Patents by Inventor Hiromitsu Soneda
Hiromitsu Soneda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7550895Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.Type: GrantFiled: November 22, 2006Date of Patent: June 23, 2009Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7536068Abstract: A micro movable element includes a micro movable substrate, a package base and an electroconductive connector. The micro movable substrate is provided with a micro movable unit that includes a frame, a pivotally movable portion, a torsion connector connecting the frame and the movable portion, and an actuator to generate driving force for the pivotal motion of the movable portion. The package base includes an internal interconnect structure. The electroconductive connector is provided between the micro movable substrate and the package base for electrically connecting the actuator and the internal interconnect structure to each other.Type: GrantFiled: March 22, 2006Date of Patent: May 19, 2009Assignee: Fujitsu LimitedInventors: Hiromitsu Soneda, Xiaoyu Mi, Hisao Okuda, Osamu Tsuboi, Norinao Kouma, Satoshi Ueda
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Publication number: 20090107949Abstract: A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.Type: ApplicationFiled: November 20, 2008Publication date: April 30, 2009Applicant: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda
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Patent number: 7476950Abstract: A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.Type: GrantFiled: February 13, 2006Date of Patent: January 13, 2009Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda
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Publication number: 20090001847Abstract: A micro-oscillation element includes a base frame, an oscillating portion, and a link portion connecting the base frame and the oscillating portion to each other. The oscillating portion has a movable functional portion, a first driving electrode connected to the movable functional portion, and a weight portion joined to the first driving electrode. The link portion defines an axis of the oscillating motion of the oscillating portion. The second driving electrode, fixed to the base frame, generates driving force for the oscillating motion in cooperation with the first driving electrode.Type: ApplicationFiled: June 24, 2008Publication date: January 1, 2009Applicant: FUJITSU LIMITEDInventors: Osamu TSUBOI, Norinao KOUMA, Hiromitsu SONEDA, Hisao OKUDA, Yoshihiro MIZUNO, Tsuyoshi MATSUMOTO, Ippei SAWAKI
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Publication number: 20090001487Abstract: A packaged device includes a package having an inner surface defining a closed internal space, a device chip fixed to the package in the internal space, and a parylene film covering at least a part of the inner surface of the package and/or at least a part of a surface of the device chip.Type: ApplicationFiled: June 30, 2008Publication date: January 1, 2009Applicant: FUJITSU LIMITEDInventors: Yoshihiro Mizuno, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi
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Patent number: 7459331Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.Type: GrantFiled: October 30, 2006Date of Patent: December 2, 2008Assignee: Fujitsu LimitedInventors: Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda, Norinao Kouma, Hiromitsu Soneda, Fumio Yamagishi
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Publication number: 20080285108Abstract: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.Type: ApplicationFiled: December 5, 2007Publication date: November 20, 2008Applicant: Fujitsu LimitedInventors: Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi, Hiromitsu Soneda, Norinao Kouma
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Patent number: 7453182Abstract: A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.Type: GrantFiled: December 1, 2005Date of Patent: November 18, 2008Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki
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Patent number: 7439184Abstract: A pair of comb-teeth electrodes are made from a material substrate including a first conduction layer, a second conduction layer and an intervening insulation layer. The paired electrodes includes first and second comb-teeth electrodes. The first comb-teeth electrode is composed of a first conductor derived from the first conduction layer, a second conductor derived from the second conduction layer and an insulator derived from the insulation layer. The second comb-teeth electrode is derived from the second conduction layer.Type: GrantFiled: March 9, 2006Date of Patent: October 21, 2008Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda
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Publication number: 20080239456Abstract: A micro oscillating device includes a frame, an oscillating part including a first drive electrode for application of a reference electric potential, and a connecting part for connecting the frame and the oscillating part to each other, where the connecting part defines an axis of an oscillating motion of the oscillating part. A second drive electrode is fixed to the frame to cooperate with the first drive electrode for generation of a driving force for the oscillating movement. The first drive electrode includes a first end extension and a second end extension separated from each other and extending in a direction crossing the axis. The second drive electrode is within a separation distance between the first and the second end extensions.Type: ApplicationFiled: March 31, 2008Publication date: October 2, 2008Applicant: FUJITSU LIMITEDInventors: Osamu TSUBOI, Norinao KOUMA, Hiromitsu SONEDA, Hisao OKUDA, Yoshihiro MIZUNO, Tsuyoshi MATSUMOTO
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Publication number: 20080205021Abstract: A microstructure comprises a laminate structure having a first conductor, a second conductor, and an intervening insulator located between the first and the second conductors. The first conductor includes opposite faces in relation to the second conductor, side faces, and edge parts which form the boundaries of the aforementioned opposite faces and side faces. The second conductor includes an extended face extending beyond the edge parts exceeding the first conductor. The insulation film includes an area covering at least part of an edge part and/or at least part of a side face.Type: ApplicationFiled: February 28, 2008Publication date: August 28, 2008Applicant: FUJITSU LIMITEDInventors: Yoshihiro MIZUNO, Norinao KOUMA, Hisao OKUDA, Hiromitsu SONEDA, Tsuyoshi MATSUMOTO, Osamu TSUBOI
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Publication number: 20080075924Abstract: A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.Type: ApplicationFiled: September 18, 2007Publication date: March 27, 2008Applicant: FUJITSU LIMITEDInventors: Norinao Kouma, Yoshihiro Mizuno, Hisao Okuda, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi, Ippei Sawaki
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Publication number: 20080054758Abstract: A micro-oscillation element facilitates adjusting the natural frequency relevant to the oscillating motion of the oscillating portion. The micro-oscillation element includes, for example, an oscillating portion, a frame, and a link portion that connects the oscillating portion and the frame. The link portion defines the oscillation axial center of oscillating motion of the oscillating portion with respect to the frame. The oscillating portion includes a main oscillating body, and a weight portion attached to the main oscillating body. The weight portion is movable in a direction intersecting the oscillation axial center.Type: ApplicationFiled: August 16, 2007Publication date: March 6, 2008Applicant: FUJITSU LIMITEDInventors: Osamu Tsuboi, Norinao Kouma, Hiromitsu Soneda, Hisao Okuda
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Patent number: 7324251Abstract: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.Type: GrantFiled: April 8, 2005Date of Patent: January 29, 2008Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi, Hiromitsu Soneda, Norinao Kouma
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Publication number: 20070268549Abstract: A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.Type: ApplicationFiled: July 25, 2007Publication date: November 22, 2007Applicants: FUJITSU LIMITED, FUJITSU MEDIA DEVICES LIMITEDInventors: Mi Xiaoyu, Satoshi Ueda, Hisao Okuda, Osamu Tsuboi, Hiromitsu Soneda, Norinao Kouma, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7262541Abstract: A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.Type: GrantFiled: March 4, 2004Date of Patent: August 28, 2007Assignee: Fujitsu LimitedInventors: Mi Xiaoyu, Satoshi Ueda, Hisao Okuda, Osamu Tsuboi, Hiromitsu Soneda, Norinao Kouma, Ippei Sawaki, Yoshitaka Nakamura
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Publication number: 20070063614Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.Type: ApplicationFiled: November 22, 2006Publication date: March 22, 2007Applicant: FUJITSU LIMITEDInventors: Osamu Tsuboi, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7192879Abstract: A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.Type: GrantFiled: August 22, 2005Date of Patent: March 20, 2007Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Publication number: 20070041080Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.Type: ApplicationFiled: October 30, 2006Publication date: February 22, 2007Applicant: FUJITSU LIMITED, LTD.Inventors: Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda, Norinao Kouma, Hiromitsu Soneda, Fumio Yamagishi