Patents by Inventor Hiroko Ueno

Hiroko Ueno has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma-resistant articles and production method thereof
    Patent number: 6933254
    Abstract: A plasma-resistant article is provided in which a surface region of the article to be exposed to plasma in a corrosive atmosphere is formed from a zirconia-based ceramic that contains yttria in an amount of 7 to 17 mol %. The plasma-resistant article exhibits a sufficient resistance against exposure to plasma and is cost-effective. Preferably, the surface region has a centerline average roughness (Ra) of 1.2 to 5.0 ?m, which is readily achieved through the use of an etching solution containing hydrofluoric acid. The present invention also provides a production method for such a plasma-resistant article.
    Type: Grant
    Filed: November 19, 2002
    Date of Patent: August 23, 2005
    Assignee: Toshiba Ceramics Co., Ltd.
    Inventors: Kenji Morita, Hiroko Ueno, Haruo Murayama
  • Plasma-resistant articles and production method thereof
    Publication number: 20030215643
    Abstract: A plasma-resistant article is provided in which a surface region of the article to be exposed to plasma in a corrosive atmosphere is formed from a zirconia-based ceramic that contains yttria in an amount of 7 to 17 mol %. The plasma-resistant article exhibits a sufficient resistance against exposure to plasma and is cost-effective. Preferably, the surface region has a centerline average roughness (Ra) of 1.2 to 5.0 &mgr;m, which is readily achieved through the use of an etching solution containing hydrofluoric acid. The present invention also provides a production method for such a plasma-resistant article.
    Type: Application
    Filed: November 19, 2002
    Publication date: November 20, 2003
    Applicant: Toshiba Ceramics Co., Ltd.
    Inventors: Kenji Morita, Hiroko Ueno, Haruo Murayama