Abstract: A substrate processing apparatus includes: at least one processing part for etching a polysilicon film or an amorphous silicon film formed on a substrate using an alkaline chemical liquid; a reservoir configured to recover and store the chemical liquid used in the at least one processing part; processing lines configured to supply the chemical liquid stored in the reservoir to the at least one processing part; a circulation line configured to take out the chemical liquid from the reservoir and to return the same to the reservoir; and a first gas supply line connected to the circulation line and configured to supply an inert gas to the circulation line. The circulation line includes an ejection port configured to eject a mixed fluid of the inert gas supplied by the first gas supply line and the chemical liquid taken out from the reservoir into the chemical liquid stored in the reservoir.

Abstract: A substrate processing apparatus includes a rotary cup that is provided at a substrate holding unit to surround a substrate held thereon and to be rotated along with the substrate holding unit, and configured to guide a processing liquid dispersed from the substrate; and an outer cup that is provided around the rotary cup with a gap therebetween and configured to collect the guided processing liquid by the rotary cup. Further, a height of an upper end of the rotary cup is higher than that of the outer cup. Furthermore, an outward protrusion protruded outwards in a radial direction thereof and extended along a circumference thereof is provided at an upper end portion of an outer surface of the rotary cup, and the outward protrusion blocks mist of the processing liquid dispersed from the gap between the rotary cup and the outer cup toward a space above the substrate.

Abstract: A substrate processing apparatus includes a rotary cup that is provided at a substrate holding unit to surround a substrate held thereon and to be rotated along with the substrate holding unit, and configured to guide a processing liquid dispersed from the substrate; and an outer cup that is provided around the rotary cup with a gap therebetween and configured to collect the guided processing liquid by the rotary cup. Further, a height of an upper end of the rotary cup is higher than that of the outer cup. Furthermore, an outward protrusion protruded outwards in a radial direction thereof and extended along a circumference thereof is provided at an upper end portion of an outer surface of the rotary cup, and the outward protrusion blocks mist of the processing liquid dispersed from the gap between the rotary cup and the outer cup toward a space above the substrate.

Abstract: The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier gas and a supply of a dry vapor into a processing tank holding workpieces. A drying process carries out a carrier gas supply step of supplying the carrier gas and a mixed fluid supply step of supplying a mixed fluid prepared by mixing the carrier gas and the dry vapor alternately. A total mixed fluid supply time for which the mixed fluid supply step is executed is not shorter than 57% of a total processing time for which the carrier gas supply step and the mixed fluid supply step are executed.

Abstract: The present invention provides a drying apparatus capable of satisfactorily drying a workpiece by using a dry vapor The drying apparatus has a control device for controlling a supply of a carrier gas and a supply of a dry vapor into a processing tank holding workpieces. A drying process carries out a carrier gas supply step of supplying the carrier gas and a mixed fluid supply step of supplying a mixed fluid prepared by mixing the carrier gas and the dry vapor alternately. A total mixed fluid supply time for which the mixed fluid supply step is executed is not shorter than 57% of a total processing time for which the carrier gas supply step and the mixed fluid supply step are executed.

Abstract: The present invention provides novel vitamin E derivatives represented by the following formula (I) wherein: R1 and R2 are the same or different and each denotes hydrogen or methyl, R3 denotes an S-linked SH compound (glutathione, &ggr;-glutamylcysteine, cysteine, penicillamine, an ester thereof or cysteamine), and R4 denotes hydroxyl, a N-substituted amino acid (glycine, &bgr;-alanine, &ggr;-aminobutyric acid, 5-aminovaleric acid, &egr;-aminocaproic acid, anthranilic acid, tranexamic acid, proline, an ester thereof, aminoethylsulfonic acid , aminoethylsulfinic acid) or serotonin, or a pharmacologically acceptable salt thereof, which are useful as hepatopathy suppressing agents, anticataract agents, cerebral metabolism improving agents, antioxidants and cosmetic components.

Abstract: A hydroquinone compound is represented by the following formula or a pharmacologically acceptable salt thereof with W, R, R1-4, and B1-2 defined herein.

Abstract: A hydroquinone derivative useful as an intraocular pressure lowering, anti-hypertensive and radical scavenging agent represented by the following formula 1

Abstract: The present invention provides a piperazine derivative of the following formula or a pharmacologically acceptable salt thereof ##STR1## wherein R.sub.1 represents a benzene ring, naphthalene ring, quinoline ring, indole ring or chroman ring that may be substituted by lower alkyl, lower alkoxy and/or hydroxy; R.sub.2 and R.sub.3 independently represent hydrogen or lower alkyl.The compound of the present invention has potent antiallergic activity and can therefore be used with advantage in the treatment of various allergic diseases.

Abstract: 1. A corticoid derivative of the general formula ##STR1## wherein R represents hydrogen, hydroxy, methyl or methylene; inclusive of the acylation product thereof where the 17-position of the steroid skeleton is hydroxy and the ketone form thereof where R is hydroxy, or a physiologically acceptable salt thereof.Since the corticosteroid derivative of this invention is readily soluble in water and has antiallergic, antiinflammatory and antioxidant activities, it can be used with advantage in the prevention and therapy of various allergic diseases, inflammatory diseases, cataract and various ischemic organ diseases.

Abstract: Presented is a novel quinolonecarboxylic acid derivative of the formula I and its pharmaceutically acceptable salt: ##STR1## wherein R.sub.1 is hydrogen, halogen or lower alkoxy, R.sub.2 is hydrogen, lower alkyl, lower alkoxy, --NH.sub.2, --NHCOCH.sub.3 or halogen,R.sub.3 is lower alkyl, and z is a group represented by the formula II or III: ##STR2## wherein R.sub.4 and R.sub.5 are identical or different and are hydrogen or lower alkyl. A method of preparation of these compound and a method of treatment of diseases caused by bacterial infection are also presented.

Abstract: Tocopherol derivatives of the following formula (I) or a pharmacologically acceptable salt thereof ##STR1## wherein R.sub.l and R.sub.2 are the same or different and each represents hydrogen or methyl; R.sub.3 represents an .alpha.-amino acid, .omega.-amino acid, or peptide bonding via the N terminus thereof, except that in the case of cysteine or glutathione which has a thiol group, bonding via the thiol group, are water-soluble and can be expected to be of use as a cerebral function-improving drug and an anticataract drug. Moreover, these compounds are of value as an UV-absorber, a skin care ingredient, or a stabilizer for other cosmetic ingredients.

Abstract: This invention provides a novel steroid derivative having the structure of an ester between the carboxyl group of a quinolonecarboxylic acid and the alcoholic hydroxyl group in 21-position of asteroid compound, which has the following formula (I) (wherein R is a hydrogen atom, a methyl group or a hydroxyl group) or a pharmacologically acceptable salt thereof. ##STR1## The compound of this invention has high antibacterial activity and antiinflammatory activity.