Abstract: An optical wavelength division multiplexing transmission system is disclosed, in which it is possible to establish a new additional line readily, without affecting lines. The optical wavelength division multiplexing transmission system has a plurality of cascaded transmission devices respectively having optical wavelength division multiplexing functions, and each of the plurality of transmission devices includes a management section for managing used and unused wavelengths, and the respective transmission devices located in a section where a new additional line is to be established allocate an unused wavelength to the new additional line, on the basis of the unused wavelength information held by the management sections, thereby ensuring a route going to the target transmission device.

Abstract: On top of respective areas divided by partition plates, that is, a cassette station, a processing station, and an interface section in a coating and developing processing system, gas supply sections for supplying an inert gas into the respective areas are provided. Exhaust pipes for exhausting atmospheres in the respective areas are provided at the bottom of the respective areas. The atmospheres in the respective areas are maintained in a clean condition by supplying the inert gas not containing impurities such as oxygen and fine particles from the respective gas supply sections into the respective areas and exhausting the atmospheres in the respective areas from the exhaust pipes.

Abstract: A developing unit, a coating unit and a plurality of cooling plates are arranged in a process station which performs a resist coating and so on and a wafer is transferred among them by a substrate transfer device. The temperature of an area to where the wafer is transferred is detected by a temperature/humidity detector and the temperature of the wafer which is cooled by the cooling plates is adjusted accordingly based on a detected value so that the temperature of the wafer when transferred to the coating unit becomes a coating temperature of a processing solution. Thereby, the wafer is transferred to the coating unit while maintaining its temperature with high accuracy to be coated with a resist solution, so that a formation of an uneven processing due to the temperature change can be prevented and a uniform processing can be performed.

Abstract: The invention relates to a method of activating an optical communication system comprising a plurality of optical amplifiers having an optical amplifier, between optical transmission lines in which wavelength-division multiplex optical signals are transmitted. The method comprises steps of: generating a desired slope in a desired wavelength range of a gain wavelength curve of the optical amplifier; adjusting an output of the optical amplifier to a desired output level; performing the above two steps in a plurality of optical repeater stations, the steps being carried out in sequence from the first to the last optical repeater stations; and adjusting a level in each optical signal in the wavelength-division multiplex optical signal so as to have substantially constant optical signal-to-noise ratios in the optical signals to be received. Activating the optical communication system according to this procedure allows proper execution of gain slope compensation, output control, and pre-emphasis control.

Abstract: The present invention relates to an optical level control method for use in an optical transmission system. In the system, a WDM terminal comprises a multiplexing/demultiplexing unit, an amplifier, an up-direction OSC light transmitting/receiving unit, an up-direction multiplexer, an up-direction branching unit, an amplifier and an APR control unit, and a repeater comprises an up-direction branching unit, an OSC light transmitting/receiving unit, an amplifier, an up-direction multiplexer, a down-direction branching unit, an amplifier, a down-direction multiplexer and an APR control unit. In this configuration, a flexible optical output level control in connection with variation in WDM light level, a selective value irrespective of occurrence of an error stemming from the passage of time and avoidable malfunctions are respectively capable. In addition, a trouble retrieving operator can eliminate the possibility of being exposed to the WDM light.

Abstract: On top of respective areas divided by partition plates, that is, a cassette station, a processing station, and an interface section in a coating and developing processing system, gas supply sections for supplying an inert gas into the respective areas are provided. Exhaust pipes for exhausting atmospheres in the respective areas are provided at the bottom of the respective areas. The atmospheres in the respective areas are maintained in a clean condition by supplying the inert gas not containing impurities such as oxygen and fine particles from the respective gas supply sections into the respective areas and exhausting the atmospheres in the respective areas from the exhaust pipes.

Abstract: A developing unit, a coating unit and a plurality of cooling plates are arranged in a process station which performs a resist coating and so on and a wafer is transferred among them by a substrate transfer device. The temperature of an area to where the wafer is transferred is detected by a temperature/humidity detector and the temperature of the wafer which is cooled by the cooling plates is adjusted accordingly based on a detected value so that the temperature of the wafer when transferred to the coating unit becomes a coating temperature of a processing solution. Thereby, the wafer is transferred to the coating unit while maintaining its temperature with high accuracy to be coated with a resist solution, so that a formation of an uneven processing due to the temperature change can be prevented and a uniform processing can be performed.

Abstract: After reacting sodium sulfide anhydride and hydrogen sulfide, 3-halopropylalkoxy silane represented by the general formulaX (CH.sub.2).sub.3 Si (OR).sub.a R.sub.3-a (I)is added reacted, wherein X denotes Cl or Br; R denotes a methyl, ethyl or propyl group wherein R's can be all identical or different from each other; and "a" denotes an integer 1, 2 or 3.

Abstract: A circuit for inversely converting the signal of six bits converted by the 5B6B coding rule conversion method in the digital transmission into the original signal of five bits is described. On the occasion of inversely converting the 6-bit signal to the original 5-bit signal, the mark rate of the 6-bit signal to be converted inversely is detected in accordance with the 5B6B coding rule conversion pattern. In this case, all patterns of six bits are not detected but such six bits are divided into the upper three bits and lower three bits and the mark rates of six bits are detected from the patterns of upper three bits and lower three bits. Thereby, a number of detected patterns can be reduced and simplification of circuit structure can also be realized.

Abstract: A switching system of the present invention is formed of two identical units. e.g. printed circuit board, the primary and the backup units W & P. Each unit has a switching circuit 1 such that upon receiving a first alarm signal generated due to a malfunction taking place in a main circuit 6(W) of the primary unit W, the switching circuit 1W of the primary unit transmits a second alarm signal S.sub.4 (W) to switching circuit 1P of the standby unit P, then the switching circuit 1P of the standby circuit 1P enables an output of main circuit 6(P) on the standby unit as well as transmits a control signal S.sub.9 (P) to disable an output of main circuit 6(W) of the primary unit. A plurality of the units may form a group so that two groups are in the relation of the primary and the backup. A first unit in the group collects the alarm in the own group and communicates with the first unit of the other group, so that the switching are carried out by the whole group.