Abstract: A transfer apparatus using an electrostatic attraction includes an electrostatic chuck for attracting and placing a workpiece as a transfer member on a placement surface by electrostatic attraction. The electrostatic chuck is grounded by an earth via a ground electrode after the electrostatic chuck receives electric power from a power supply surface of a power source via power receiving electrodes of the electrostatic chuck, so that the electrostatic chuck is configured to attract and place the workpiece on the placement surface by electrostatic attraction in a state where electrostatic balance is broken.

Abstract: An assembly apparatus for a membrane-electrode-gas diffusion layer-assembly for a cell for fuel cell capable of positioning and assembling materials while suppressing failures is provided. An assembly apparatus includes a pair of transfer rollers, a first detection unit, a second detection unit, and a conveyance unit. The conveyance unit includes a pair of first rollers and a pair of second rollers. The pair of first rollers are arranged to be separated in a width direction of a band-shaped sheet intersecting with a conveying direction, and rotate in contact with the preliminary assembly. The pair of second rollers are arranged to be separated in the width direction, and rotate while sandwiching the preliminary assembly with the pair of first rollers. An inclination at least one of the first roller or the second roller varies with respect to the conveying direction together with the preliminary assembly.

Abstract: A plasma CVD apparatus is provided. The plasma CVD apparatus includes: a chamber forming a plasma space; and a power introduction terminal arranged in a terminal insertion hole that extends through a wall of the chamber. The power introduction terminal includes an insulator having a through hole and a rod-like electrical conductor inserted in the through hole. One end of the conductor is arranged in the chamber and the other end of the conductor is electrically connected to a power source that supplies power into the chamber. A gap between an inner wall of the insulator and the rod-like electrical conductor is less than 2 mm. A distance from one end of the insulator, which is arranged in the plasma space inside the chamber, to a contact point between the insulator and the conductor is greater than 10 mm.

Abstract: A transfer apparatus using an electrostatic attraction includes an electrostatic chuck for attracting and placing a workpiece as a transfer member on a placement surface by electrostatic attraction. The electrostatic chuck is grounded by an earth via a ground electrode after the electrostatic chuck receives electric power from a power supply surface of a power source via power receiving electrodes of the electrostatic chuck, so that the electrostatic chuck is configured to attract and place the workpiece on the placement surface by electrostatic attraction in a state where electrostatic balance is broken.

Abstract: The present invention provides a plasma CVD apparatus capable of suppressing abnormal electrical discharge even when a high voltage is used.

Abstract: A bipolar plate for a fuel cell comprises a substrate formed of stainless steel; an oriented amorphous carbon film formed at least on a surface of the substrate facing an electrode, and containing C as a main component, 3 to 20 at. % of N, and more than 0 at. % and not more than 20 at. % of H, and when the total amount of the C is taken as 100 at. %, the amount of C having an sp2 hybrid orbital (Csp2) being not less than 70 at. % and less than 100 at. %, and (002) planes of graphite being oriented along a thickness direction; a mixed layer generated in an interface between the substrate and the oriented amorphous carbon film and containing at least one kind of constituent atoms of each of the substrate and the oriented amorphous carbon film; and a plurality of projections protruding from the mixed layer into the oriented amorphous carbon film and having a mean length of 10 to 150 nm.

Abstract: A bipolar plate for a fuel cell comprises a substrate formed of stainless steel; an oriented amorphous carbon film formed at least on a surface of the substrate facing an electrode, and containing C as a main component, 3 to 20 at. % of N, and more than 0 at. % and not more than 20 at. % of H, and when the total amount of the C is taken as 100 at. %, the amount of C having an sp2 hybrid orbital (Csp2) being not less than 70 at. % and less than 100 at. %, and (002) planes of graphite being oriented along a thickness direction; a mixed layer generated in an interface between the substrate and the oriented amorphous carbon film and containing at least one kind of constituent atoms of each of the substrate and the oriented amorphous carbon film; and a plurality of projections protruding from the mixed layer into the oriented amorphous carbon film and having a mean length of 10 to 150 nm.

Abstract: A laser processing apparatus comprises a first shift mechanism including a first transparent member having a first incident face and a first output face that are parallel to each other; and a first motor that rotates the first transparent member around a first rotational axis. The first shift mechanism shifts the laser beam exiting from the first output face in a state parallel with the incident light on the first incident face in a first direction. The laser processing apparatus also comprises a second shift mechanism including a second transparent member including a second incident face and a second output face that are parallel to each other; and a second motor that rotates the second transparent member around the second rotational axis. The second rotating mechanism rotates the laser beam exiting from the second output face in a state parallel with the laser beam incident on the second incident face in a second direction perpendicular to the first direction.

Abstract: A YAG laser welding is applied to a panel assembly including an outer panel and an inner panel manufactured of, for example, aluminum alloy. The YAG laser welding is conducted by any one of (1) emitting one pulse of a YAG laser onto the panel assembly to laser-weld the panel assembly in the manner of spot welding, (2) providing an outer panel having a slit between portions of the outer panel where weld beads are formed, (3) laser-welding the panel assembly using a first YAG laser having a first laser output and a second YAG laser having a second, lower laser output intermittently along a welding schedule line, and (4) laser-welding the panel assembly on a line of the panel assembly increased in bending rigidity due to a hemming curvature.