Abstract: A controlling method according to an aspect of the present disclosure includes a first chamber provided with a fan, a second chamber to which a replacement gas is sent from the first chamber by the fan and which includes a transporter configured to transport a substrate, a circulation line configured to communicate the first chamber and the second chamber with each other and circulate the replacement gas, and a valve provided in the circulation line. The method includes replacing an inside of the first chamber and an inside of the second chamber with the replacement gas by turning off the fan and closing the valve, and circulating the replacement gas through the circulation line by turning on the fan and opening the valve. The replacing includes controlling the fan to be turned on and the valve to be opened for a predetermined period of time.

Abstract: A living body detection device configured to detect a presence of a living body in a predetermined location. The living body detection device includes a piezoelectric element configured to detect a pressure change in the predetermined location, and a processor configured to: calculate multiple pieces of living body information, based on the pressure change detected by the piezoelectric element; calculate a composite index which compositively indicates that the multiple pieces of living body information are caused by the living body, based on the calculated multiple pieces of living body information; and determine whether there is or not the living body in the predetermined location, based on the calculated composite index.

Abstract: A power storage apparatus including a battery and a control circuit that controls the charging or discharging of the battery, wherein during a polarization elimination time period extending from the charging/discharging end time of the battery to a polarization-eliminated time at which polarization of the battery can be judged to have been eliminated, the control circuit obtains, as an amount of change, the difference between a voltage measured at a first time set according to the temperature of the battery and a voltage measured at a second time following the first time and set according to the temperature of the battery, and sums the product of the amount of change and an estimation coefficient and the voltage measured at the first or second time so as to estimate an open-circuit voltage of the battery to be provided after elimination of the polarization of the battery.

Abstract: Provided is a power storage apparatus including a battery and a control circuit that controls charging and discharging of the battery, wherein during a polarization elimination time period, the control circuit obtains, as an amount of change, a difference between a first voltage of the battery measured at a first time and a second voltage of the battery measured at a second time following the first time, multiplies the amount of change by an estimation coefficient that depends on the first voltage, the second voltage, a temperature of the battery, a temperature of a space around the battery, or a degree of deterioration of the battery, and sums the value obtained so as to estimate an open-circuit voltage to be provided after elimination of the polarization of the battery.

Abstract: Provided is a mounting base member used in a pair for mounting an object to be conveyed thereon, the mounting base member including: a body part configured to support the object to be conveyed; and a top plate part that extends in at least a horizontal direction from an upper part of the body part. The top plate part covers an upper surface of the body part, or the upper surface of the body part contacting the conveyed object is flush with an upper surface of an extending portion of the top plate part.

Abstract: A battery state-of-charge estimation apparatus includes: a storage that stores a charge SOC-OCV curve, a discharge SOC-OCV curve, and internal-division-ratio information; and a state-of-charge estimation unit, wherein: when a capacity difference between a battery before and after charging when the battery is charged when an intersection point is on the discharge SOC-OCV curve or when a capacity difference between the battery before and after discharging when the battery is discharged when an intersection point is on the charge SOC-OCV curve is less than a threshold, the state-of-charge estimation unit references the internal-division-ratio information to determine an internal division ratio; and the state-of-charge estimation unit estimates the state of charge of the battery using the determined internal division ratio, the open-circuit voltage of the battery after elapse of a predetermined time period since the end of charging or discharging, the charge SOC-OCV curve, and the discharge SOC-OCV curve.

Abstract: Provided is a mounting base member used in a pair for mounting an object to be conveyed thereon, the mounting base member including: a body part configured to support the object to be conveyed; and a top plate part that extends in at least a horizontal direction from an upper part of the body part. The top plate part covers an upper surface of the body part, or the upper surface of the body part contacting the conveyed object is flush with an upper surface of an extending portion of the top plate part.

Abstract: A battery state-of-charge estimation apparatus includes: a storage that stores a charge SOC-OCV curve, a discharge SOC-OCV curve, and internal-division-ratio information; and a state-of-charge estimation unit, wherein: when a capacity difference between a battery before and after charging when the battery is charged when an intersection point is on the discharge SOC-OCV curve or when a capacity difference between the battery before and after discharging when the battery is discharged when an intersection point is on the charge SOC-OCV curve is less than a threshold, the state-of-charge estimation unit references the internal-division-ratio information to determine an internal division ratio; and the state-of-charge estimation unit estimates the state of charge of the battery using the determined internal division ratio, the open-circuit voltage of the battery after elapse of a predetermined time period since the end of charging or discharging, the charge SOC-OCV curve, and the discharge SOC-OCV curve.

Abstract: Provided is a power storage apparatus including a battery and a control circuit that controls charging and discharging of the battery, wherein during a polarization elimination time period, the control circuit obtains, as an amount of change, a difference between a first voltage of the battery measured at a first time and a second voltage of the battery measured at a second time following the first time, multiplies the amount of change by an estimation coefficient that depends on the first voltage, the second voltage, a temperature of the battery, a temperature of a space around the battery, or a degree of deterioration of the battery, and sums the value obtained so as to estimate an open-circuit voltage to be provided after elimination of the polarization of the battery.

Abstract: A power storage apparatus including a battery and a control circuit that controls the charging or discharging of the battery, wherein during a polarization elimination time period extending from the charging/discharging end time of the battery to a polarization-eliminated time at which polarization of the battery can be judged to have been eliminated, the control circuit obtains, as an amount of change, the difference between a voltage measured at a first time set according to the temperature of the battery and a voltage measured at a second time following the first time and set according to the temperature of the battery, and sums the product of the amount of change and an estimation coefficient and the voltage measured at the first or second time so as to estimate an open-circuit voltage of the battery to be provided after elimination of the polarization of the battery.

Abstract: Disclosed herein a rotational type foil trap that is capable of avoiding the transmission rate of the EUV light to be lowered even when the EUV light source operates with the high input power and also suppressing the temperature increase of the foil to attain a sufficient life duration. In the rotational type foil trap, one end of each of foils is inserted into each of a plurality of grooves provided on a side face of a center support, and the center support and the each of the foils are fixed together by brazing.

Abstract: Disclosed herein a rotational type foil trap that is capable of avoiding the transmission rate of the EUV light to be lowered even when the EUV light source operates with the high input power and also suppressing the temperature increase of the foil to attain a sufficient life duration. In the rotational type foil trap, one end of each of foils is inserted into each of a plurality of grooves provided on a side face of a center support, and the center support and the each of the foils are fixed together by brazing.

Abstract: A deterioration of the collector performance in an extreme ultraviolet light source device due to a heat deformation of the collector mirror assembly is to be prevented. The collector mirror assembly used in the extreme ultraviolet light source device comprises a plurality of reflective shells 21 with different diameters which are shaped as ellipsoids of revolution or hyperboloids of revolution, wherein the reflective shells 21 are arranged in a nested shape and the ends thereof are held by a holding structure 22. A cooling channel, through which a cooling medium flows is mounted at the reflective shell 21 in the axial direction of the reflective shell on the face being the back side of the reflective surface. This cooling channel acts as a reinforcement material and is able to suppress a heat deformation of the reflective shell 21.

Abstract: A controller of a mobile communication apparatus, such as a cellular phone, that detects operator information based on a radio signal transmitted from a base station and checks whether the operator information has changed while maintaining the same roaming status information. When the controller detects that the operator information changed, the controller transmits one of the same roaming status information and service status information to an external device which is connected via a short-range communication link.

Abstract: An information processing apparatus includes a processor, a storage unit, and a connection unit that connects to a portable device which sends a connection request for a predetermined network as a response to a command from the processor. The processor stores the connection request from the portable device and the predetermined network contained in the connection request in the storage unit; detects a state transition of communication over the predetermined network; and determines whether a network whose status has transitioned from communication being unavailable to communication being available matches the predetermined network stored in the storage unit, and if the two networks match, sends a command to the portable device for causing the portable device to transmit a connection request for the predetermined network as a response.

Abstract: A wireless communication terminal comprising a network communication unit, short distance wireless communication unit, an input unit and a control unit. The network communication unit transmits radio signals to communication network via a base station. The short distance wireless communication unit transmits radio signals to and from an external device. The short distance wireless communication unit establishes a voice link between the wireless communication terminal and the external device to transmit sound data. The input unit inputs a volume control instruction. The control unit controls the short distance wireless communication unit to send a signal based on the volume control instruction if the voice channel is established between the wireless communication terminal and the external device.

Abstract: A wireless communication terminal comprising a network communication unit, short distance wireless communication unit, an input unit and a control unit. The network communication unit transmits radio signals to communication network via a base station. The short distance wireless communication unit transmits radio signals to and from an external device. The short distance wireless communication unit establishes a voice link between the wireless communication terminal and the external device to transmit sound data. The control unit discards a volume update notification received from the external device via the short distance wireless communication unit if the voice link has not been established.

Abstract: A deterioration of the collector performance in an extreme ultraviolet light source device due to a heat deformation of the collector mirror assembly is to be prevented. The collector mirror assembly used in the extreme ultraviolet light source device comprises a plurality of reflective shells 21 with different diameters which are shaped as ellipsoids of revolution or hyperboloids of revolution, wherein the reflective shells 21 are arranged in a nested shape and the ends thereof are held by a holding structure 22. A cooling channel, through which a cooling medium flows is mounted at the reflective shell 21 in the axial direction of the reflective shell on the face being the back side of the reflective surface. This cooling channel acts as a reinforcement material and is able to suppress a heat deformation of the reflective shell 21.