Patents by Inventor Hiromi Itho

Hiromi Itho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Unit-Layer Post-Processing Catalyst Chemical-Vapor-Deposition Apparatus and Its Film Forming Method
    Publication number: 20080050523
    Abstract: To provide a unit-layer post-treatment catalyst vapor-deposition apparatus and unit-layer post-treatment film forming method capable of improving in-face uniformity, step coverage, and film quality of a silicon nitride film or the like and forming a thin film by performing surface treatment after forming a film for each unit layer.
    Type: Application
    Filed: March 25, 2005
    Publication date: February 28, 2008
    Inventors: Makiko Kitazoe, Hiromi Itho, Shin Asari, Kazuya Saito