Abstract: A microcomputer is provided, which can load data of different areas in parallel and transfer the loaded data to a storage circuit. The microcomputer includes a CPU to control a DRIs each of which loads image data of a prescribed area out of image data inputted from a camera and transfers the image data to a memory blocks, and the DRIs each of which transfers image data of respectively different area out of the image data inputted from camera to the memory blocks. Therefore, it becomes possible to load image data of different areas in parallel and to transfer the loaded image data to the memory blocks.

Abstract: An apparatus includes a steering assist torque determination unit and a steering assist torque control unit. The steering assist torque determination unit determines a steering assist torque including a first component that is determined on the basis of a deviation between an actual steering angle and a target steering angle for achieving a target path determined irrespective of driver's steering. The steering assist torque control unit controls a steering assist mechanism such that the steering assist torque is applied. The ratio of the magnitude of the first component of the steering assist torque to the deviation between the target steering angle and the actual steering angle is determined on the basis of the magnitude of the deviation between the steering assist torque and the driver's steering torque in a past predetermined period.

Abstract: A multi charged particle beam writing apparatus includes a maximum irradiation time acquisition processing circuitry to acquire, for each shot of multi-beams, a maximum irradiation time of irradiation time of each of the multi-beams, a unit region writing time calculation processing circuitry to calculate, using the maximum irradiation time for each shot, a unit region writing time by totalizing the maximum irradiation time of each shot of a plurality of times of shots of the multi-beams which irradiate a unit region concerned during stage moving, for each unit region of a plurality of unit regions obtained by dividing a writing region of a target object, a stage speed calculation processing circuitry to calculate speed of the stage for each unit region so that the stage speed becomes variable, by using the unit region writing time and a stage control processing circuitry to variably control the stage speed.

Abstract: A multi charged particle beam writing method includes performing ON/OFF switching of a beam by an individual blanking system for the beam concerned, for each beam in multi-beams of charged particle beam, with respect to each time irradiation of irradiation of a plurality of times, by using a plurality of individual blanking systems that respectively perform beam ON/OFF control of a corresponding beam in the multi-beams, and performing blanking control, in addition to the performing ON/OFF switching of the beam for the each beam by the individual blanking system, with respect to the each time irradiation of the irradiation of the plurality of times, so that the beam is in an ON state during an irradiation time corresponding to irradiation concerned, by using a common blanking system that collectively performs beam ON/OFF control for a whole of the multi-beams.

Abstract: A shot data generation method includes inputting writing data for writing a pattern on a target object with multi charged particle beams, and generating shot data for each beam of the multi charged particle beams by converting the writing data and using one of a first code indicating a first irradiation time period having been set beforehand, a second code indicating an irradiation time period being zero, and a third code indicating neither the first irradiation time period nor the irradiation time period being zero.

Abstract: A vehicle control apparatus includes: a storage apparatus configured to store a steering modification point of a vehicle and a vehicle speed target point of the vehicle that are associated with map information; and an electronic control unit configured to: detect a position of the vehicle; detect a travel direction of the vehicle; calculate a lane travel distance, the position of the vehicle, and the travel direction of the vehicle; generate, lane travel map data, a target direction of the vehicle, and a target vehicle speed of the vehicle, on the basis of the map information, the steering modification point, the vehicle speed target point, the position of the vehicle, and the travel direction of the vehicle; and output a control signal to control the vehicle on the basis of the position of the vehicle, the lane travel distance of the vehicle, and the lane travel map data.

Abstract: According to one embodiment, in a multi-charged particle beam writing apparatus, a blanking plate includes a plurality of first buffers connected in series, second buffers in a plurality of stages connected in series between the first buffer and a blanker, and an error detection processing circuitry performing error detection on data stored in the first buffer and the second buffers. The blanking control data transfers to the corresponding blanker via the first buffer and the second buffers. In a case where the error detection processing circuitry detects an error, the control processing circuitry retransmits the blanking control data to the blanking plate with regard to a shot having the error detected therein and a shot which comes, in a shot order, after the shot having the error detected therein.

Abstract: An apparatus as an aspect of the invention acquires a vehicle motion index value, a driving state index value of a driver, a driving characteristic value that is estimated based on the vehicle motion index value and the driving state index value, and a vehicle motion target value and a driving state target value that are determined regardless of the driver's driving. Using these values, the apparatus determines a target value of a steering assist torque and a target value of a difference in braking/driving force between right and left wheels that converge at least one of a difference between the vehicle motion target value and the vehicle motion index value and a difference between the driving state target value and the driving state index value. The apparatus controls the steering assist torque and the difference in braking/driving force between the right and left wheels to their respective target values.

Abstract: In a driving support system of a vehicle, there is provided a structure that, even during operating a control based on a machine input, a driver's sense of incongruity can be reduced as much as possible and/or the steering of the driver be can reflected. The vehicle is equipped with a steering assist mechanism and a braking-driving force distribution mechanism of right and left wheels. In operations of the inventive device, a steering assist torque, applied by the steering assist mechanism, is controlled to a target value determined with reference to a target steering torque to achieve the target route, determined without depending on steering of a driver, and a driver's steering torque; and a braking-driving force difference between the right and left wheels is controlled to a target value based on a steering angle of the driver.

Abstract: A multi charged particle beam writing apparatus includes a dividing circuitry to divide first irradiation time data into k pieces of second irradiation time data, where each of the k pieces of second irradiation time data has a different number of bits and the total of different numbers of bits is n-bits, in multi-pass writing of k or more passes by using multi charged particle beams, a data transmission circuitry to transmit, for each of k passes, corresponding second irradiation time data, for a beam concerned in multi charged particle beams, a resolution information transmission circuitry to transmit, for each of k passes, corresponding resolution information, and an irradiation time calculation circuitry to calculate an irradiation time of a corresponding beam in the multi charged particle beams of a pass concerned by using input second irradiation time data and resolution information.

Abstract: There is provided a structure in a driving support system of a vehicle equipped with a steering assist mechanism and a torque vectoring mechanism of right and left wheels, the system capable of reducing an occurrence of a driver's sense of incongruity as much as possible also during the operation of a control based on a machine input and reflecting a driver's steering in the control. The inventive device comprises a steering assist torque controller which controls a steering assist torque given by the steering assist mechanism, a right and left braking-driving force difference controller which controls the braking-driving force difference between the right and left wheels given by the torque vectoring mechanism and a control target value determiner which determines the target values of the steering assist torque and braking-driving force difference for driving support control, based on the steering torque by the driver.

Abstract: A multi charged particle beam writing apparatus includes a modulation rate data calculation processing circuitry to calculate, for each pixel being a unit region, a modulation rate of a beam to a pixel concerned and each modulation rate of a beam to at least one pixel at a periphery of the pixel concerned, and a corrected-dose calculation processing circuitry to calculate, for the each pixel, a corrected dose by adding a multiplied value obtained by multiplying the modulation rate of the pixel concerned in a modulation rate map by beam dose to the pixel concerned, and a multiplied value obtained by multiplying the modulation rate of the pixel concerned which becomes one of the at least one pixel at the periphery with respect to another pixel defined for the position of the pixel concerned by a beam dose to the another pixel.

Abstract: A multi charged particle beam writing apparatus includes a deflector to collectively deflect each beam in an “on” state, by tracking control in such a way as to follow stage movement, an obtaining processing circuitry to obtain a deviation amount of an irradiation position of each beam of multi-beams depending on a tracking amount of the tracking control, a correction coefficient calculation processing circuitry to calculate a correction coefficient for correcting the deviation amount of the irradiation position depending on the tracking amount, for each beam of the multi-beams and for each irradiation position, a shot data generation processing circuitry to generate shot data where deviation of an irradiation position of each beam of multi-beams depending on a tracking amount is to be corrected using a correction coefficient, for each tracking operation, and a deflection control processing circuitry to control plural blankers, based on the shot data.

Abstract: A charged particle beam writing apparatus includes a first limiting aperture member, in which a first opening is formed, to block a charged particle beam having been blanking-controlled to be beam “off”, and to let a part of the charged particle beam having been blanking-controlled to be beam “on” pass through the first opening, a first detector to detect a first electron amount irradiating the first limiting aperture member, in a state where beam “on” and beam “off” are repeated, a first integration processing unit to generate a first integrated signal by integrating components in a band sufficiently lower than a band of a repetition cycle of beam “on” and beam “off”, in a first detected signal detected for obtaining the first electron amount, and a first irregularity detection unit to detect irregularity in a dose amount of the charged particle beam by using the first integrated signal.

Abstract: A multi charged particle beam writing method includes performing ON/OFF switching of a beam by an individual blanking system for the beam concerned, for each beam in multi-beams of charged particle beam, with respect to each time irradiation of irradiation of a plurality of times, by using a plurality of individual blanking systems that respectively perform beam ON/OFF control of a corresponding beam in the multi-beams, and performing blanking control, in addition to the performing ON/OFF switching of the beam for the each beam by the individual blanking system, with respect to the each time irradiation of the irradiation of the plurality of times, so that the beam is in an ON state during an irradiation time corresponding to irradiation concerned, by using a common blanking system that collectively performs beam ON/OFF control for a whole of the multi-beams.

Abstract: A multi charged particle beam writing method includes performing ON/OFF switching of a beam by an individual blanking system for the beam concerned, for each beam in multi-beams of charged particle beam, with respect to each time irradiation of irradiation of a plurality of times, by using a plurality of individual blanking systems that respectively perform beam ON/OFF control of a corresponding beam in the multi-beams, and performing blanking control, in addition to the performing ON/OFF switching of the beam for the each beam by the individual blanking system, with respect to the each time irradiation of the irradiation of the plurality of times, so that the beam is in an ON state during an irradiation time corresponding to irradiation concerned, by using a common blanking system that collectively performs beam ON/OFF control for a whole of the multi-beams.

Abstract: A driving assist device 1 includes: an information acquisition unit 20 that detects a driving operation of a driver for the vehicle; a driving skill evaluation unit 24 that evaluates a driving skill of the driver on the basis of a history of the driving operation of the driver; and a driving assist control unit 28 that performs the driving assist control for the vehicle on the basis of the traveling state of the vehicle and the target traveling state. When the information acquisition unit 20 detects the driving operation of the driver during the driving assist control, the driving assist control unit 28 limits the amount of driving assist control for the vehicle according to the driving skill of the driver evaluated and reflects the driving operation amount of the driver in traveling control for the vehicle.

Abstract: A charged particle beam writing apparatus includes a first limiting aperture member, in which a first opening is formed, to block a charged particle beam having been blanking-controlled to be beam “off”, and to let a part of the charged particle beam having been blanking-controlled to be beam “on” pass through the first opening, a first detector to detect a first electron amount irradiating the first limiting aperture member, in a state were beam “on” and beam “off” are repeated, a first integration processing unit to generate a first integrated signal by integrating components in a band sufficiently lower than a band of a repetition cycle of beam “on” and beam “off”, in a first detected signal detected for obtaining the first electron amount, and a first irregularity detection unit to detect irregularity in a dose amount of the charged particle beam by using the first integrated signal.

Abstract: A shot data generation method includes inputting writing data for writing a pattern on a target object with multi charged particle beams, and generating shot data for each beam of the multi charged particle beams by converting the writing data and using one of a first code indicating a first irradiation time period having been set beforehand, a second code indicating an irradiation time period being zero, and a third code indicating neither the first irradiation time period nor the irradiation time period being zero.

Abstract: A microcomputer is provided, which can load data of different areas in parallel and transfer the loaded data to a storage circuit. The microcomputer includes a CPU to control a DRIs each of which loads image data of a prescribed area out of image data inputted from a camera and transfers the image data to a memory blocks, and the DRIs each of which transfers image data of respectively different area out of the image data inputted from camera to the memory blocks. Therefore, it becomes possible to load image data of different areas in parallel and to transfer the loaded image data to the memory blocks.