Patents by Inventor Hirokatsu Sonoda

Hirokatsu Sonoda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING THE SAME, AND PLASMA PROCESSING APPARATUS
    Publication number: 20140217891
    Abstract: According to embodiments, an inner electrode having a plurality of gas holes includes a first contact surface provided to a part of an outer peripheral surface. An outer electrode includes a second contact surface provided to a part of an inner peripheral surface, corresponding to the first contact surface of the inner electrode. The inner electrode and the outer electrode come into contact with each other on the first and second contact surfaces. A brazing filler metal is filled in a brazing filler metal filling hole that reaches from front side main surfaces of the inner electrode and the outer electrode to the contact surfaces to join the inner electrode and the outer electrode.
    Type: Application
    Filed: January 29, 2014
    Publication date: August 7, 2014
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Hideo ETO, Hirokatsu Sonoda, Hisashi Hashiguchi, Makoto Saito