Abstract: An object processing apparatus comprising a chamber that has an internal space able to be depressurized and is configured such that a target object is subjected to a plasma treatment in the internal space; a first electrode that is disposed in the chamber and on which the target object is to be mounted; a first power supply that applies a bias voltage of negative potential to the first electrode; a gas introduction device that introduces a processing gas into an inside of the chamber; and a pumping device that depressurizes the inside of the chamber. A cover is provided between the first electrode and the target object so as to cover the first electrode. A spacer is located between the first electrode and the cover, and is disposed so as to occupy a localized region.

Abstract: There is provided a holding apparatus which is capable of rotatably holding, while cooling to a cryogenic temperature, a to-be-processed object in a vacuum chamber. A holding apparatus for rotatably holding, while cooling, a to-be-processed object in a vacuum chamber Vc, has a stage on which the to-be-processed object is placed, a rotary drive device for rotatably supporting the stage, and a cooling device for cooling the stage. Provided that a stage surface side on which the to-be-processed object is placed is defined as an upside, the rotary drive device has: a tubular rotary shaft body which is mounted on a wall surface of the vacuum chamber, in a penetrating manner, through a first vacuum seal; a connection member for connecting an upper end part of the rotary shaft body and a lower surface of the stage in a manner to define a space below the stage; and a driving motor for driving to rotate the rotary shaft body.

Abstract: There is provided a holding apparatus which is capable of rotatably holding, while cooling to a cryogenic temperature, a to-be-processed object in a vacuum chamber. A holding apparatus for rotatably holding, while cooling, a to-be-processed object in a vacuum chamber Vc, has a stage on which the to-be-processed object is placed, a rotary drive device for rotatably supporting the stage, and a cooling device for cooling the stage. Provided that a stage surface side on which the to-be-processed object is placed is defined as an upside, the rotary drive device has: a tubular rotary shaft body which is mounted on a wall surface of the vacuum chamber, in a penetrating manner, through a first vacuum seal; a connection member for connecting an upper end part of the rotary shaft body and a lower surface of the stage in a manner to define a space below the stage; and a driving motor for driving to rotate the rotary shaft body.

Abstract: There is provided a method of manufacturing an electrostatic chuck which is free from fluctuations in performance or incomplete detachment from the beginning of use, without being influenced by the impurities that remain on the surface of, or in the inside of, a dielectric layer at the time of manufacturing thereof, in case the dielectric layer which comes into contact with an article to be held by the electrostatic chuck is made of silicone rubber or resin. Before assembling the dielectric layer into the surface of a base having disposed thereon an electrode, or after the dielectric layer has been assembled into the surface of the base, a step is performed in which a heating plate that has been heated to a predetermined temperature is pressed against the contact surface of the dielectric layer.

Abstract: A method and apparatus including an easily installed spiral support useful laying a cable. The spiral support is composed of a counterclockwise spiral portion and a clockwise spiral portion, both of which are connected to each other with a reverse portion therebetween. The spiral support is installed on a messenger wire in such a way that the reverse portion is fitted on the messenger wire; the spiral support is rotated counterclockwise or clockwise; and these steps are repeated.

Abstract: A method and apparatus including an easily installed spiral support useful laying a cable. The spiral support is composed of a counterclockwise spiral portion and a clockwise spiral portion, both of which are connected to each other with a reverse portion therebetween. The spiral support is installed on a messenger wire in such a way that the reverse portion is fitted on the messenger wire; the spiral support is rotated counterclockwise or clockwise; and these steps are repeated.