Patents by Inventor Hiroshi Shimakawa

Hiroshi Shimakawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MIST CVD FILM FORMATION DEVICE AND FILM FORMATION METHOD
    Publication number: 20240175128
    Abstract: A mist CVD film formation device that includes: a film forming chamber including: a mist inflow port through which a film forming mist containing a mist of a film forming raw material and a carrier gas flows into the film forming chamber, a stage that supports a film forming target, and a mist outflow port through which the film forming mist flows out of the film forming chamber, wherein an outflow port sectional area is smaller than a film forming chamber interior sectional area; and a heater that heats the stage.
    Type: Application
    Filed: February 5, 2024
    Publication date: May 30, 2024
    Inventors: Hiroshi SHIRAKI, Daisuke KAN, Yuichi SHIMAKAWA
  • Container
    Patent number: D478283
    Type: Grant
    Filed: July 24, 2001
    Date of Patent: August 12, 2003
    Inventor: Hiroshi Shimakawa