Abstract: A vacuum process apparatus includes a plurality of cassettes for holding samples, a transporter which transports the samples, a plurality of vacuum process chambers each for processing samples one by one, an evacuator which evacuates the vacuum process chambers, and a load chamber and an unload chamber communicating with the vacuum process chambers. An apparatus controller is provided for controlling transporting and processing of the samples. The apparatus controller measures a time period for transporting each of the samples and a processing time period for processing a sample in each of the vacuum process chambers, and determines a next order of extraction of the samples from the plurality of cassettes based on the measured time periods.

Abstract: An image processing apparatus for generating scaled image data includes a receiver that receives an input of pixel value information of each pixel which is contained in image data to be processed in raster scan order, a first memory that stores the pixel value information input in the raster scan order, a destination address generator that generates destination address information in the second memory to specify a destination location of the pixel value information stored in the first memory in response to the specified scaling factor, and a transferring unit that transfers the pixel value information from the first memory to the second memory based on the generated destination address information.

Abstract: A method of operating vacuum processing equipment that includes multiple sets of apparatus for performing a succession of different processes on individual wafers, an apparatus for transporting said wafers, and an apparatus for controlling said processing apparatus sets and said transport apparatus, and has at least two sets of wafer processing routes including multiple sets of said processing apparatus; wherein it is possible to judge whether each set of said processing apparatus for performing various processes is in a valid or invalid status for operation, to electrically disconnect only the processing apparatus whose operational status has been judged to be invalid, to reconstruct said processing routes by using the processing apparatus whose operational status has been judged to be valid, and to process said wafers by using only said processing apparatus which is valid for operation.

Abstract: A vacuum process apparatus has a plurality of cassettes for holding samples; a transporting means for transporting the samples; a plurality of vacuum process chambers each for processing samples one by one; an evacuation means for evacuating the vacuum process chambers; a load chamber and an unload chamber communicating with the vacuum process chambers; and an apparatus control means for controlling transporting and processing of the samples. The apparatus control means operates to measure a time period of transporting each of the samples and a time period of processing in each of the vacuum process chambers, and determines a next extracting order of extraction of the samples from the plurality of cassettes based on the measured time periods.

Abstract: Disclosed is a rubbery polymer comprising a conjugated diene polymer, and bonded thereto, a lithium-detached residue of a lithium-containing organic polymer used as a catalyst in the production of the conjugated diene polymer, wherein the lithium-containing organic polymer is obtained by reacting an organolithium compound with a first polymerizable material comprising at least one conjugated diene monomer and a second polymerizable material comprising at least one aromatic vinyl compound, which second polymerizable material contains at least one multi-vinyl aromatic compound having at least two vinyl groups, and wherein the lithium-containing organic polymer has a specific narrow molecular weight distribution.