Abstract: The invention provides a ball screw lubricative sealing device having a simplified lubrication mechanism. It is attachable to an installed standard ball screw nut, capable of retaining larger amount of lubricant and long supply of lubricant to the contacting screw parts, and further includes a sealing function. It includes: generally cylindrical case members having attachment part to be attached to both ends of a screw nut, respectively; plural thin seal plates made of lubricating oil impregnated felt-like fiber material which is a three-dimensionally crosslinked plastic fiber and resilient rubber members, and having a hole each and fitted inside said case member in such a state that they circumferentially overlap with each other, the hole having a shape corresponding to a lateral cross-sectional shape of a screw groove of ball screw shaft; and a plastic wiper fitted with a space from the thin seal plates inside each of the case member.

Abstract: An FMCW signal generation circuit includes: an oscillator configured to oscillate in an oscillation frequency that is variable in accordance with a control signal being input thereto and output an FMCW signal having the oscillation frequency; a phase detector configured to detect a phase of the FMCW signal; a first differentiator configured to obtain a frequency by differentiating the phase detected by the phase detector; a second differentiator configured to obtain a frequency variation rate by differentiating the frequency obtained by the first differentiator; a subtractor configured to calculate an error between a set frequency variation rate that is set at a given value and the frequency variation rate obtained by the second differentiator; and an integrator configured to generate the control signal for controlling the oscillation frequency of the oscillator by integrating the error calculated by the subtractor.

Abstract: There is an apparatus includes a voltage acquiring unit which acquires an inter-terminal voltage of the battery cell; a battery information acquiring circuit which acquires battery information of the battery cell with the acquired voltage being supplied as a power supply voltage and; a transformer configured to have a primary winding and a secondary winding, the primary winding being connected to a common wire; a communication circuit which transmits a signal of the battery information to a management unit, supplied with the acquired voltage as a power supply voltage; a rectification circuit which rectifies a signal of a predetermined frequency from the management unit to generate a DC voltage; and a control circuit which controls the supply of the power supply voltages to the battery information acquiring circuit and the communication circuit, the control circuit being supplied with the DC voltage as a power supply voltage.

Abstract: A battery information acquiring apparatus includes a voltage acquiring unit which acquires an inter-terminal voltage of the battery cell; a battery information acquiring circuit which acquires battery information of the battery cell with the acquired voltage being supplied as a first power supply voltage and; a radio circuit which transmits a signal of the battery information to the management unit via the antenna with the acquired voltage being supplied as a second power supply voltage and; a rectification circuit which receives a radio signal from the management unit via the antenna, rectify the received radio signal and generate a DC voltage; and a control circuit which controls supply of the first and second power supply voltages to the battery information acquiring circuit and the radio circuit wherein the control circuit operates with the generated DC voltage being supplied as a third power supply voltage.

Abstract: A digitally controlled oscillator includes a differential inductor including a positive terminal which outputs a positive-phase oscillation signal, a negative terminal which outputs a negative-phase oscillation signal, and a center tap, and including a first contact point in an arbitrary position between the positive terminal and the center tap, and a second contact point in a position corresponding to the first contact point between the negative terminal and the center tap, a first variable capacitor bank connected between the positive terminal and the negative terminal and including a plurality of first variable capacitors which switch capacitance between two values according to a first digital control code, and a second variable capacitor bank connected between the first contact point and the second contact point and including a plurality of second variable capacitors which switch capacitance between two values according to a second digital control code.

Abstract: According to one aspect of the invention, there is provided a qsemiconductor device fabrication method having: forming a film on a semiconductor substrate; forming a mask comprising a predetermined pattern on the film; etching one of the film and the semiconductor substrate by using the mask; and performing at least one of the steps of performing a treatment using one of an aqueous solution of at least one of ammonia and amine, the amine being selected from primary amine, secondary amine, tertiary amine, and quaternary amine, a treatment using a liquid chemical containing fluorine and at least one of amine, the amine being selected from primary amine, secondary amine, tertiary amine, and quaternary amine and fluorine, and a treatment using a liquid chemical containing at least ammonia and fluorine and including a pH of not less than 6, particularly, not less than 9.

Abstract: According to one aspect of the invention, there is provided a semiconductor device fabrication method having: forming a film on a semiconductor substrate; forming a mask comprising a predetermined pattern on the film; etching one of the film and the semiconductor substrate by using the mask; and performing at least one of the steps of performing a treatment using one of an aqueous solution of at least one of ammonia and amine, the amine being selected from primary amine, secondary amine, tertiary amine, and quaternary amine, a treatment using a liquid chemical containing fluorine and at least one of amine, the amine being selected from primary amine, secondary amine, tertiary amine, and quaternary amine and fluorine, and a treatment using a liquid chemical containing at least ammonia and fluorine and including a pH of not less than 6, particularly, not less than 9.

Abstract: Disclosed is a manufacturing method of an integrated capacitor including: forming a hole in a semiconductor substrate; depositing a dielectric film on an inner face of the formed hole; heat-treating the deposited dielectric film; depositing a silicon film on the dielectric film; embedding a resist film in the hole except an upper portion of the inner face of the hole on which the dielectric film and the silicon film are deposited; etching the silicon film on the heat-treated dielectric film with the embedded resist film as a mask; removing the resist film; removing the heat-treated dielectric film by etching with the silicon film remaining after the etching as a mask; and embedding an electrode material in the hole having the dielectric film remaining after the removal by etching, and the integrated capacitor.

Abstract: The invention provides a ball screw lubricative sealing device having a simplified lubrication mechanism. It is attachable to an installed standard ball screw nut, capable of retaining larger amount of lubricant and long supply of lubricant to the contacting screw parts, and further includes a sealing function. It includes: generally cylindrical case members having attachment part to be attached to both ends of a screw nut, respectively; plural thin seal plates made of lubricating oil impregnated felt-like fiber material which is a three-dimensionally crosslinked plastic fiber and resilient rubber members, and having a hole each and fitted inside said case member in such a state that they circumferentially overlap with each other, the hole having a shape corresponding to a lateral cross-sectional shape of a screw groove of ball screw shaft; and a plastic wiper fitted with a space from the thin seal plates inside each of the case member.

Abstract: Disclosed is a manufacturing method of an integrated capacitor including: forming a hole in a semiconductor substrate; depositing a dielectric film on an inner face of the formed hole; heat-treating the deposited dielectric film; depositing a silicon film on the dielectric film; embedding a resist film in the hole except an upper portion of the inner face of the hole on which the dielectric film and the silicon film are deposited; etching the silicon film on the heat-treated dielectric film with the embedded resist film as a mask; removing the resist film; removing the heat-treated dielectric film by etching with the silicon film remaining after the etching as a mask; and embedding an electrode material in the hole having the dielectric film remaining after the removal by etching, and the integrated capacitor.