Patents by Inventor Hideyuki Yamamato

Hideyuki Yamamato has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of monitoring and/or controlling a semiconductor manufacturing apparatus and a system therefor
    Patent number: 6616759
    Abstract: A method and system are provided for controlling and/or monitoring a semiconductor processing apparatus while predicting its processing results.
    Type: Grant
    Filed: September 6, 2001
    Date of Patent: September 9, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Junichi Tanaka, Hiroyuki Kitsunai, Akira Kagoshima, Daisuke Shiraishi, Hideyuki Yamamato, Shoji Ikuhara, Toshio Masuda