Abstract: An electronic control unit (ECU) of an engine calculates a first modification value for decreasing a correction value of an injection period when a state variation of the engine caused by a single injection is greater than a target value. The ECU calculates a second modification value for increasing the correction value when the state variation is less than the target value. The second modification value is greater than the first modification value. Thus, a period necessary to converge the correction value can be shortened when the correction value is increased. The first modification value is increased if a difference between the state variation and the target value exceeds a permissible value when the correction value is decreased. Thus, the injection quantity is decreased quickly to prevent excessive fuel injection.

Abstract: An ECU converts a cylinder pressure P and a cylinder volume V corresponding to a crank angle ? at least from a compression stroke to a combustion and expansion stroke to a logarithmic value log P and a logarithmic value log V, respectively, to find a logarithmic conversion waveform and estimates a motoring waveform which is obtained by subtracting a pressure rise developed by combustion in a cylinder from the logarithmic conversion waveform, that is, corresponds to a non-combustion state. Further, the ECU computes a determination line Y of an ignition timing Tburn on the basis of the base line X of the estimated motoring waveform and determines the ignition timing Tburn on the basis of this determination line Y and the logarithmic conversion waveform.

Abstract: In an engine, when it is determined that catalyst, which is held on a filter substrate of a particulate filter, is not in an active state, an ECU executes a fuel injection for mainly obtaining an engine power near a top dead center of a crank. Then, the ECU executes a subsequent fuel injection after lapse of a sufficient injection interval, which does not cause misfiring, to increase the temperature of exhaust gas outputted from the engine. In this way, the temperature of the filter is rapidly increased.

Abstract: An electronic control unit of an internal combustion engine calculates a basic post-injection quantity of temperature increasing means if a deposition quantity of particulate matters deposited on a diesel particulate filter (DPF) exceeds a predetermined value. Then, a final post-injection quantity is calculated by correcting the basic post-injection quantity based on a temperature correction value, which is calculated by multiplying a deviation between DPF upstream exhaust gas temperature and target temperature and past temperature correction values by feedback gains. The feedback gains are switched in accordance with a delay in an exhaust gas temperature change in a present operating state, based on an intake air quantity sensed by an air flow meter. Thus, response can be improved, while maintaining stability.

Abstract: An oxidation catalyst is disposed upstream of a diesel particulate filter (DPF) in an exhaust passage of a diesel engine. An electronic control unit (ECU) operates temperature increasing means to combust and eliminate particulate matters deposited on the DPF. The ECU determines execution and stoppage of regeneration of the DPF based on a quantity of the particulate matters deposited on the DPF. The ECU increases an exhaust gas recirculation quantity (EGR quantity) during the regeneration to reduce an intake air quantity from the intake air quantity in a non-regeneration period and to achieve a flow rate of the exhaust gas passing through the DPF suitable for the temperature increase. The ECU corrects a valve opening degree of an EGR control valve based on the sensed intake air quantity to reduce a variation in the exhaust gas flow rate.

Abstract: An object of the present invention is to restrain a deterioration of emission even if the actual control condition including the required torque is different from the set control condition. An ECU establishes a control amount of an EGR valve in such a manner that a condition amount, which is a control parameter controlling the EGR valve, is established as a target value. The ECU selects the condition amount as the control parameter among a fresh-air amount, an exhaust oxygen concentration, and an intake oxygen concentration, in which an operation amount of the EGR valve is minimum.

Abstract: An electronic control unit (ECU) of an engine calculates a first modification value for decreasing a correction value of an injection period when a state variation of the engine caused by a single injection is greater than a target value. The ECU calculates a second modification value for increasing the correction value when the state variation is less than the target value. The second modification value is greater than the first modification value. Thus, a period necessary to converge the correction value can be shortened when the correction value is increased. The first modification value is increased if a difference between the state variation and the target value exceeds a permissible value when the correction value is decreased. Thus, the injection quantity is decreased quickly to prevent excessive fuel injection.

Abstract: An electronic control unit (ECU) of an injection control system of an internal combustion engine determines that a load of a fuel pump is stabilized when a pressure-feeding operation delay elapses since a command pressure-feeding quantity outputted to the fuel pump reaches a certain pressure-feeding quantity necessary to maintain a target injection pressure. The ECU permits a single injection when a waiting period necessary to measure rotation speeds once for each cylinder before the single injection is performed elapses since the load of the fuel pump is stabilized. Thus, the single injection timing is determined based on the time point when the command pressure-feeding quantity is stabilized, the pressure-feeding operation delay, and the waiting period. Therefore, an injection quantity learning operation can be performed highly accurately in a short period.

Abstract: An electronic control unit (ECU) of a fuel injection control system of an internal combustion engine feedback-controls injection timing so that a cylinder pressure maximum value coincides with a target pressure value in an operation range, in which the cylinder pressure maximum value increases as ignition timing advances and torque increases as the ignition timing advances. The ECU feedback-controls the injection timing so that the ignition timing coincides with target timing in another operation range, in which the cylinder pressure maximum value increases as the ignition timing advances but the torque decreases as the ignition timing advances. Thus, the torque can be outputted efficiently by selecting the appropriate feedback control in accordance with the operation range.

Abstract: A sensor element of a NOx sensor has a sensor cell for decomposing NOx and residual O2 admitted within the element and a monitor cell for decomposing only the residual O2. The NOx concentration is detected from a difference in an electric current output between the sensor cell and monitor cell. The tipping of the sensor element is protected by an element cover. The element cover has a plurality of side wall holes and at least one bottom wall hole. The side wall holes and bottom wall hole have diameters between 0.5 and 1.5 mm. A ratio of the diameter of the side wall holes to that of the bottom wall hole is between 0.5 and 1.5. This structure inhibits flow velocity variations within the element cover and output pulsation of the sensor cell and monitor cell, resulting in stabilizing the NOx output.

Abstract: An O2 amount in the intake air is determined based on a fresh air and an EGR gas. A consumed O2 amount is determined with a command injection amount Qr. Then, the consumed O2 amount is subtracted from the O2 amount in the intake air to obtain an exhaust O2 amount. An exhaust O2 concentration is estimated based on the exhaust O2 amount. According to the invention, the system is not affected by a delay for the exhaust gas to reach an O2 sensor and a delay of the chemical reaction in the O2 sensor. Therefore, the exhaust O2 concentration can be highly precisely estimated compare to the case in which the exhaust O2 concentration is detected by the O2 sensor.

Abstract: A gas concentration detector prevents deviation in output due to a difference in oxygen reactivity between electrode materials to accurately detect a specific gas component in a gas to be measured, such as NOx in an exhaust gas. A sensor element in an NOx sensor has a pump cell in a first chamber and a sensor cell for decomposing NOx and any remaining oxygen and a monitor cell for decomposing only remaining oxygen in a second chamber. An NOx concentration is detected based on a difference in current output between the sensor cell and the monitor cell. Since the sensor cell and the monitor cell have different oxygen reactivities, an output of the monitor cell is smoothed through a band-pass filter or the like so that output responses of the sensor cell and the monitor cell are made to substantially match each other, thereby eliminating any deviation in output.

Abstract: An O2 amount in the intake air is determined based on a fresh air and an EGR gas. A consumed O2 amount is determined with a command injection amount Qr. Then, the consumed O2 amount is subtracted from the O2 amount in the intake air to obtain an exhaust O2 amount. An exhaust O2 concentration is estimated based on the exhaust O2 amount. According to the invention, the system is not affected by a delay for the exhaust gas to reach an O2 sensor and a delay of the chemical reaction in the O2 sensor. Therefore, the exhaust O2 concentration can be highly precisely estimated compare to the case in which the exhaust O2 concentration is detected by the O2 sensor.

Abstract: In a method of making a negative photoresist image as for lithography, a positive resist is exposed by a light radiation through a phase shift mask as a first exposing step. Next, the positive resist is changed in its character by means of baking the substrate in an amine gas atmosphere such as ammonium, to make an exposed portion insoluble by developer. Next, an unexposed potion of the positive resist is exposed a second time to a light radiation using a second mask. After the second exposing step, the positive resist is developed to remove the unexposed portion. The phase shift mask has a fine pattern constituted mask membrane and an opening placed alternatively. And the opening is covered by attenuator intermittently. The second mask has an opening so that at least one portion unexposed by the first exposing step is exposed by the second exposing step.

Abstract: Disclosed is an alignment mark for the X directional alignment of a chip area on a semiconductor wafer, for example. The alignment mark comprises recesses and projections formed on a semiconductor substrate. The recesses or projections are repeatedly arranged in the X direction. The X directional width of the recesses or projections is set smaller than the X directional width of a grain on a metal film formed on the recesses and projections or the average particle size, as viewed from above the semiconductor substrate. The projections may be formed by an insulating layer formed on the semiconductor substrate.

Abstract: An alignment method is provided for determining a mark position by using any of a first method for determining a mark position with one of photodiodes for colors which shows a maximal contrast between a mark area and a non-mark area, a second method for determining a mark position by detecting mark positions with photodiodes for colors and taking an average for these positions and a third method for determining a mark position by determining a ratio for determining that mark position, through the photodiodes for colors, by using different contrast levels between a mark area and a non-mark area and a CCD color area sensor.

Abstract: A temperature projecting system includes a temperature sensor for monitoring a temperature of an objective portion where the temperature changes depending on an engine operating condition. The temperature projecting system projects an actual temperature of the objective portion based on the monitored temperature but free of a first-order lag of the temperature sensor. A temperature control system includes the temperature projecting system. The temperature control system derives a correction amount for a basic control amount of an actuator based on a difference between the projected actual temperature and a target temperature. The basic control amount is corrected by the correction amount to derive a corrected control amount which controls the engine operating condition and thus the temperature of the objective portion.

Abstract: Disclosed is an alignment mark for the X directional alignment of a chip area on a semiconductor wafer, for example. The alignment mark comprises recesses and projections formed on a semiconductor substrate. The recesses or projections are repeatedly arranged in the X direction. The X directional width of the recesses or projections is set smaller than the X directional width of a grain on a metal film formed on the recesses and projections or the average particle size, as viewed from above the semiconductor substrate. The projections may be formed by a insulating layer formed on the semiconductor substrate.

Abstract: An organic material applying apparatus of the present invention includes a movable organic material discharge nozzle having an organic material discharge port for discharging an organic material at a position facing a semiconductor wafer. The opening width of the discharge port is adjustable. A movement time of the nozzle measured from a predetermined position of the semiconductor wafer at a predetermined velocity of relative movements of the nozzle and semiconductor wafer is detected by a movement time detecting device. A width of that portion of the semiconductor wafer, which the discharge port of the moved nozzle faces, is calculated by a wafer width calculating device on the basis of the movement time of the nozzle detected by the movement time detecting device. The opening width of the discharge port of the nozzle is adjusted by a nozzle discharge port opening width adjusting device in accordance with the wafer width calculated by the wafer width calculating device.

Abstract: An air fuel ratio controlling apparatus for an internal combustion engine, comprises: a catalytic converter, provided in an exhaust system for purifying an exhaust gas of the engine; a first oxygen density sensor, provided upstream from the catalytic converter in the exhaust system, responsive to a first oxygen density of a first exhaust gas of the engine for detecting whether an air fuel ratio of the engine is in a rich condition or a lean condition with respect to a theoretical air fuel ratio of the engine; a second oxygen density sensor, provided downstream from the catalytic converter in the exhaust system, responsive to a second oxygen density of a second exhaust gas passed through the catalytic converter for detecting whether the air fuel ratio of the engine is in a rich or a lean condition with respect to a theoretical air fuel ratio of the engine; and an air fuel ratio control portion for controlling the air fuel ratio in accordance with the detection results of the first and second oxygen sensors, wh