Abstract: An information processing apparatus includes an electronic paper capable of displaying target data to be displayed and a control device that performs a control of processing. The electronic paper includes a display unit that can electrically display and erase the target data and a first communication unit that exchanges data with the control device. The control device includes a storage unit that stores the target data, a display control unit that controls the display unit to display the target data stored in the storage unit, and a second communication unit that exchanges data with the electronic paper.

Abstract: An input device includes an accepting unit that is made of a soft material having at least one of a concave form and a convex form and accepts an input from a user, a detecting unit that detects the operating force, and a control unit that determines an operation to be performed based on the operating force.

Abstract: An exposure method for projecting, through a projection optical system, a predetermined pattern formed on a mask onto an object to be exposed. The exposure method includes the steps of dividing an effective light source area for illuminating the mask into plural point light sources, calculating a Zernike sensitivity coefficient that represents a sensitivity of a change of image quality of the predetermined pattern to a change of a Zernike coefficient, when wave front aberration in the projection optical system is developed into a Zernike polynomial for all divided point light sources, determining an effective light source distribution based on a combination of Zernike sensitivity coefficient of all divided point light sources, and forming the effective light source distribution by intensity of each point light source.

Abstract: A coordinate input device detects coordinates of a position by indicating a screen of a display device with fingers of one hand, and transfers information of the detected coordinates to a computer through a controller. The computer receives an operation that complies with the detected coordinates, and executes the corresponding processing. For example, when it is detected that two points on the screen have been simultaneously indicated, an icon registered in advance is displayed close to the indicated position.

Abstract: A measurement method for measuring a distortion of a projection optical system that projects a pattern, used by an exposure apparatus that exposes the reticle pattern onto an object to be exposed, the measurement method includes the steps of a first exposing step for exposing a mark pattern onto the object to be exposed, the mark pattern having a mark on or near an optical axis of the projection optical system and a mark beside the optical axis, and being arranged at a position of the reticle, a second exposing step for only exposing a mark on or near the optical axis of the projection optical system in the mark pattern, measuring step for measuring a shape of the mark formed on the object to be exposed via the first and second exposing steps, and calculating step for calculating the distortion of the projection optical system from the shape of the mark measured by the measuring step.

Abstract: Disclosed is a method of measuring aberration of a projection optical system, that includes an illuminating step for illuminating a reticle by use of light from a light source and through an illumination optical system, a projecting step for projecting an image of a test pattern formed on the reticle, upon a substrate through the projection optical system, a measuring step for measuring a positional deviation amount of the image of the test pattern, and a determining step for determining the aberration of the projection optical system on the basis of the positional deviation amount measured at the measuring step, wherein the projecting step includes a shaping step for shaping the light by use of shaping means disposed in one of the illumination optical system and the projection optical system and a light blocking pattern formed on a surface of the reticle, remote from a surface of the reticle where the test pattern is formed, so that the light passes only through a predetermined region of a pupil of the proje

Abstract: An exposure method for projecting, through a projection optical system, a predetermined pattern formed on a mask onto an object to be exposed, said exposure method comprising the steps of calculating a Zernike sensitivity coefficient that represents sensitivity of a change of image quality of the predetermined pattern to a change of a Zernike coefficient, when wave front aberration in the projection optical system is developed into a Zernike polynomial in plural point light sources that divide an effective light source area for illuminating the mask, and determining an effective light source distribution based on intensity of each point light source and the Zernike sensitivity coefficient.

Abstract: A position measuring method and a position measuring system using the same are disclosed. Plural marks of different linewidths are formed at different locations on an object to be measured, and the plural marks are detected, at the different locations and with different focus states. For determination of a measurement mark, such a mark among the plural marks as having a linewidth with which a change in focus characteristic, at the different locations, is smallest, is selected, and then the position measurement is performed to the object by using the determined measurement mark.

Abstract: A method of detecting focus information about an image projecting optical system includes performing mark projection through the optical system, and, based on illumination lights having different chief ray incidence directions, the mark projection is carried out so that mark images formed by the illumination lights, respectively, are superposed one upon another approximately upon an imaging plane, and detecting focus information about the optical system on the basis of information related to a deviation between the mark images superposed.

Abstract: A method of evaluating an imaging performance of an imaging optical system includes providing a member having a measurement mark with a predetermined surface level difference, illuminating the member having the measurement mark through the imaging optical system, and receiving reflection light from the illuminated measurement mark again through the imaging optical system. A detection signal is produced based on the measurement mark, illuminated through the imaging optical system, wherein the detection signal is produced while changing a focus within a depth of focus of the imaging optical system. A positional deviation is measured on the basis of the detection signal, and the imaging performance is evaluated of the imaging optical system on the basis of a change in a measured value of the positional deviation measurement with respect to a change in the focus.

Abstract: A coordinate input device detects coordinates of a position by indicating a screen of a display device with fingers of one hand, and transfers information of the detected coordinates to a computer through a controller. The computer receives an operation that complies with the detected coordinates, and executes the corresponding processing. For example, when it is detected that two points on the screen have been simultaneously indicated, an icon registered in advance is displayed close to the indicated position.

Abstract: Disclosed is a method of detecting focus information about an image projecting optical system, in which mark projection is made through the optical system and based on illumination lights having different chief ray incidence directions, the mark projection being carried out so that mark images formed by the illumination lights, respectively, are superposed one upon another approximately upon an imaging plane, and focus information about the optical system is detected on the basis of information related to a deviation between the mark images superposed.

Abstract: A wristwatch receives time-of-day information transmitted in the form of an infrared signal and then calculates the difference between the received time-of-day information and its time data. A decision is made as to whether the difference is not less than or less than a predetermined value. If the difference is less than the predetermined value, the accuracy of the received data and the accuracy set in the wristwatch are determined by referring to the types of time-measuring references. When the received data is higher accurate, the current time data stored by the first storage area is corrected by the received time data.

Abstract: A method of detecting coma of a projection optical system includes receiving an image of a pattern projected by the projection optical system, at at least one position along an optical axis of the projection optical system, detecting a position of at least one received pattern image, with respect to a plane perpendicular to the optical axis of the projection optical system, and determining coma of the projection optical system on the basis of the detection.

Abstract: In an azimuth indicating apparatus, there are provided a wind speed measuring unit for measuring a wind speed, an azimuth measuring unit for measuring azimuth, a display unit for displaying wind speeds measured at respective azimuths, and a display control unit for controlling the display unit to display the wind speeds measured at the respective azimuths based on the measurement results of the azimuth measuring unit and the wind speed measuring unit. Accordingly, the blowing direction of the wind is indicated by the azimuth indicating apparatus.

Abstract: A remote control device including a receiver for receiving a control signal which remotely controls an external device, a RAM for storing the received control signal in correspondence to a respective one of keys, a transmitter for reading a control signal corresponding to an operated key from the RAM and transmitting the read control signal, and a display for displaying the stored data in the RAM when the control signal is received/transmitted. In a first aspect, when an external control signal is received and stored for any key, a key for which no control signal is stored is detected from the RAM and displayed on the display. When a control signal is transmitted, a key for which a control signal is stored in the RAM is detected and displayed on the display. In a second aspect, when an external control signal is received, a detector detects the contents of the received control signal, which are then displayed on the display.