Abstract: A method of processing a wafer includes a composite substrate forming step of joining a face side of a wafer and a surface of a support substrate to each other with a joint member interposed therebetween, a grinding step of grinding a reverse side of the wafer of the composite substrate to thin down the wafer to a finished thickness, a transfer member affixing step of affixing a transfer member to the reverse side of the wafer, a joint member breaking step of breaking the joint member by applying a laser beam having a wavelength transmittable through the support substrate and absorbable by the joint member to the composite substrate from another surface side of the support substrate, and a transferring step of peeling off the support substrate from the wafer and transferring the wafer to the transfer member.

Abstract: A surface modifying method of modifying a bonding surface of a substrate to be bonded to another substrate by plasma of a processing gas includes an adjusting process and a modifying process. In the adjusting process, an amount of moisture in a processing vessel is adjusted by supplying a humidified gas into the processing vessel allowed to accommodate the substrate therein. In the modifying process, the bonding surface of the substrate is modified by forming the plasma of the processing gas in the processing vessel in a state that the amount of moisture in the processing vessel is adjusted.

Abstract: A surface modifying apparatus is configured to modify a bonding surface of a substrate to be bonded to another substrate by plasma of a processing gas. The surface modifying apparatus includes a processing vessel; a measuring unit; and a controller. The processing vessel is configured to accommodate the substrate therein. The measuring unit is configured to measure a value indicating an amount of moisture in the processing vessel. The controller is configured to determine whether or not bonding strength between the substrate and the another substrate, when it is assumed that the substrate modified in the processing vessel is bonded to the another substrate, is good based on the value indicating the amount of moisture in the processing vessel measured by the measuring unit.

Abstract: A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.

Abstract: There is provided a substrate storage container 1 capable of suppressing deformation of a functional member insert-molded and a method of manufacturing the container 1, and an device positioning member 4 as the functional member including: an attachment part 41 having a thick section 413 formed in thickness equal to a wall member of a container body 10 or a lid 20 and a thin section 410 decreasing in thickness as it approaches toward an outer edge from the thick section 413; and a body part 42 coupled to the attachment part 41, the device positioning member 4 being disposed on the container body 10 or the lid 20 so that a first surface 420 of the thick section 413 is flush with an inner surface of the wall member.

Abstract: There is provided a substrate storage container 1 capable of suppressing deformation of a functional member insert-molded and a method of manufacturing the container 1, and an device positioning member 4 as the functional member including: an attachment part 41 having a thick section 413 formed in thickness equal to a wall member of a container body 10 or a lid 20 and a thin section 410 decreasing in thickness as it approaches toward an outer edge from the thick section 413; and a body part 42 coupled to the attachment part 41, the device positioning member 4 being disposed on the container body 10 or the lid 20 so that a first surface 420 of the thick section 413 is flush with an inner surface of the wall member.

Abstract: A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.

Abstract: A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.

Abstract: [Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2).

Abstract: A substrate storage container with increased mounting force of the conveyance component is provided. The substrate storage container comprises a container body having an opening closed by a lid and capable of storing a plurality of substrates, and a conveyance component detachably attached to the container body via a mounting mechanism, wherein the mounting mechanism includes at least one first mounting portion on the opening side of the container body and at least one second mounting portion on the side away from the opening. Furthermore, the conveyance component has at least one engaging portion to be engaged with the mounting mechanism, and the at least one engaging portion includes at least one first engaging portions displaced and engaged in a predetermined direction and at least one second engaging portion displaced and engaged in a direction different from the predetermined direction.

Abstract: To provide a substrate storage container capable of keeping low a relative humidity in an internal closed space for a long period of time even after purging, a substrate storage container including a constitutive material, which includes a shell body, a door and an on-off valve, defining the internal closed space, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt. % or less when immersed in water at 23 degree C. for 24 hours, and thereby, an actual requirement is objectively satisfied in terms of water release suppression ability under JIS K 7209 or ISO 62 to significantly suppress releasing of water into the internal closed space 3 through the shell body, the door and the on-off valve.

Abstract: [Problem] To reduce a sliding trace in a vicinity of a substrate end surface, while maintaining smooth vertical movement of a substrate in a groove of the holding section in a substrate storage container, said sliding trace being made with the holding section. [Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2).

Abstract: To provide a substrate storage container capable of keeping low a relative humidity in an internal closed space for a long period of time even after purging, a substrate storage container including a constitutive material, which includes a shell body, a door and an on-off valve, defining the internal closed space, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt. % or less when immersed in water at 23 degree C. for 24 hours, and thereby, an actual requirement is objectively satisfied in terms of water release suppression ability under JIS K 7209 or ISO 62 to significantly suppress releasing of water into the internal closed space 3 through the shell body, the door and the on-off valve.

Abstract: A substrate storing container has a container body for accommodating substrates; and a door that is detachably fitted to an opening of the container body with a gasket interposed therebetween. The container body and door are separately formed of molding material containing synthetic resin having a water absorption of 0.1% or lower and outgassing in a total amount of 15 ppm or lower when measured after a 24 hour heating at 80 deg. C. by the dynamic headspace technique. The synthetic resin in the molding material is at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.

Abstract: A substrate storage container includes a container body capable of storing a plurality of substrates in array, a lidding body, and a retainer for retaining substrates therebetween. The retainer includes a plurality of flexible and elastic pieces that are extended from the interior side of the lidding body in the direction of substrates stored in the container body and arranged in the direction of the array of the plurality of substrates, and holding groove pieces each formed with the elastic piece for touching and holding the rim of the substrate. The elastic piece with holding groove piece is gradually curved outwardly with respect to the width direction of the substrate from the interior side of the lidding body toward the substrate, so as to reduce the contact-holding area of the holding groove piece with the rim of the substrate.

Abstract: To provide the method for manufacturing the friction material for shortening the heat treatment process for completely curing the thermosetting resin in the friction material. The method includes the molding process for fixing the friction material onto a back plate, in which a raw material including a thermosetting resin is superposed onto the back plate, pressed and heated in the mold, and the heat treatment process for curing the friction material, using a pair of the heat plates provided at the back plate side and the friction material side to press the back plate surface and the friction material, and the heat plate temperature at the friction material side is between 300 and 650° C., at the back plate side is between 180 and 350° C., and the heat treatment time is between 2 and 70 minutes.

Abstract: To provide a storage container which can inhibit and prevent generation of dust due to the motions of an advancing and retracting element, whose door element can be formed with a reduced space and thickness and which can prevent contamination of the articles accommodated therein, the storage container includes a container body 1 for storing precision substrates, a door element 10 that opens and closes the front of container body 1 and a locking mechanism 20 for locking and unlocking door element 10 that covers container body 1.

Abstract: A substrate storage container which includes: a front-opening box type container body for storing a multiple number of substrates in alignment therein; a door for opening and closing the open front of the container body in a sealing manner; and inner-pressure adjustment devices attached to the mounting ports in the container body and the door for adjusting the pressure inside the container body closed with the door. The inner-pressure adjustment device is configured of an elastic attachment cylinder, a filter support structure fitted into, and protected by, the attachment cylinder and a multiple number of filters held inside the filter support structure. Since the inner-pressure adjustment device can be set by mounting an attachment cylinder of a simple structure by use of elastic deformation to the attachment hole, which is provided for the container body and/or the door, there is no need of forming screw holes which need time and effort.

Abstract: A substrate storage container includes a container body capable of storing a plurality of substrates in array, a lidding body, and a retainer for retaining substrates therebetween. The retainer includes a plurality of flexible and elastic pieces that are extended from the interior side of the lidding body in the direction of substrates stored in the container body and arranged in the direction of the array of the plurality of substrates, and holding groove pieces each formed with the elastic piece for touching and holding the rim of the substrate. The elastic piece with holding groove piece is gradually curved outwardly with respect to the width direction of the substrate from the interior side of the lidding body toward the substrate, so as to reduce the contact-holding area of the holding groove piece with the rim of the substrate.

Abstract: An apparatus is provided for suppressing torque steering in a vehicle in which left/right drive shafts are coupled via outer joints to left/right front wheels. The drive shafts are connected via inner joints to an engine and transmission. The height of the inner joints is set 5-20 mm lower than the height of the outer joints, thus forming tilt angles between the left/right drive shafts and the center axis through the left/right wheels and the outer joint. As acceleration of the vehicle increases, the engine moves upward, thus causing the inner joints to move as well. This upward movement of the inner joints causes the tilt angle formed by the drive shafts to decrease. The specific placement of the inner joints is selected so that the left/right tilt angles reach zero at a predetermined rate of acceleration, which may be the vehicle's maximum rate of acceleration.