Abstract: A transistor includes a semiconductor substrate including a first active region, a second active region, and a semiconductor channel, a gate stack structure that overlies the semiconductor channel, a proximal dielectric material layer overlying the semiconductor substrate, laterally surrounding the gate stack structure, a distal dielectric material layer overlying the proximal dielectric material layer, and a first contact via structure contacting the first active region having a greater lateral extent at a level of the proximal dielectric material layer than at a level of the distal dielectric material layer.

Abstract: A field effect transistor includes a gate dielectric and a gate electrode overlying an active region and contacting a sidewall of a trench isolation structure. The transistor may be a fringeless transistor in which the gate electrode does not overlie a portion of the trench isolation region. A planar dielectric spacer plate and a conductive gate cap structure may overlie the gate electrode. The conductive gate cap structure may have a z-shaped vertical cross-sectional profile to contact the gate electrode and to provide a segment overlying the planar dielectric spacer plate. Alternatively or additionally, a conductive gate connection structure may be provided to provide electrical connection between two electrodes of adjacent field effect transistors.

Abstract: A field effect transistor includes a source region and a drain region formed within and/or above openings in a dielectric capping mask layer overlying a semiconductor substrate and a gate electrode. A source-side silicide portion and a drain-side silicide portion are self-aligned to the source region and to the drain region, respectively.

Abstract: A field effect transistor includes a source region and a drain region formed within and/or above openings in a dielectric capping mask layer overlying a semiconductor substrate and a gate electrode. A source-side silicide portion and a drain-side silicide portion are self-aligned to the source region and to the drain region, respectively.

Abstract: A transistor includes a semiconductor substrate including a first active region, a second active region, and a semiconductor channel, a gate stack structure that overlies the semiconductor channel, a proximal dielectric material layer overlying the semiconductor substrate, laterally surrounding the gate stack structure, a distal dielectric material layer overlying the proximal dielectric material layer, and a first contact via structure contacting the first active region having a greater lateral extent at a level of the proximal dielectric material layer than at a level of the distal dielectric material layer.

Abstract: A field effect transistor includes a source region and a drain region formed within and/or above openings in a dielectric capping mask layer overlying a semiconductor substrate and a gate electrode. A source-side silicide portion and a drain-side silicide portion are self-aligned to the source region and to the drain region, respectively.

Abstract: A field effect transistor includes a source region and a drain region formed within and/or above openings in a dielectric capping mask layer overlying a semiconductor substrate and a gate electrode. A source-side silicide portion and a drain-side silicide portion are self-aligned to the source region and to the drain region, respectively.

Abstract: A field effect transistor includes a gate dielectric and a gate electrode overlying an active region and contacting a sidewall of a trench isolation structure. The transistor may be a fringeless transistor in which the gate electrode does not overlie a portion of the trench isolation region. A planar dielectric spacer plate and a conductive gate cap structure may overlie the gate electrode. The conductive gate cap structure may have a z-shaped vertical cross-sectional profile to contact the gate electrode and to provide a segment overlying the planar dielectric spacer plate. Alternatively or additionally, a conductive gate connection structure may be provided to provide electrical connection between two electrodes of adjacent field effect transistors.

Abstract: A field effect transistor includes a gate dielectric and a gate electrode overlying an active region and contacting a sidewall of a trench isolation structure. The transistor may be a fringeless transistor in which the gate electrode does not overlie a portion of the trench isolation region. A planar dielectric spacer plate and a conductive gate cap structure may overlie the gate electrode. The conductive gate cap structure may have a z-shaped vertical cross-sectional profile to contact the gate electrode and to provide a segment overlying the planar dielectric spacer plate. Alternatively or additionally, a conductive gate connection structure may be provided to provide electrical connection between two electrodes of adjacent field effect transistors.

Abstract: Field effect transistors for an SRAM cell can be formed employing n-doped gate electrode portions for p-type pull-up transistors. The SRAM cell includes a first series connection of a first p-type pull-up transistor and a first n-type pull-down transistor located between a power supply source and electrical ground, and a second series connection of a second p-type pull-up transistor and a second n-type pull-down transistor located between the power supply source and the electrical ground. Each gate electrode of the SRAM cell can include a respective n-doped gate electrode portion.

Abstract: Field effect transistors for an SRAM cell can be formed employing n-doped gate electrode portions for p-type pull-up transistors. The SRAM cell includes a first series connection of a first p-type pull-up transistor and a first n-type pull-down transistor located between a power supply source and electrical ground, and a second series connection of a second p-type pull-up transistor and a second n-type pull-down transistor located between the power supply source and the electrical ground. Each gate electrode of the SRAM cell can include a respective n-doped gate electrode portion.

Abstract: A silicon oxide liner, a silicon nitride liner, and a planarization silicon oxide layer may be sequentially formed over p-type and n-type field effect transistors. A patterned dielectric material layer covers an entirety of the n-type field effect transistor and does not cover at least a fraction of each area of p-doped active regions. An anisotropic etch process is performed to form p-type active region via cavities extending to a respective top surface of the p-doped active regions and n-type active region via cavities having a respective bottom surface at, or within, one of the silicon nitride liner and the silicon oxide liner. Boron-doped epitaxial pillar structures may be formed on top surfaces of the p-type active regions employing a selective epitaxy process. The n-type active region via cavities are extended to top surfaces of the n-doped active regions. Contact via structures are formed in the via cavities.

Abstract: Field effect transistors for an SRAM cell can be formed employing n-doped gate electrode portions for p-type pull-up transistors. The SRAM cell includes a first series connection of a first p-type pull-up transistor and a first n-type pull-down transistor located between a power supply source and electrical ground, and a second series connection of a second p-type pull-up transistor and a second n-type pull-down transistor located between the power supply source and the electrical ground. Each gate electrode of the SRAM cell can include a respective n-doped gate electrode portion.

Abstract: Field effect transistors for an SRAM cell can be formed employing n-doped gate electrode portions for p-type pull-up transistors. The SRAM cell includes a first series connection of a first p-type pull-up transistor and a first n-type pull-down transistor located between a power supply source and electrical ground, and a second series connection of a second p-type pull-up transistor and a second n-type pull-down transistor located between the power supply source and the electrical ground. Each gate electrode of the SRAM cell can include a respective n-doped gate electrode portion.

Abstract: A silicon oxide liner, a silicon nitride liner, and a planarization silicon oxide layer may be sequentially formed over p-type and n-type field effect transistors. A patterned dielectric material layer covers an entirety of the n-type field effect transistor and does not cover at least a fraction of each area of p-doped active regions. An anisotropic etch process is performed to form p-type active region via cavities extending to a respective top surface of the p-doped active regions and n-type active region via cavities having a respective bottom surface at, or within, one of the silicon nitride liner and the silicon oxide liner. Boron-doped epitaxial pillar structures may be formed on top surfaces of the p-type active regions employing a selective epitaxy process. The n-type active region via cavities are extended to top surfaces of the n-doped active regions. Contact via structures are formed in the via cavities.

Abstract: A CMOS device includes a p-type field effect transistor containing p-doped active regions, an n-type field effect transistor containing n-doped active regions, a silicon oxide layer overlying the n-type field effect transistor and not overlying the p-type field effect transistor, boron-doped epitaxial pillar structures contacting a top surface of, and epitaxially aligned to, a respective one of the p-doped active regions, first active region contact via structures contacting a top surface of a respective one of the boron-doped epitaxial pillar structures, and second active region contact via structures contacting a top surface of a respective one of the n-doped active regions.

Abstract: A semiconductor structure includes a semiconductor device, a hydrogen diffusion barrier layer, a lower metal line structure located below the hydrogen diffusion barrier layer, an alternating stack of insulating layers and electrically conductive layers, memory stack structures vertically extending through the alternating stack in a memory array region, a through-stack contact via structure extending through the alternating stack and through the hydrogen diffusion barrier layer in the memory array region and contacting the lower metal line structure, and a through-stack insulating spacer laterally surrounding the through-stack contact via structure and extending through the alternating stack but not extending through the hydrogen diffusion barrier layer.

Abstract: A semiconductor structure includes a semiconductor device, a hydrogen diffusion barrier layer, a lower metal line structure located below the hydrogen diffusion barrier layer, an alternating stack of insulating layers and electrically conductive layers, memory stack structures vertically extending through the alternating stack in a memory array region, a through-stack contact via structure extending through the alternating stack and through the hydrogen diffusion barrier layer in the memory array region and contacting the lower metal line structure, and a through-stack insulating spacer laterally surrounding the through-stack contact via structure and extending through the alternating stack but not extending through the hydrogen diffusion barrier layer.

Abstract: A semiconductor device (1001) includes a first thin film transistor (201) including a first semiconductor layer (3A), a gate insulating layer (5), a first gate electrode (7A) provided on the gate insulating layer (5), and first source and drain electrodes (8A), (9A), the first semiconductor layer (3A) including a first channel region (30A) and a first high-density impurity region (33sA), (33dA) containing an impurity of a first conductivity type. The first channel region (30A) includes a first channel portion (31A) and a second channel portion (32A) located between the first channel portion and the first high-density impurity region. The first channel portion (31A) contains an impurity of a second conductivity type that is different from the first conductivity type at a density higher than that in the second channel portion (32A) and the impurity of the first conductivity type at a density substantially equal to that in the second channel portion (32A).

Abstract: A semiconductor device according to the present invention includes a thin-film transistor and a thin-film diode. The respective semiconductor layers and of the thin-film transistor and the thin-film diode are crystalline semiconductor layers that have been formed by crystallizing the same crystalline semiconductor film. Ridges have been formed on the surface of the semiconductor layer of the thin-film diode. And the semiconductor layer of the thin-film diode has a greater surface roughness than the semiconductor layer of the thin-film transistor.