Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer is provided with a vaporizing chamber heated by heaters; a primary filter positioned in a bottom end portion of the vaporizing chamber and heated by the heater; a liquid material supply portion for dropping down a flow-controlled liquid material from upper portion of the vaporizing chamber toward the primary filter; a carrier gas guiding passage for guiding a carrier gas into the underside of the primary filter; and a material delivering passage for discharging a mixed gas including the carrier gas and a vaporized liquid material from the top of the vaporizing chamber. The liquid material dropped down onto the primary filter is partially vaporized, while the rest thereof is atomized by being subjected to bubbling effect provided by the carrier gas flowing from underneath.

Abstract: A vaporizer can efficiently vaporize a liquid material under a depressurized atmosphere. The liquid material is temporarily stored in a liquid storing chamber, and is supplied to a vaporizing chamber set in the depressurized atmosphere via a small aperture. An inlet of the liquid storing chamber is opened or closed by a valve body, which is moved by an actuator controlling a degree of opening of the valve body.

Abstract: Disclosed is a cellulose nonwoven fabric containing cellulose fibers having a maximum fiber diameter of not more than 1500 nm and a crystallinity determined by solid state NMR techniques of not less than 60%. The porosity of the cellulose nonwoven fabric is not less than 40% and not more than 99%.

Abstract: Disclosed is a spray pack for use in forming a uniform, stable spray coating, comprising a spray container device and, packed therein, a spraying composition comprising a liquid dispersion medium and, dispersed therein, particulate cellulose having an average degree of polymerization (DP) of not more than 300 and an average particle diameter of not more than 10 ?m, wherein the composition has a cellulose content of from 0.1 to 5.0% by weight, and wherein the composition exhibits a maximum viscosity value (?max) of 1×103 mPa·s or more in the viscosity-shear stress curve obtained, with respect to the composition, using a cone-plate type rotating viscometer in a shear rate region of from 1×10?3 s?1 to 1×102 s?1 and at 25° C. A method for forming a uniform, stable spray coating by using the above-mentioned spray pack is also disclosed.

Abstract: In order to vaporize an organic monomer at a high temperature and a high saturated vapor pressure in good efficiency and to grow an organic polymer film at a high rate in high vacuum by a plasma polymerization reaction of the resulting organic monomer gas, a liquid divinylsiloxanebisbenzocyclobutene (DVS-BCB) monomer is mixed with a carrier gas, and the mixture is then sprayed on a vaporization vacuum chamber held at a high temperature to form an aerosol made of liquid fine particles of the organic monomer, and a BCB monomer (organic monomer) is instantaneously vaporized via the aerosol to generate a BCB monomer gas (organic monomer gas). Consequently, the aerosol having a large specific surface area has a large vaporization area, and vaporization occurs by heating at a high temperature before a polymerization reaction occurs. Thus, 0.1 g/min or more of the BCB monomer gas can be formed at 200° C.

Abstract: Disclosed is a spraying composition comprising a liquid dispersion medium and, dispersed therein, particulate cellulose having an average degree of polymerization (DP) of not more than 300 and an average particle diameter of not more than 10 &mgr;m, wherein the composition has a cellulose content of from 0.1 to 5.0% by weight, and wherein the composition exhibits a maximum viscosity value (&eegr;max) of 1×103 mPa.s or more in the viscosity-shear stress curve obtained with respect to the composition, using a cone-plate type rotating viscometer in a shear rate region of from 1×10−3 s−1 to 1×102 s−1 and at 25° C. Also disclosed is a spray pack comprising a spray container device and, packed therein, the above-mentioned spraying composition.

Abstract: A cellulose dispersion which is a dispersion comprising a dispersing medium and a cellulose having a fraction of cellulose I type crystal component of not more than 0.1 and a fraction of cellulose II type crystal component of not more than 0.4 and in which the average particle diameter of the constitutive cellulose is not more than 5 &mgr;m. A cellulose particulate and a cellulose composite particulate which have an average particle diameter of 0.2 to 20 &mgr;m, a ratio of long diameter (L) to short diameter (D) observed through a scanning electron microscope (L/D) of not more than 1.2 and a coefficient of aggregation of 1.0 to 3.0. The present invention provides a cellulose dispersion which has an excellent effect such as dispersion stability or the like and is high in transparency. Moreover, it provides a cellulose particulate and a cellulose composite particulate which have such performances as no rough feel, excellent rolling properties, high dispersibility and the like.

Abstract: In order to vaporize an organic monomer at a high temperature and a high saturated vapor pressure in good efficiency and to grow an organic polymer film at a high rate in high vacuum by a plasma polymerization reaction of the resulting organic monomer gas, a liquid divinylsiloxanebisbenzocyclobutene (DVS-BCB) monomer is mixed with a carrier gas, and the mixture is then sprayed on a vaporization vacuum chamber held at a high temperature to form an aerosol made of liquid fine particles of the organic monomer, and a BCB monomer (organic monomer) is instantaneously vaporized via the aerosol to generate a BCB monomer gas (organic monomer gas). Consequently, the aerosol having a large specific surface area has a large vaporization area, and vaporization occurs by heating at a high temperature before a polymerization reaction occurs. Thus, 0.1 g/min or more of the BCB monomer gas can be formed at 200° C.

Abstract: A valve structure for use in a vaporizer is provided including: a valve seat 16 confronting a vaporization area Y in which a liquid feedstock 106 is to be vaporized and having a liquid feedstock feeding port 15a for introducing the liquid feedstock 106 into the vaporization area Y, and a valve body 1 movable so as to abut against and depart from the valve seat 16 for opening/closing a flow channel extending from the liquid feedstock feeding port 15a to the vaporization area Y, the valve body 1 being capable of controlling the degree of opening of the flow channel thus opened thereby controlling the flow rate of the liquid feedstock 106 flowing through the flow channel into the vaporization area Y.

Abstract: A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.

Abstract: Fixed amounts of a liquid source for a chemical vapor deposition process is supplied continuously from a source tank and through a liquid mass flow controller to a three-way valve. Inside the three-way valve, the liquid source is evaporated to generate a source gas by contacting a high-temperature carrier gas which flows therethrough and becomes mixed with the source gas. The gas mixture thus generated is supplied into a process chamber for a chemical vapor deposition process. The carrier gas may be heated by a gas heater before entering the three-way valve. Alternatively, the three-way valve may be enclosed inside a thermostatic container, the carrier gas being heated inside the container.

Abstract: In a liquid vaporizing/feeding method of the present invention, carrier gas is forced out at a very high speed against a mass flow controlled liquid feedstock to change the liquid feedstock into a mist; after that, the mist of the feedstock is vaporized and mixed with the carrier gas, and a mixture of the mist and carrier gas is furnished to a succeeding process. A liquid vaporizer/feeder according to the present invention comprises a main vaporized unit which is cylindrical in shape, and a mist nozzle having an inside nozzle fixed in an inlet of the main vaporizer unit for feeding liquid feedstock into the main vaporizer unit and an outside nozzle encompassing an opening of the inside nozzle for forcing a carrier gas at high speed around the opening of the inside nozzle, and the main vaporizer unit has an evaporation space where a mixed mist of the liquid feedstock with the carrier gas that is forced out of the mist nozzle is vaporized.

Abstract: A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.

Abstract: A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead.

Abstract: A mass flow controller having a bypass portion provided in a body through which a large amount of gas is passed and a sensor portion, laid between a primary chamber which is an inlet of the bypass portion and a secondary chamber which is an outlet of the bypass portion, through which gas flows at a small flow rate proportional to the flow rate of the gas passed through the bypass portion and capable of measuring the total flow rate of gas by measuring the flow rate in the sensor portion. The body is partitioned by a bulkhead into a primary chamber and a secondary chamber. The primary chamber is provided with an inlet for gas inflow and the secondary chamber is provided with an outlet for gas outflow. The bulkhead is provided with a plurality of through holes for connecting the primary chamber to the secondary chamber, and bypass elements selected depending on the flow rate in the bypass portion are fitted in the through holes in the bulkhead.

Abstract: Since the IC card does not have a power source in an ordinary case, the power is supplied thereto from the IC card reader/writer via the contact electrode. According to the present invention, a current detect unit is disposed between the power source of the IC card reader/writer and the contact electrode for the power supply to detect the presence/absence of the current supply. A data signal can be delivered from the IC card reader/writer to the IC card only when the current supply is detected by the current detect unit so as to prevent the latch-up phenomenon due to an insufficient contact between the electrodes of the IC card particularly including a complementary MOS and the electrodes of the IC card reader/writer, thereby preventing the destruction of the IC card.

Abstract: A mass gas flow sensor for measuring the mass flow rate of a gas through a passage, and a method of manufacture thereof. The sensor includes a substrate having a streamlined end surface which is to project upstream in the passage, upstream and downstream heating resistors formed on the substrate, protective films covering the resistors, and circuitry for applying current to the resistors so as to heat the resistors, the gas cooling the upstream resistor more than the downstream resistor. The circuitry also produces an electrical voltage responsive to differences in voltage across the upstream and downstream resistors, corresponding to the mass gas flow in the passage.