Patents by Inventor Hiroshi Tonegawa

Hiroshi Tonegawa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7923374
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Grant
    Filed: May 26, 2009
    Date of Patent: April 12, 2011
    Assignee: Canon Anelva Corporation
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Publication number: 20100040802
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Application
    Filed: October 21, 2009
    Publication date: February 18, 2010
    Applicant: CANON ANELVA CORPORATION
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Publication number: 20090311866
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor absorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Application
    Filed: August 21, 2009
    Publication date: December 17, 2009
    Applicant: CANON ANELVA CORPORATION
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Publication number: 20090233442
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Application
    Filed: May 26, 2009
    Publication date: September 17, 2009
    Applicant: CANON ANELVA CORPORATION
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Patent number: 7262500
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Grant
    Filed: May 19, 2005
    Date of Patent: August 28, 2007
    Assignee: Phyzchemix Corporation
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Patent number: 7208421
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Grant
    Filed: March 7, 2003
    Date of Patent: April 24, 2007
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Publication number: 20060144271
    Abstract: Disclosed are a printing plate precursor, a fabrication process of the printing plate precursor, a fabrication process of a printing plate, a regeneration process of the printing plate, a printing press, and a coating formulation for the printing plate precursor. According to the present invention, a printing plate can be fabricated directly from digital data, and sufficient image quality can be obtained without a developing step, i.e., a developer. To permit repeated use of the precursor, the precursor has a surface, which contains a photocatalyst and is capable of showing hydrophilicity when exposed to activating light having energy higher than band gap energy of the photocatalyst.
    Type: Application
    Filed: February 28, 2006
    Publication date: July 6, 2006
    Applicants: MITSUBISHI HEAVY INDUSTRIES, LTD., MIKUNI COLOR LTD.
    Inventors: Yasuharu Suda, Hiroshi Tonegawa, Minoru Sueda, Hideaki Sakurai, Yoshiyuki Tasaka, Yosuhiro Akita, Toyoshi Ohto, Kimihiko Ohya, Shuuichi Nagahata
  • Patent number: 7070903
    Abstract: Disclosed are a printing plate precursor, a fabrication process of the printing plate precursor, a fabrication process of a printing plate, a regeneration process of the printing plate, a printing press, and a coating formulation for the printing plate precursor. According to the present invention, a printing plate can be fabricated directly from digital data, and sufficient image quality can be obtained without a developing step, i.e., a developer. To permit repeated use of the precursor, the precursor has a surface, which contains a photocatalyst and is capable of showing hydrophilicity when exposed to activating light having energy higher than band gap energy of the photocatalyst.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: July 4, 2006
    Assignees: Mitsubishi Heavy Industries, Ltd., Mikuni Color Ltd.
    Inventors: Yasuharu Suda, Hiroshi Tonegawa, Minoru Sueda, Hideaki Sakurai, Yoshiyuki Tasaka, Yasuhiro Akita, Toyoshi Ohto, Kimihiko Ohya, Shuuichi Nagahata
  • Publication number: 20050230830
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Application
    Filed: May 19, 2005
    Publication date: October 20, 2005
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Publication number: 20050217579
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Application
    Filed: May 19, 2005
    Publication date: October 6, 2005
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Coba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Publication number: 20050092198
    Abstract: It is the primary object of the present invention to provide a printing plate, a fabricating method thereof, a method of making a printing plate with a print image, a method of reproducing the printing plate with a print image, and a printing press that are capable of reducing the light irradiation energy required for writing an image when making a printing plate and erasing the image when reproducing the printing plate. A printing plate including a photocatalyst layer. The photocatalyst layer contains a photocatalyst TiO2 or a TiO2 compound in a surface thereof. The volume rate of an anatase-type crystal in the total crystal component of the photocatalyst TiO2 or TiO2 compound is between 0.4 and 1.0. The total volume crystallization ratio of the photocatalyst is 20% or greater.
    Type: Application
    Filed: October 18, 2004
    Publication date: May 5, 2005
    Inventors: Fumihiko Hirose, Satoshi Sakai, Hiroshi Tonegawa, Yasuharu Suda
  • Publication number: 20040029384
    Abstract: In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
    Type: Application
    Filed: March 7, 2003
    Publication date: February 12, 2004
    Inventors: Hitoshi Sakamoto, Naoki Yahata, Toshihiko Nishimori, Yoshiyuki Ooba, Hiroshi Tonegawa, Ikumasa Koshiro, Yuzuru Ogura
  • Publication number: 20020157552
    Abstract: Disclosed are a printing plate precursor, a fabrication process of the printing plate precursor, a fabrication process of a printing plate, a regeneration process of the printing plate, a printing press, and a coating formulation for the printing plate precursor. According to the present invention, a printing plate can be fabricated directly from digital data, and sufficient image quality can be obtained without a developing step, i.e., a developer. To permit repeated use of the precursor, the precursor has a surface, which contains a photocatalyst and is capable of showing hydrophilicity when exposed to activating light having energy higher than band gap energy of the photocatalyst.
    Type: Application
    Filed: April 25, 2002
    Publication date: October 31, 2002
    Inventors: Yasuharu Suda, Hiroshi Tonegawa, Minoru Sueda, Hideaki Sakurai, Yoshiyuki Tasaka, Yasuhiro Akita, Toyoshi Ohto, Kimihiko Ohya, Shuuichi Nagahata
  • Patent number: 5262091
    Abstract: A steam injector system comprises a plurality of steam injectors each being provided with with a check valve adapted for water supply, a check valve adapted for steam supply, a check valve adapted for overflow and a check valve adapted for discharge and the respective water check valves, steam check valves, overflow check valves and discharge check valves are connected. In another aspect, a steam injector system comprises a plurality of first to last stage steam injectors arranged in series with each other, the last stage steam injector being provided with a relief valve disposed at a last stage overflow drain port, and a pressure pulsation absorbing device is disposed at least between the last stage overflow drain valve and the relief valve.
    Type: Grant
    Filed: May 21, 1992
    Date of Patent: November 16, 1993
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tadashi Narabayashi, Hiroshi Miyano, Osamu Ozaki, Wataru Mizumachi, Akira Tanabe, Akio Shioiri, Hiroshi Tonegawa, Takenori Ishiyama
  • Patent number: 4459085
    Abstract: A unique system is disclosed which controls a pressure in a pneumatic pressure supply line of a vehicle in response to both a pressure developing in an accumulator (12) included in the supply line and an engine load, so that a compressor (10) for providing the pressure is activated under light load engine operation, as when air brakes are applied, to effect an engine brake and to elevate the accumulator pressure for reducing the total energy consumption and, therefore, total fuel consumption. A pressure feedback line (16) communicates a pressure in the accumulator (12) to an unloading pressure control valve (32) through a solenoid operated valve (34), which is controlled in response to an output of an engine load sensor (42) and that of a pressure sensor (44). Under heavy load engine operation, the valve (34) is opened at a first pressure level during an elevation of the pressure and closed at a second pressure level which is sufficiently lower than the first during a drop of the pressure.
    Type: Grant
    Filed: July 6, 1982
    Date of Patent: July 10, 1984
    Assignee: Diesel Kiki Company, Ltd.
    Inventor: Hiroshi Tonegawa