Abstract: A chemical mechanical polishing pad used for chemical mechanical polishing comprises a polishing surface, a non-polishing surface that is provided opposite to the polishing surface, a side surface that connects an outer edge of the polishing surface and an outer edge of the non-polishing surface, and a plurality of grooves formed in the polishing surface. The side surface has a slope surface that is connected to the polishing surface, and a depth of the grooves is equal to or smaller than a height of the slope surface.

Abstract: A chemical mechanical polishing pad used for chemical mechanical polishing comprises a polishing surface, a non-polishing surface that is provided opposite to the polishing surface, a side surface that connects an outer edge of the polishing surface and an outer edge of the non-polishing surface, and a plurality of grooves formed in the polishing surface. The side surface has a slope surface that is connected to the polishing surface, and a depth of the grooves is equal to or smaller than a height of the slope surface.

Abstract: A resolution-converting apparatus includes an input interface, a parameter calculator, a first converter, a decoder, and a second converter. The input interface inputs a video content compression-encoded and having first resolution, together with a second resolution which has been designated and which is lower than the first resolution. The parameter calculator calculates value n (natural number) when 1/2n times the first resolution is higher than the second resolution. The first converter converts the video content of the first resolution in a frequency domain, to a video content having 1/2n times the first resolution, by using the value n calculated by the parameter calculator. The decoder decodes the video content converted by the first converter. The second converter converts, in a space domain, the resolution of the video content decoded, to a video content of the designated second resolution.

Abstract: A chemical mechanical polishing pad having a face for polishing an object to be polished, a non-polishing face opposite to the face and a side face for interconnecting these faces and including the pattern of recessed portions which are formed on the non-polishing face and are open to the non-polishing face but not on the side face.

Abstract: A contents providing apparatus includes a storage which records contents with plural types of formats, output ports which respectively output the contents, decoders which are connected to the output ports and respectively correspond to the formats, channels which respectively provide contents decoded by the decoders, a switcher which selectively derives one of outputs of the decoders to a specified one of the channels, a table which expresses the output ports respectively assigned to the channels and formats corresponding to the decoders connected to the output ports, and a controller to select, based on the table, one of the output ports which corresponds to the format of the specified contents and is assigned to the specified channel.

Abstract: A contents providing apparatus includes storage which records contents with plural types of formats, output ports which respectively output contents read from the storage, decoders which are connected to the output ports and respectively correspond to the formats, channels which respectively provide contents decoded by the decoders, a switcher which selectively derives one of outputs of the decoders to a specified one of the channels, a table which expresses the output ports connected to the decoders corresponding to the plural types of formats and status conditions of the decoders, CPU which assigns an available one of the output ports which corresponds to the format of the specified contents based on the table.

Abstract: A program delivery system includes a video server that records a plurality of server contents and outputs the server contents, a video switcher which selectively switches between server contents and live contents, and delivers the switched contents as an on-air video image, a content selection module which presents live content buttons and server content buttons, and accepts an operation of selecting any one of the buttons, a live content module which, switches the video switcher, and delivers the live contents, at the time that the live content button has been selected, and a server content module which, outputs the server contents that correspond to the button, and at the same time, switches the video switcher and delivers the server contents, at the time that the server content button has been selected.

Abstract: There is provided a chemical mechanical polishing pad containing a polishing substrate having a polishing surface and a light-transmitting member fused to the polishing substrate. The sectional form of the light-transmitting member when it is cut with a plane parallel to the polishing surface is elliptic with a value obtained by dividing its long diameter by its short diameter of more than 1. The pad is capable of transmitting end-point detection light without reducing its polishing efficiency in polishing a semiconductor wafer.

Abstract: A chemical mechanical polishing pad comprising a water-insoluble matrix which comprises (A) a styrene polymer and (B) a diene polymer. A method for producing the above chemical mechanical polishing pad, the method comprising the steps of preparing a composition comprising (A) a styrene polymer, (B) a diene polymer and (C) a crosslinking agent, shaping the above composition into a predetermined shape, and heating the composition during or after shaping to cure it. A chemical mechanical polishing process which comprises polishing a surface to be polished of an object to be polished by use of the chemical mechanical polishing pad. According to the present invention, it is possible to provide a chemical mechanical polishing pad which can be suitably applied to polishing of metal film and insulation film, particularly to an STI technique, provides a flat polished surface, can provide a high polishing rate and has a satisfactory useful life.

Abstract: A chemical mechanical polishing pad having a face for polishing an object to be polished, a non-polishing face opposite to the face and a side face for interconnecting these faces and including the pattern of recessed portions which are formed on the non-polishing face and are open to the non-polishing face and not to the side face.