Patents by Inventor Hiroki Mezaki

Hiroki Mezaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Charged particle beam system and method of measuring sample using scanning electron microscope
    Patent number: 11217422
    Abstract: First shape data representing a three-dimensional shape of a sample unit including a sample is generated based on a result of three-dimensional shape measurement of the sample. Second shape data representing a three-dimensional shape of a structure which exists in a sample chamber is generated. Movement of the sample unit is controlled based on the first shape data and the second shape data such that collision of the sample unit with the structure does not occur.
    Type: Grant
    Filed: January 29, 2020
    Date of Patent: January 4, 2022
    Assignee: JEOL Ltd.
    Inventors: Yoshikazu Nemoto, Yuta Murakami, Takakuni Maeda, Akira Abe, Masatsugu Kawamoto, Hiroki Mezaki
  • CHARGED PARTICLE BEAM SYSTEM AND METHOD OF MEASURING SAMPLE USING SCANNING ELETRON MICROSCOPE
    Publication number: 20200251302
    Abstract: First shape data representing a three-dimensional shape of a sample unit including a sample is generated based on a result of three-dimensional shape measurement of the sample. Second shape data representing a three-dimensional shape of a structure which exists in a sample chamber is generated. Movement of the sample unit is controlled based on the first shape data and the second shape data such that collision of the sample unit with the structure does not occur.
    Type: Application
    Filed: January 29, 2020
    Publication date: August 6, 2020
    Inventors: Yoshikazu Nemoto, Yuta Murakami, Takakuni Maeda, Akira Abe, Masatsugu Kawamoto, Hiroki Mezaki