Abstract: A substrate processing apparatus includes a transfer device, having a first pick configured to hold the substrate, configured to transfer a substrate; a detecting device configured to detect a position of the substrate; a susceptor configured to place the substrate thereon; an elevating device configured to move the substrate up and down; and a control device. The control device comprises an adjuster configured to perform a teaching processing; a detector configured to deliver the substrate from the first pick to the susceptor and from the susceptor to the first pick, and configured to detect a first position of the substrate, which is delivered from the susceptor to the first pick, by the detecting device; and a corrector configured to correct the position of the first pick based on a deviation amount between the first position of the substrate and a reference position.

Abstract: A substrate processing apparatus includes a transfer device, having a first pick configured to hold the substrate, configured to transfer a substrate; a detecting device configured to detect a position of the substrate; a susceptor configured to place the substrate thereon; an elevating device configured to move the substrate up and down; and a control device. The control device comprises an adjuster configured to perform a teaching processing; a detector configured to deliver the substrate from the first pick to the susceptor and from the susceptor to the first pick, and configured to detect a first position of the substrate, which is delivered from the susceptor to the first pick, by the detecting device; and a corrector configured to correct the position of the first pick based on a deviation amount between the first position of the substrate and a reference position.

Abstract: A dial, an LED, a black print film and a liquid crystal display panel are provided. A non-black print region where the black print film is absent is provided in, of a back surface of the dial, a circumferential part surrounding an opening and including an inner edge defining the opening.

Abstract: A dial, an LED, a black print film and a liquid crystal display panel are provided. A non-black print region where the black print film is absent is provided in, of a back surface of the dial, a circumferential part surrounding an opening and including an inner edge defining the opening.

Abstract: The substrate processing system includes a controller that transfers the substrate by using a transfer apparatus or controls processing of the substrate in a processing apparatus. A recipe setter of the controller sets a processing recipe. A memory stores an initial reference location of a transfer arm, a first correlation between the processing recipe and a sidewall temperature of a processing chamber, and a second correlation between the sidewall temperature of the processing chamber and a compensated value of a reference location. A compensator compensates a reference location of the transfer arm based on the processing recipe set in the recipe setter and the initial reference location, the first correlation, and the second correlation stored in the memory.

Abstract: A lid apparatus for opening/closing an opening of a main body includes a lid with working and back faces. An arm attaches the lid to the main body to be operable for opening/closing. The arm includes a first axis pivotally supporting the arm on the main body around the opening, and a second axis swingably supporting the back face of the lid on the arm. The second axis is located between the gravity center of the lid and the first axis. A regulatory member intervenes between the arm and the back face of the lid to set the working face of the lid in parallel with the opening.

Abstract: A lid apparatus for opening/closing an opening (12) of a main body (8) includes a lid (14) with working and back faces. An arm (24) attaches the lid (14) to the main body (8) to be operable for opening/closing. The arm (24) includes a first axis (26) pivotally supporting the arm (24) on the main body (8) around the opening (12), and a second axis (34) swingably supporting the back face of the lid (14) on the arm (24). The second axis (34) is between the gravity center (C1) of the lid (14) and the first axis (26). A regulatory member (50) intervenes between the arm (24) and the back face of the lid (14), and regulates the distance therebetween, at a regulatory position between the first and second axes (26, 34), to set the working face of the lid (14) in parallel with the opening (12).

Abstract: A guide drive device permits compact reception of a greater number of guide bars and nests within an existing installation space at a side portion of a knitting machine, by disposition of a drive source for guide attaching members in a space above a fan-shaped arrangement. A support member, attached to a machine frame, is provided with the drive source on the upper side of guide bars, directly, or via a base bar which constitutes an attaching and holding member. The guide bars are displaceable by operation of the drive source, and are arranged in parallel ranks successive in a direction intersecting with knitting needle rows. An angle of circumference can thereby be reduced for enhanced use of available space. The nest angle can be further reduced for improved patterning function surpassing that of a conventional Multibar Raschel machine by tightly fastening thread feed guides of the guide attaching members to driving long members respectively carrying out independent shogging motions.

Abstract: A feed-screw support structure is adapted to absorb thermal expansion of a feed screw in a machine tool. It comprises a main-body member, a bearing-holder at the one end of the feed screw slidably arranged in the main-body member, a clamping member provided between the bearing-holder member and the main-body member and adapted to fix these members, and a device for operating the clamping member in accordance with factors and matters related to heat generation in the feed-screw. The bearing-holder member being normally held in a stationary condition by the clamping member, the feed screw being allowed to relieve thermal expansion by temporarily releasing the stationary condition when heat generation in the feed screw takes place to a relatively large degree.

Abstract: A tool mounting apparatus for fixedly mounting a tool, an abrasive wheel and the like to a spindle of a machine such as a machine tool, by making use of a resilient means incorporated into the spindle. The resilient means is constituted to create a resilient force by compressing a sealingly enclosed high elastic fluid.

Abstract: New and old tools are changed by loosening or fastening a chuck mounted on a main spindle gripping or releasing the new and old tools and rotating and indexing a tool storage magazine in which a multiplicity of tools are stored, without requiring an exclusively usable driving means.