Abstract: A power supply apparatus includes an inverter having output terminals; a first transformer that transforms AC output from the output terminals; a second transformer that is connected to the output terminals in parallel to the first transformer, arranged on an opposite side of the first transformer with respect to a straight line passing through a center of the output terminals and extending perpendicularly to a plane including the output terminals, and transforms AC power output from the output terminals; first conductive lines that connect the output terminals to both ends of the first transformer; and second conductive lines that connect the output terminals to both ends of the second transformer. An area of a first loop formed by the inverter, the first conductive lines, and the first transformer is equal to an area of a second loop formed by the inverter, the second conductive lines, and the second transformer.

Abstract: A three-phase rectification circuit rectifies output voltage of a three-phase AC power supply, a step-up converter circuit steps up the output voltage, and a smoothing device smoothes the stepped-up output voltage. A voltage detection circuit detects output voltage VoL of the smoothing device, and an AC current component detection circuit extracts AC component included in output current of the three-phase rectification circuit and outputs a detection signal ViL corresponding to the AC component. A control circuit calculates a deviation ?Vdc1 (=Vs?VoL?ViL) among an output voltage instruction Vs for output voltage of the step-up converter circuit and detection signals VoL and ViL obtained by the detection circuits, and generates a pulse signal for suppressing the deviation ?Vdc1 to zero, thereby performing PWM control for a switching device of the step-up converter circuit.

Abstract: Included are: a circuit-specific printed circuit board to be a circuit board that generates a power supply voltage; a first diode that is connected in antiparallel with the transistor and is configured so as to be capable of passing a current through a path to circumvent the transistor; a second diode that is connected in series to the transistor and prevents a current flow through a parasitic diode formed on the transistor; a protection circuit that is connected in parallel with the second diode to protect the second diode from a high voltage breakdown, and is formed on a substrate different from the circuit-specific printed circuit board; and a cooling unit that is joined to the protection circuit outside the circuit-specific printed circuit board and cools the protection circuit.

Abstract: A switching power supply device includes: a chopper circuit that adjusts a DC voltage input through a reactor to a desired DC voltage by performing an on/off operation of a switching element; an inverter circuit that converts an output of the chopper circuit into a desired AC voltage; a first capacitor that is provided on a side of the inverter circuit relative to the switching element; a second capacitor that is provided on a side of the inverter circuit relative to the switching element; and a resistor that is in a resonant loop formed by three constituent elements that are the first capacitor, the second capacitor, and a wiring inductance between the chopper circuit and the inverter circuit, where the resistor is connected in series to the second capacitor and inserted between the DC bus-bars.

Abstract: A switching power supply device includes: a chopper circuit that adjusts a DC voltage input through a reactor to a desired DC voltage by performing an on/off operation of a switching element; an inverter circuit that converts an output of the chopper circuit into a desired AC voltage; a first capacitor that is provided on a side of the inverter circuit relative to the switching element; a second capacitor that is provided on a side of the inverter circuit relative to the switching element; and a resistor that is in a resonant loop formed by three constituent elements that are the first capacitor, the second capacitor, and a wiring inductance between the chopper circuit and the inverter circuit, where the resistor is connected in series to the second capacitor and inserted between the DC bus-bars.

Abstract: A three-phase rectification circuit rectifies output voltage of a three-phase AC power supply, a step-up converter circuit steps up the output voltage, and a smoothing device smoothes the stepped-up output voltage. A voltage detection circuit detects output voltage VoL of the smoothing device, and an AC current component detection circuit extracts AC component included in output current of the three-phase rectification circuit and outputs a detection signal ViL corresponding to the AC component. A control circuit calculates a deviation ?Vdc1 (=Vs?VoL?ViL) among an output voltage instruction Vs for output voltage of the step-up converter circuit and detection signals VoL and ViL obtained by the detection circuits, and generates a pulse signal for suppressing the deviation ?Vdc1 to zero, thereby performing PWM control for a switching device of the step-up converter circuit.

Abstract: A power supply apparatus includes an inverter having output terminals; a first transformer that transforms alternating-current output from the output terminals; a second transformer that is connected to the output terminals in parallel to the first transformer, arranged on an opposite side of the first transformer with respect to a straight line passing through a center of the output terminals and extending perpendicularly to a plane including the output terminals, and transforms alternating-current power output from the output terminals; first conductive lines that connect the output terminals to both ends of the first transformer; and second conductive lines that connect the output terminals to both ends of the second transformer. An area of a first loop formed by the inverter, the first conductive lines, and the first transformer is equal to an area of a second loop formed by the inverter, the second conductive lines, and the second transformer.

Abstract: Included are: a circuit-specific printed circuit board to be a circuit board that generates a power supply voltage; a first diode that is connected in antiparallel with the transistor and is configured so as to be capable of passing a current through a path to circumvent the transistor; a second diode that is connected in series to the transistor and prevents a current flow through a parasitic diode formed on the transistor; a protection circuit that is connected in parallel with the second diode to protect the second diode from a high voltage breakdown, and is formed on a substrate different from the circuit-specific printed circuit board; and a cooling unit that is joined to the protection circuit outside the circuit-specific printed circuit board and cools the protection circuit.

Abstract: A pressure of a laser gas in an enclosure (7) is detected by a gas pressure sensor (12), and a pressure comparison circuit (13) determines whether the thus-detected pressure is normal or anomalous. An electric current output from an inverter (10) that drives a blower (5) to cause a laser gas to flow back, is detected by a current detection circuit (9). A current comparison circuit (11) determines whether or not the output current is normal or anomalous. A result of a pressure comparison circuit (13) and a result of the current comparison circuit (11) are sent to an AND circuit (15) and performed AND processing. A result of the AND circuit (15), a result of the current detection circuit (9), and a result of the gas pressure sensor (12) are sent to a comparison operation section (17) in a controller (14). A determination is made as to whether or not the blower is anomalous.

Abstract: A pressure of a laser gas in an enclosure (7) is detected by a gas pressure sensor (12), and a pressure comparison circuit (13) determines whether the thus-detected pressure is normal or anomalous. An electric current output from an inverter (10) that drives a blower (5) to cause a laser gas to flow back, is detected by a current detection circuit (9). A current comparison circuit (11) determines whether or not the output current is normal or anomalous. A result of a pressure comparison circuit (13) and a result of the current comparison circuit (11) are sent to an AND circuit (15) and performed AND processing. A result of the AND circuit (15), a result of the current detection circuit (9), and a result of the gas pressure sensor (12) are sent to a comparison operation section (17) in a controller (14). A determination is made as to whether or not the blower is anomalous.