Abstract: To prevent an exposed surface of an anticorrosive part for an etching apparatus from being corroded, even when a highly corrosive etching gas such as a chlorine-based or fluorine-based plasma gas is used, an anticorrosive part for the etching apparatus for effecting etching treatment is provided. The anticorrosive part includes an anticorrosive part substrate, and a film of silicon carbide covering that surface of the anticorrosive part substrate which is to be exposed to an etching gas, wherein the silicon carbide film is made of polycrystals of silicon carbide having a 3C crystalline system, and (111) planes of the silicon carbide polycrystals are oriented in parallel to the surface of the silicon carbide film.

Abstract: An object of the present invention is to provide a ceramic structure for improving the resistance against a corrosive substance and to diffuse and supply a fluid over a larger area of the structure. A ceramic laminated article 6 has a ceramic sintered body 1, and a ceramic film 3 provided on the sintered body 1 by means of chemical vapor deposition. A hollow 5 surrounded by the sintered body 1 and film 3, and communicating holes 1d, 4 communicated with the hollow 5 and the outside are formed in the article 6. A filling material 2 are filled in the recess 1c of the sintered body 1 and the holes 1d, 4 are formed. The thus obtained assembly 7 is heat treated to dissipate and remove the filling material 2 through the communicating holes 1d and 4, so that the recess 1c is left as the hollow 5.

Abstract: An object of the invention is to provide a film of an yttria-alumina complex oxide having a high peel strength of the film to a substrate. A mixed powder of powdery materials of yttria and alumina is sprayed on a substrate to form a sprayed film made of an yttria-alumina complex oxide. Preferably, the powdery material of yttria has a 50 percent mean particle diameter of not smaller than 0.1 &mgr;m and not larger than 100 &mgr;m, and the powdery material of alumina has a 50 percent mean particle diameter of not smaller than 0.1 &mgr;m and not larger than 100 &mgr;m. Preferably, the yttria-alumina complex oxide contains at least garnet phase, and may further contain perovskite phase.

Abstract: A silicon carbide body includes polycrystals of silicon carbide, and has a purity of silicon carbide of not less than 99.9999 wt %, a relative density of not less than 99% and a ratio of silicon of not less than 70.12 wt %.

Abstract: A method for producing a silicon carbide body, includes the steps of forming a silicon carbide mass by chemical vapor deposition, and thermally treating the silicon carbide mass under vacuum or in an inert gas atmosphere at a temperature not less than 2000° C., the silicon carbide article having an electric resistivity higher than that of the silicon carbide mass having not been thermally treated.

Abstract: A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa.

Abstract: A porous sintered body is composed of a perovskite-type composite oxide, wherein A-site of the composite oxide are occupied by one or more kinds of first metallic elements selected from the group consisting of calcium and strontium, one or more kinds of second metal elements selected from the group consisting of rare earth elements and yttrium excluding lanthanum and cerium, and lanthanum, the above one or more kinds of the first metallic elements amount to 5 to 70 mol % of the A-sites, and manganese is contained in B-sites of the composite oxide.

Abstract: An air electrode as a component of a solid electrolyte fuel cell. The air electrode is composed of a first layer and a second layer. The first layer has an open porosity of 25% to 57%, pore diameters of 2.5 .mu.m to 12 .mu.m and a resistivity of less than 0.22 .OMEGA.cm. The second layer has an open porosity of 8% to 24%, pore diameters of 0.2 .mu.m to 3 .mu.m, and a ratio of the thickness of the second layer to the thickness of the air electrode is 2% to 28%. The sum of the thicknesses of the first and second layers is 0.7 mm to 3.0 mm. The materials of the first and second layers have perovskite structures selected from the group consisting of lanthanum manganate, calcium manganate, lanthanum nickelate, lanthanum cobalate and lanthanum chromate. A solid electrolyte fuel cell includes the air electrode as described above, a solid electrolyte film formed on the surface of the second layer of the air electrode and a fuel electrode film formed on the surface of the solid electrolyte film.

Abstract: A process for forming a ceramic thin film on a surface of a ceramic body, including the steps of preparing an annular body from a ceramic green sheet, inserting the ceramic body into the annular body, and firing the thus assembled annular body and ceramic body, whereby the annular body is shrunk and joined to the ceramic body.

Abstract: A process is disclosed for producing a solid oxide fuel cell including a solid electrolyte plate, and an air electrode and a fuel electrode provided on opposite surfaces of said solid electrolyte plate. The process comprising the step of joining a film of oxygen ion-conductive zirconia as the solid electrolyte plate to lanthanum manganate as the air electrode through a layer containing a compound selected from a manganese compound and a cobalt compound by press contacting them under heating.

Abstract: A method of producing a self-supporting air electrode for a solid electrolyte fuel cell, including the steps of mixing lanthanum or a lanthanum compound, manganese or a manganese compound, and metal A or a compound thereof into a mixture, wherein A is selected from the group consisting of Sr, Ca, Mg, Y, Ce, Yb, Zn and Ba and pre-firing the mixture at a temperature of at least 1400.degree. C. to yield a synthesized product of La.sub.1-x A.sub.x MnO.sub.3 wherein 0<x .ltoreq.0.5 and forming the synthesized product into a green body and firing the green body to form a self-supporting air electrode body consisting of La.sub.1-x A.sub.x MnO.sub.3.

Abstract: A method of manufacturing a conductive porous ceramic tube including the steps of mixing a powder of La or a La compound, Mn or a Mn compound and Sr or a Sr compound; firing the resulting mixture at a temperature of 1000.degree.-1400.degree. C. and synthesizing the compound of La.sub.1-x Sr.sub.x MnO.sub.3 (where 0<x.ltoreq.0.5); grinding the compound of La.sub.1-x Sr.sub.x MnO.sub.3 to form a powder of 2 to 10 .mu.m in a mean particle diameter; kneading 100 parts by weight of the powder with the addition of an organic binder, water and 1 to 8 parts by weight of a pore-forming agent; forming the kneaded material into a molded tube; drying the molded tube and thereafter firing the molded tube; at a temperature of 1300.degree.-1600.degree. C.

Abstract: A solid electrolyte type fuel cell for generating electric power. The solid electrolyte type fuel cell includes two plate-shaped solid electrolyte type fuel cell elements formed with a plurality of recesses and a gas supply member for supplying an electric power generating gas to the fuel cell. The gas supply member is provided with gas supply openings for the electric power generating gas and arranged between the plate-shaped solid electrolyte type fuel cell elements so that the gas supply openings open in the recesses. When the electric power generating gas is supplied into the recesses from the gas supply openings, the streams of the electric power generating gas impinge against electrodes exposed in the recesses so as to turn their flowing directions to cause the streams to flow along surfaces of the electrodes. As a result, the temperature distribution in the fuel cell becomes uniform so that the electric power generating efficiency can be improved.

Abstract: A solid oxide fuel cell including a bottomprovided cylindrical solid oxide fuel cell element including at least an air electrode, a solid electrolyte and a fuel electrode, a gas feed pipe inserted into a cylindrical space and having a gas feeding portion for feeding an oxidizing gas or a fuel gas into the cylindrical space of the solid oxide fuel cell element. The gas feeding portion is provided at least in a lateral face of the gas feed pipe. Instead of or in addition to the gas feeding portion being provided in the lateral face of the gas feed pipe, a permeating amount of the gas passing through that portion of the porous cylindrical support tube which faces an upstream side of a stream of the gas flowing through the cylindrical space is made smaller than that of the gas passing through that portion of the porous cylindrical support tube which faces a downstream side of the gas stream.

Abstract: A solid oxide fuel cell includes a plurality of flat plate-like laminates spaced substantially in parallel with one another. One surface of each of the laminates is covered with a flat air electrode film, while the other surface is covered with a flat fuel electrode film. The fuel cell further includes a plurality of oxidizing gas flow passages each arranged between the adjacent laminates and facing the flat air electrode film, a plurality of fuel gas flow passages each arranged between the adjacent flat laminates and facing the flat fuel electrode films and at least air electrode films, solid electrolyte films and fuel electrode films interposed between the oxidizing and fuel gas flow passages. Oxidizing gas supply pipes are each extended from an opening at one end of each of the oxidizing gas flow passages into the gas flow passage, and closure members each close the other end of the oxidizing gas flow passage.