Patents by Inventor Hirotoshi Sugimoto

Hirotoshi Sugimoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6741044
    Abstract: When a lamp is turned on and a wafer is placed on a light exposure surface, a controlling unit opens a shutter plate so that light is emitted on the light exposure surface and an illuminometer receives the light. An accumulated light amount measuring unit converts illumination intensity measured by the illuminometer to an accumulated light amount. The controlling unit turns off the lamp by sending a lamp OFF signal to a power supplying unit. At the same time, the controlling unit sends a shutter closing command to the power supplying unit. After the shutter is closed, the controlling unit relight the lamp by sending a lamp ON signal to the power supplying unit.
    Type: Grant
    Filed: May 30, 2003
    Date of Patent: May 25, 2004
    Assignee: Ushio Denki Kabushiki Kaisha
    Inventors: Minoru Komori, Hirotoshi Sugimoto
  • Publication number: 20030222602
    Abstract: When a lamp is turned on and a wafer is placed on a light exposure surface, a controlling unit opens a shutter plate so that light is emitted on the light exposure surface and an illuminometer receives the light. An accumulated light amount measuring unit converts illumination intensity measured by the illuminometer to an accumulated light amount. The controlling unit turns off the lamp by sending a lamp OFF signal to a power supplying unit. At the same time, the controlling unit sends a shutter closing command to the power supplying unit. When the shutter is closed, the controlling unit relight the lamp by sending a lamp ON signal to the power supplying unit.
    Type: Application
    Filed: May 30, 2003
    Publication date: December 4, 2003
    Inventors: Minoru Komori, Hirotoshi Sugimoto