Abstract: A laminated sheet includes a first porous layer including a plurality of fibers of at least one of inorganic fiber or carbonized fiber; and a second porous layer formed of a plurality of organic fibers, wherein the laminated sheet has a surface density of greater than or equal to 400 g/m2 and less than or equal to 1550 g/m2, wherein the second porous layer is formed of the plurality of organic fibers having a mean diameter of fibers being greater than or equal to 0.5 ?m and less than or equal to 14 ?m, and wherein, expressing a total volume of solids and voids filling a unit volume of the second porous layer as 100%, a percentage of the solids is greater than or equal to 1.0% and less than or equal to 8.0%.

Abstract: A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader chamber; a substrate holder configured to hold a substrate in the load lock chamber; a driving mechanism arranged below the load lock chamber to move the substrate holder up and down and connected to the substrate holder via a connecting member; an extension chamber extended from a lower portion of the load lock chamber to a side; and a pump arranged below the extension chamber and configured to discharge a gas in the load lock chamber via the extension chamber. The extension chamber includes a bottom surface with an opening at a position deviated from a vertically lower position of the substrate holder, and the pump is connected to the opening.

Abstract: A load lock device includes a load lock chamber, and a substrate holding structure configured to hold a substrate in the load lock chamber, wherein the substrate holding structure includes a facing surface facing the substrate, and is configured to allow a gas to flow through a space between the substrate and the facing surface, and in a state in which the substrate is held by the substrate holding structure, a distance between the substrate and a portion located inside an outer edge of the facing surface is larger than a distance between the substrate and the outer edge of the facing surface.

Abstract: A sputtering apparatus includes a space defining member defining a sputtering space for forming a film on a substrate. The space defining member includes a concave portion, and an opening portion is provided in the bottom portion of the concave portion. The sputtering apparatus includes a shield member configured to shield the opening portion from the sputtering space. The opening portion is formed so that a pressure gauge capable of measuring the pressure in the sputtering space can be attached, and the shield member is arranged so that at least a part of the shield member is buried in the concave portion.

Abstract: A sputtering apparatus includes a space defining member defining a sputtering space for forming a film on a substrate. The space defining member includes a concave portion, and an opening portion is provided in the bottom portion of the concave portion. The sputtering apparatus includes a shield member configured to shield the opening portion from the sputtering space. The opening portion is formed so that a pressure gauge capable of measuring the pressure in the sputtering space can be attached, and the shield member is arranged so that at least a part of the shield member is buried in the concave portion.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for ranking events. One of the methods includes receiving data identifying a physical location; obtaining data identifying a plurality of events occurring in the physical location during a particular time period; computing a respective plurality of signal scores for each of the events, wherein computing the respective plurality of signal scores for each of the events comprises computing a first signal score for each of the events based at least in part on a count of Internet sites that include at least one mention of the event; computing a respective popularity score for each of the plurality of events by combining the respective plurality of signal scores for the event; and generating a ranking of events occurring in the physical location during the particular time period based at least in part on the popularity scores.

Abstract: Methods, systems, and apparatus, including computer programs encoded on a computer storage medium, for ranking events. One of the methods includes receiving data identifying a physical location; obtaining data identifying a plurality of events occurring in the physical location during a particular time period; computing a respective plurality of signal scores for each of the events, wherein computing the respective plurality of signal scores for each of the events comprises computing a first signal score for each of the events based at least in part on a count of Internet sites that include at least one mention of the event; computing a respective popularity score for each of the plurality of events by combining the respective plurality of signal scores for the event; and generating a ranking of events occurring in the physical location during the particular time period based at least in part on the popularity scores.