Abstract: There is provided an electrostatic chuck member made of a complex oxide sintered body obtained by substituting some of yttrium in yttrium aluminum oxide with a rare earth element (RE) excluding yttrium, in which a ratio [NRE/(NY+NRE)] of the number of atoms of the rare earth element excluding yttrium (NRE) to the sum (NY+NRE) of the number of yttrium atoms (NY) and the number of the atoms of the rare earth element excluding yttrium (NRE) is in a range of 0.01 to less than 0.5, and a volume resistance of the complex oxide sintered compact is in a range of 1×1010 ?·cm to less than 1×1015 ?·cm.

Abstract: The present invention relates to an electrostatic chuck comprising a specific composite oxide sintered body, wherein in the sintered body, an L* value of a reflected color tone measured by a C light source on a 2° angle visual field condition is 10 or more and 50 or less in a CIEL*a*b* color system prescribed in JIS Z 8729-1994 and an electrostatic chuck device comprising an electrostatic chuck member (A) having a tabular body provided with a clamping surface for clamping a sample by the electrostatic force, an internal electrode layer for clamping a sample by electrostatic force which is provided on the back face of the tabular body and an insulation layer, wherein at least the sample clamping surface of the tabular body in the electrostatic chuck member (A) comprises the composite oxide sintered body constituting the electrostatic chuck described above.

Abstract: The present invention relates to an electrostatic chuck comprising a specific composite oxide sintered body, wherein in the sintered body, an L* value of a reflected color tone measured by a C light source on a 2° angle visual field condition is 10 or more and 50 or less in a CIEL*a*b* color system prescribed in JIS Z 8729-1994 and an electrostatic chuck device comprising an electrostatic chuck member (A) having a tabular body provided with a clamping surface for clamping a sample by the electrostatic force, an internal electrode layer for clamping a sample by electrostatic force which is provided on the back face of the tabular body and an insulation layer, wherein at least the sample clamping surface of the tabular body in the electrostatic chuck member (A) comprises the composite oxide sintered body constituting the electrostatic chuck described above.