Abstract: To provide a plasma generator having plasma-generating zone of increased volume. A plasma generator 110 has a cylindrical casing 11 made of a sintered ceramic produced from alumina (Al2O3) as a raw material. The casing 11 has a slit-like gas inlet 11i and a plurality of cylindrical gas outlets 11o. From the gas inlet 11i to the top of the plasma-generating zone P, the slit width (the front-to-back direction with respect to the sheet of FIG. 2.A, and the left-to right direction in FIG. 2.B) is adjusted to 1 mm, and gas outlets 11o each having an inner diameter of 1 to 2 mm are formed in straight line along the longitudinal direction of the plasma-generating zone P. The plasma-generating zone P has a square cross-section normal to the longitudinal direction having a side of 2 to 5 mm. Each of the surfaces of the electrodes 2a, 2b facing each other has a plurality of recesses (hollow portions).

Abstract: To improve the crystallinity of carbon nanowalls. The method of the invention for producing carbon nanowalls, includes forming carbon nanowalls on a surface of a base in a plasma atmosphere containing hydrogen and a raw material containing at least carbon and fluorine as its constituent elements, oxygen plasma is added to the plasma atmosphere. The hydrogen plasma was generated through injecting, to the plasma generation site, hydrogen radicals generated at a site different from the plasma atmosphere. The raw material is at least one member selected from among C2F6, CF4, and CHF3.

Abstract: To provide a plasma generator having plasma-generating zone of increased volume. A plasma generator 110 has a cylindrical casing 11 made of a sintered ceramic produced from alumina (Al2O3) as a raw material. The casing 11 has a slit-like gas inlet 11i and a plurality of cylindrical gas outlets 11o. From the gas inlet 11i to the top of the plasma-generating zone P, the slit width (the front-to-back direction with respect to the sheet of FIG. 2.A, and the left-to right direction in FIG. 2.B) is adjusted to 1 mm, and gas outlets 11o each having an inner diameter of 1 to 2 mm are formed in straight line along the longitudinal direction of the plasma-generating zone P. The plasma-generating zone P has a square cross-section normal to the longitudinal direction having a side of 2 to 5 mm. Each of the surfaces of the electrodes 2a, 2b facing each other has a plurality of recesses (hollow portions).