Abstract: A disclose substrate support of a plasma processing apparatus has an electrostatic chuck that holds an edge ring. The electrostatic chuck includes a first electrode and a second electrode. In an execution period of a first plasma processing on a substrate, first potentials which are ones out of potentials same as each other and potentials different from each other are set to the first and second electrodes, respectively. In an execution period of a second plasma processing on the substrate, second potentials which are others out of the potentials same as each other and the potentials different from each other are set to the first and second electrodes, respectively. The respective potentials of the first electrode and the second electrode are switched from the first potentials to the second potentials.

Abstract: A method of displaying an electronic manual which minimizes the labor and time required for displaying a sentence containing a specific character string, particularly when the character string exists in more than one sentence in the electronic manual. Upon retrieval of an item present in plural areas, a sub-window is opened to list all the pages containing the item, partly displaying the contents of one of the listed pages. This allows the user to view and check the brief contents of the other pages prior to determining the page to be fully displayed. The page number can be designated at random and the description can be viewed as many times as required.