Patents by Inventor Hirosuke Ooshio

Hirosuke Ooshio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck
    Patent number: 4645218
    Abstract: An electrostatic chuck for holding a work by electrostatic forces, which has an electrostatic attraction body for attracting the work, an electrostatic conductive support body for supporting the electrostatic attraction body, channels for passing cooling medium therethrough and cover means for covering the exposed surfaces of the support body except a portion thereof over which the work is placed. This chuck can not only prevent impure matters from generating from the surfaces of the support body but also prevent damages due to heat.
    Type: Grant
    Filed: July 30, 1985
    Date of Patent: February 24, 1987
    Assignee: Kabushiki Kaisha Tokuda Seisakusho
    Inventors: Hirosuke Ooshio, Osamu Watanabe
  • Magnet driving method and device for same
    Patent number: 4600492
    Abstract: A plurality of bar-like magnets are arranged in a vacuum chamber at an equal space interval to form a plurality of strong magnetic fields in a stripe-pattern form and the magnets are moved reciprocally in the direction of arrangement of the magnetic fields while changing gradually the stop points of the magnets over a work to be processed by etching or sputtering in a step-like manner so that the integral effect of each magnetic field acting on the work is uniform over the entire region of the work.
    Type: Grant
    Filed: July 24, 1985
    Date of Patent: July 15, 1986
    Assignees: Kabushiki Kaisha Tokuda Seisakusho, Kabushiki Kaisha Toshiba
    Inventors: Hirosuke Ooshio, Tetsuo Aikawa, Hidetaka Jo, Haruo Okano, Takashi Yamazaki