Patents by Inventor Hiroshi Motono
Hiroshi Motono has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230384248Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: ApplicationFiled: July 31, 2023Publication date: November 30, 2023Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Publication number: 20230375485Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm 11 being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: ApplicationFiled: July 31, 2023Publication date: November 23, 2023Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Patent number: 11754515Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: GrantFiled: January 8, 2020Date of Patent: September 12, 2023Assignee: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Patent number: 11733185Abstract: This fluorescent X-ray analysis apparatus is provided with an X-ray irradiation unit 20 for irradiating a sample S with: X-rays, having an energy that exceeds the energy absorption edge value of Ag which is selected as a measurement target element, and that is no greater than the energy absorption edge value of Sn which is an adjacent element having a higher energy absorption edge value than Ag; and X-rays having an energy exceeding the energy absorption edge value of Sn which is selected as a measurement target element.Type: GrantFiled: December 29, 2020Date of Patent: August 22, 2023Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Shuichi Kato, Kazuhiko Omote, Hiroshi Motono, Naoki Matsushima
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Publication number: 20220170869Abstract: A transmission type small-angle scattering device of the present invention includes a goniometer 10 including a rotation arm 11. The rotation arm 11 is freely turnable around a ?-axis extending in a horizontal direction from an origin with a vertical arrangement state of the rotation arm being defined as the origin, and has a vertical arrangement structure in which an X-ray irradiation unit 20 is installed on a lower-side end portion of the rotation arm 11, and a two-dimensional X-ray detector 30 is installed on an upper-side end portion of the rotation arm 11 to form a vertical arrangement structure.Type: ApplicationFiled: January 8, 2020Publication date: June 2, 2022Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Sei Yoshihara, Yoshiyasu Ito, Kazuhiko Omote, Hiroshi Motono, Shigematsu Asano, Katsutaka Horada, Sensui Yasuda
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Patent number: 11079345Abstract: An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a ? rotation mechanism 35 for rotating the sample placement unit 11 and a ?-axis about a ?-axis that is orthogonal to a ?s-axis and a ?d-axis at a measurement point P and extends horizontally.Type: GrantFiled: September 5, 2018Date of Patent: August 3, 2021Assignee: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada
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Publication number: 20210116399Abstract: This fluorescent X-ray analysis apparatus is provided with an X-ray irradiation unit 20 for irradiating a sample S with: X-rays, having an energy that exceeds the energy absorption edge value of Ag which is selected as a measurement target element, and that is no greater than the energy absorption edge value of Sn which is an adjacent element having a higher energy absorption edge value than Ag; and X-rays having an energy exceeding the energy absorption edge value of Sn which is selected as a measurement target element.Type: ApplicationFiled: December 29, 2020Publication date: April 22, 2021Applicant: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Shuichi Kato, Kazuhiko Omote, Hiroshi Motono, Naoki Matsushima
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Publication number: 20210063326Abstract: An X-ray inspection device of the present invention includes a sample placement unit 11 for placing a sample as an inspection target therein, a sample placement unit positioning mechanism 30 for moving the sample placement unit 11, a goniometer 20 including first and second rotation members 22, 23 that rotate independently of each other, an X-ray irradiation unit 40 installed on the first rotation member 22, and a two-dimensional X-ray detector 50 installed on the second rotation member 23. The sample placement unit positioning mechanism 30 includes a ? rotation mechanism 35 for rotating the sample placement unit 11 and a ?-axis about a ?-axis that is orthogonal to a ?s-axis and a ?d-axis at a measurement point P and extends horizontally.Type: ApplicationFiled: September 5, 2018Publication date: March 4, 2021Applicant: RIGAKU CORPORATIONInventors: Naoki Matsushima, Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada
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Patent number: 10876978Abstract: In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.Type: GrantFiled: July 12, 2017Date of Patent: December 29, 2020Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Takao Kinefuchi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada, Makoto Kambe, Licai Jiang, Boris Verman
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Patent number: 10514345Abstract: An X-ray thin film inspection device according to the present invention has an X-ray irradiation unit 40 mounted in a first rotation arm 32, an X-ray detector 50 mounted in a second rotation arm 33, a fluorescence X-ray detector 60 for detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unit 110 for measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit 100) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit 110.Type: GrantFiled: October 14, 2014Date of Patent: December 24, 2019Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Kazuhiko Omote, Yoshiyasu Ito, Hiroshi Motono, Muneo Yoshida, Hideaki Takahashi
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Patent number: 10473598Abstract: An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.Type: GrantFiled: October 14, 2014Date of Patent: November 12, 2019Assignee: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Takao Kinefuchi, Shiro Umegaki, Shigematsu Asano, Katsutaka Horada, Muneo Yoshida, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Kazuhiko Omote, Yoshiyasu Ito, Naoki Kawahara, Asao Nakano
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Publication number: 20190227005Abstract: In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.Type: ApplicationFiled: July 12, 2017Publication date: July 25, 2019Inventors: Kiyoshi Ogata, Kazuhiko Omote, Sei Yoshihara, Yoshiyasu Ito, Hiroshi Motono, Hideaki Takahashi, Takao Kinefuchi, Akifusa Higuchi, Shiro Umegaki, Shigematsu Asano, Ryotaro Yamaguchi, Katsutaka Horada, Makoto Kambe, Licai Jiang, Boris Verman
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Publication number: 20170299528Abstract: An X-ray thin film inspection device according to the present invention has an X-ray irradiation unit 40 mounted in a first rotation arm 32, an X-ray detector 50 mounted in a second rotation arm 33, a fluorescence x-ray detector 60 for detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unit 110 for measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit 100) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit 110.Type: ApplicationFiled: October 14, 2014Publication date: October 19, 2017Applicant: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Kazuhiko Omote, Yoshiyasu Ito, Hiroshi Motono, Muneo Yoshida, Hideaki Takahashi
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Publication number: 20170234814Abstract: An X-ray thin film inspection device of the present invention includes an X-ray irradiation unit 40 installed on a first rotation arm 32, an X-ray detector 50 installed on a second rotation arm 33, and a fluorescence X-ray detector 60 for detecting fluorescence X-rays generated from an inspection target upon irradiation of X-rays. The X-ray irradiation unit 40 includes an X-ray optical element 43 comprising a confocal mirror for receiving X-rays radiated from an X-ray tube 42, reflects plural focused X-ray beams monochromatized at a specific wavelength and focuses the plural focused X-ray beams to a preset focal point, and a slit mechanism 46 for passing therethrough any number of focused X-ray beams out of the plural focused X-ray beams reflected from the X-ray optical element 43.Type: ApplicationFiled: October 14, 2014Publication date: August 17, 2017Applicant: RIGAKU CORPORATIONInventors: Kiyoshi Ogata, Sei Yoshihara, Takao Kinefuchi, Shiro Umegaki, Shigematsu Asano, Katsutaka Horada, Muneo Yoshida, Hiroshi Motono, Hideaki Takahashi, Akifusa Higuchi, Kazuhiko Omote, Yoshiyasu Ito, Naoki Kawahara, Asao Nakano
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Patent number: 7819658Abstract: Disclosed herein is a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and of contributing to space saving, when an object to be treated is carried in the vertical heat treatment system through the opening to carry out a predetermined treatment.Type: GrantFiled: February 13, 2007Date of Patent: October 26, 2010Assignee: Tokyo Electron LimitedInventors: Kazunari Sakata, Shinya Mochizuki, Motoki Akimoto, Hiroshi Motono
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Patent number: 7258485Abstract: An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.Type: GrantFiled: October 26, 2005Date of Patent: August 21, 2007Assignee: Rigaku CorporationInventors: Asao Nakano, Takao Kinefuchi, Hiroshi Motono, Atsunori Kiku
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Publication number: 20070166657Abstract: There is provided a vertical heat treatment system capable of simplifying the structure of various mechanisms in the vicinity of an opening which is formed in a partition wall separating a housing-box transfer area from a treating-object transfer area (a wafer transfer area), and of contributing to space saving, when an object to be treated is carried in the vertical heat treatment system through the opening to carry out a predetermined treatment.Type: ApplicationFiled: February 13, 2007Publication date: July 19, 2007Inventors: Kazunari Sakata, Koyu Hasegawa, Keiichi Katabuchi, Shingo Watanabe, Shinya Mochizuki, Motoki Akimoto, Hiroshi Motono
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Patent number: 7217313Abstract: A dehumidifying system supplies a gas free of organic substances. The dehumidifying system includes a holding case, and a rotor rotatably held in the holding case and bearing an adsorbent. The interior of the holding case is divided into an adsorbing zone and a regenerating zone by partition plates attached to the holding case. A process gas is supplied into the adsorbing zone. The process gas processed in the adsorbing zone is supplied into an objective space. A regenerating gas is supplied into the regenerating zone to eliminate moisture and organic substances adsorbed by the adsorbent in the adsorbing zone from the adsorbent.Type: GrantFiled: May 26, 2003Date of Patent: May 15, 2007Assignees: Tokyo Electron Limited, Nichias CorporationInventors: Hiroshi Motono, Takashi Tanahashi, Masaji Kurosawa, Katsuhiro Yamashita
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Patent number: 7059849Abstract: A heat treatment system and method for cooling a loading chamber that includes a heat treatment furnace for heat-treating an object to be treated. The heat treatment furnace includes a throat for carrying the object in and out, and a cooling mechanism for cooling the vicinity of the throat. The cooling mechanism has a ventilating unit with a ventilating port for sending a cooling fluid toward the vicinity of the throat and a heat exchanger arranged so as to face the ventilating port in the vicinity of the throat. The cooling mechanism also has an intake fan for sucking the cooling fluid in the vicinity of the throat over the heat exchanger. When the object to be treated is carried in, the structure of various mechanisms in the vicinity of the throat is simplified, and space is saved.Type: GrantFiled: August 23, 2001Date of Patent: June 13, 2006Assignee: Tokyo Electron LimitedInventors: Kazunari Sakata, Koyu Hasegawa, Keiichi Katabuchi, Shingo Watanabe, Shinya Mochizuki, Motoki Akimoto, Hiroshi Motono
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Publication number: 20060088139Abstract: An X-ray thin film inspection apparatus including a sample table on which an inspection target such as a product wafer or the like is mounted, a positioning mechanism for moving the sample table, a goniometer having first and second swing arms, at least one X-ray irradiation unit that are mounted on the first swing arm and containing an X-ray tube and an X-ray optical element in a shield tube, an X-ray detector mounted on a second swing arm, and an optical camera for subjecting the inspection target disposed on the sample table to pattern recognition.Type: ApplicationFiled: October 26, 2005Publication date: April 27, 2006Applicant: Rigaku CorporationInventors: Asao Nakano, Takao Kinefuchi, Hiroshi Motono, Atsunori Kiku