Abstract: A method for analyzing a state of an element in a specimen comprises the steps of applying an exciting source to the element, detecting the intensity of characteristic X-rays generated from measurement points at two wavelengths previously selected depending on the state of the element to be analyzed, comparing the intensity ratio of the characteristic X-rays at the two wavelengths to detect some measurement points providing the detected intensity ratio falling within a range selected depending on the state of the element, and outputting state detection signals detected only at said some measurement points to obtain a line analysis or a two-dimensional scanning image.

Abstract: An X-ray source includes a thin film X-ray target for generating and focusing X-rays in response to the application of electron beams, and a capillary tubular element for allowing the X-rays to pass. The capillary tubular element has such a diameter the beams of the X-rays impinging on the inner surfaces of the capillary tubular element are totally reflected. Additionally, a thin film is provided for adsorbing the electron beams, but allowing the X-rays to penetrate.