Patents by Inventor Hiroshi Tsumjimoto

Hiroshi Tsumjimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PLASMA PROCESSING APPARATUS AND METHOD
    Publication number: 20090242128
    Abstract: A plasma processing apparatus includes an radio frequency (RF) power supply for applying an RF power for generating a plasma to at least one of an upper and a lower electrode which are disposed to face each other in a processing chamber, a high voltage power supply for applying a high voltage to the lower electrode to electrostatically adsorb the substrate to be held thereon and a control unit for controlling the RF power supply and the high voltage power supply. The control unit controls the high voltage power supply so as to apply a high voltage equal to or less than ?1500 V to the lower electrode.
    Type: Application
    Filed: March 26, 2009
    Publication date: October 1, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kenji TAGO, Hiroshi Tsuchiya, Yuji Otsuka, Hiroshi Tsumjimoto, Toshifumi Nagaiwa, Tsuyoshi Yoshida