Abstract: A capacitance-type pressure sensor capable of reducing a variation in reference capacitance. The capacitance-type pressure sensor includes insulating spacer (3b) arranged between a main capacitive electrode (4) and a reference capacitive electrode (5) to couple a base substrate (1) and a diaphragm substrate (2) to each other. The insulating spacer (3b) is patterned so as to restrain a variation in distance between the reference capacitive electrode (5) and a counter electrode (10) arranged on the diaphragm substrate (2). Such construction reduces a variation in capacitance between the reference capacitive electrode (5) and the diaphragm electrode (10), to thereby increase accuracy at which a pressure is measured.

Abstract: The present invention provides a pressure sensor module which is capable of restraining application of a pressure of increased magnitude to a connector, reducing the number of parts therefor and compacting a structure thereof. A connector body (3a) is provided on a base section thereof with a flange (3g). An annular support (4) which is made of a material hard to be deformed under a high pressure as compared with the connector body (3a) is provided with an annular engagement recess (4b). The annular support (4) is fitted on the connector body (3a) to engage the flange (3g) with the annular engagement recess (4b). The annular support (4) is contacted on one end surface (4a) thereof with a pressure non-sensing side insulating substrate (5a) of a pressure sensing element (5) outside the base section of the connector body (3a).