is a centrifugal solid-liquid separation device including: a plurality of cyclones respectively having at least a liquid inlet, a liquid outlet, and a lower liquid port; and a lower liquid container communicating with the respective lower liquid ports of the plurality of cyclones via pipes, arranged below the plurality of cyclones, and having a drain hole in its bottom side. The lower liquid container includes a space forming portion above lower opening ends of the pipes. Also provided is a water treatment device using this centrifugal solid-liquid separation device.

Abstract: To provide a voltage-type device for killing microorganisms in which a microorganism killing effect is high and scale is less likely to clog up through holes in electrodes. The device for killing microorganisms includes: a main body which a liquid to be treated flows in at one end and flows out at the other end; opposed electrodes that are arranged in the main body in parallel with a flow of the liquid to be treated and have mutually-opposed through holes; and a voltage source of which an anode is connected to one of the opposed electrodes and a cathode is connected to the other of them. When a straightened liquid to be treated is passed through the device for killing microorganisms, a stirring action is produced between the opposed electrodes, whereby hypochlorous acid can be diffused throughout the entire device and a high killing effect can be obtained.

Abstract: A novel method and device for treating a liquid are provided, wherein a concentrated liquid recovered using a centrifugal separation method can be utilized as ballast water. The present disclosure relates to a method for treating a liquid that comprises a storage step including carrying out a physical treatment using a centrifugal force with respect to a supply liquid to be supplied to a storage means located inside a housing, wherein the method comprises carrying out an aquatic organism-inactivating treatment contained in a concentrated liquid obtained by the physical treatment using a centrifugal force and supplying to the storage means the concentrated liquid subjected to the aquatic organism-inactivating treatment.

Abstract: When a plurality of cyclones are used as a separation device of a water treatment device, there have been as many lower liquid containers as the number of cyclones, resulting in high cost. Provided is a centrifugal solid-liquid separation device including: a plurality of cyclones respectively having at least a liquid inlet, a liquid outlet, and a lower liquid port; and a lower liquid container communicating with the respective lower liquid ports of the plurality of cyclones via pipes, arranged below the plurality of cyclones, and having a drain hole in its bottom side. The lower liquid container includes a space forming portion above lower opening ends of the pipes. Also provided is a water treatment device using this centrifugal solid-liquid separation device.

Abstract: To provide a voltage-type device for killing microorganisms in which a microorganism killing effect is high and scale is less likely to clog up through holes in electrodes. The device for killing microorganisms includes: a main body which a liquid to be treated flows in at one end and flows out at the other end; opposed electrodes that are arranged in the main body in parallel with a flow of the liquid to be treated and have mutually-opposed through holes; and a voltage source of which an anode is connected to one of the opposed electrodes and a cathode is connected to the other of them. When a straightened liquid to be treated is passed through the device for killing microorganisms, a stirring action is produced between the opposed electrodes, whereby hypochlorous acid can be diffused throughout the entire device and a high killing effect can be obtained.

Abstract: A novel method and device for treating a liquid are provided, wherein a concentrated liquid recovered using a centrifugal separation method can be utilized as ballast water. The present disclosure relates to a method for treating a liquid that comprises a storage step including carrying out a physical treatment using a centrifugal force with respect to a supply liquid to be supplied to a storage means located inside a housing, wherein the method comprises carrying out an aquatic organism-inactivating treatment contained in a concentrated liquid obtained by the physical treatment using a centrifugal force and supplying to the storage means the concentrated liquid subjected to the aquatic organism-inactivating treatment.

Abstract: Provided are a novel method and device for treating a liquid that can be utilized for treating ballast water used in ships, etc. The method and device for treating a liquid provided herein allow aquatic organisms contained in a liquid to be sufficiently inactivated or separated by being configured in such a manner as to, in supplying the liquid containing aquatic organisms, carry out at least one of an aquatic organism-inactivating treatment and a physical treatment using a centrifugal force and then store the liquid in a storage means, and in discharging the liquid thus stored, determine whether or not the aquatic organism-inactivating treatment is required, carry out the treatment based on the determination, and carry out the physical treatment using a centrifugal force.

Abstract: A gate valve includes a plate-shaped valve element which is rectangular-shaped to suit the shape of an opening of a processing chamber and has a size larger than the opening. A hermetically sealing member to perform hermetic sealing by abutting on and being pressed against an outer side of the processing chamber is provided in the valve element. A microwave reflecting mechanism which is formed in a groove shape so as to surround a periphery of the hermetically sealing member is provided at an outer peripheral portion of the hermetically sealing member.

Abstract: A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

Abstract: A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

Abstract: A gate valve includes a plate-shaped valve element which is rectangular-shaped to suit the shape of an opening of a processing chamber and has a size larger than the opening. A hermetically sealing member to perform hermetic sealing by abutting on and being pressed against an outer side of the processing chamber is provided in the valve element. A microwave reflecting mechanism which is formed in a groove shape so as to surround a periphery of the hermetically sealing member is provided at an outer peripheral portion of the hermetically sealing member.

Abstract: A gate valve includes a plate-shaped valve element which is rectangular-shaped to suit the shape of an opening of a processing chamber and has a size larger than the opening. A hermetically sealing member to perform hermetic sealing by abutting on and being pressed against an outer side of the processing chamber is provided in the valve element. A microwave reflecting mechanism which is formed in a groove shape so as to surround a periphery of the hermetically sealing member is provided at an outer peripheral portion of the hermetically sealing member.

Abstract: A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

Abstract: A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

Abstract: A partial pressure control system 45 includes two valves 2 which are branched from an operation gas supply pipe 44 and which variably control operation gas, pressure sensors 3 which are respectively connected to the each valves 2 in series and which detect pressure of the operation gas, and a controller 25 which proportionally controls the operation of the valves 2 based on detection result of the pressure sensors 3, thereby relatively controlling pressures P1 and P2 of the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

Abstract: Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened.

Abstract: A gate valve includes a plate-shaped valve element which is rectangular-shaped to suit the shape of an opening of a processing chamber and has a size larger than the opening. A hermetically sealing member to perform hermetic sealing by abutting on and being pressed against an outer side of the processing chamber is provided in the valve element. A microwave reflecting mechanism which is formed in a groove shape so as to surround a periphery of the hermetically sealing member is provided at an outer peripheral portion of the hermetically sealing member.

Abstract: Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard-interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened.

Abstract: A semiconductor processing system includes a processing chamber, a gas exhaust unit, a gas supply unit, a flow rate controller, a flow rate measuring unit for inspecting the flow rate controller, and a control unit for controlling the processing system. The flow rate measuring unit contains an inspection vessel, a pressure gauge, and a flow rate calculation unit, and the control unit is configured to purge the inspection vessel before or after flowing the processing gas into thereto. Further, an inspecting method of the flow rate controller in the semiconductor processing system includes the steps of flowing the processing gas to the inspection vessel, detecting an inner pressure of the inspection vessel, obtaining a gas flow rate of the flow rate controller, and performing a purge process on the inspection vessel.