Abstract: A slit opening of a slit nozzle extends unidirectionally in a longitudinal direction from near the center of a circular substrate to near an outer edge of the substrate, and has a length in the longitudinal direction equal to or smaller than a radius of the substrate. When the slit nozzle discharges chemical onto the substrate, a rotary holder rotates the substrate and the slit nozzle relatively to each other about the center of the substrate. Accordingly, the chemical from the slit nozzle all adheres to a surface of the substrate to form an excellent liquid column and a chemical film on an almost entire surface of the substrate along the outer edge of the circular substrate. This yields satisfactory coating of the substrate with the chemical while waste chemical is suppressed.

Abstract: A chamber has a first opening, a second opening, and a third opening. The second opening is higher in level than the first and third openings, and is located at the highest position of a reservoir. Air bubbles are easily collected around the second opening, higher in level than the third opening, due to buoyancy. Moreover, the chamber includes an upper slope on an upper inner wall thereof such that a sectional area of the chamber becomes smaller toward the highest position of the reservoir. The upper slope causes the air bubbles not to stagnate but to be guided to the second opening along the upper slope. This makes easy discharge of the air bubbles from the chamber.

Abstract: A pumping apparatus includes a pump chamber, a piston, a motor, and a controller. The controller determines an imaginary terminal point by referring to a dispense command, theoretical information, and a current position of the piston. The controller corrects the imaginary terminal point to a target position by referring to a correction graph. The controller outputs a drive command to the motor for moving the piston from a start position to the target position.

Abstract: A treating solution supply apparatus which supplies a treating solution for treating a substrate includes a liquid passage for allowing the treating solution to flow therethrough; and a pump including a chamber with a variable volume for receiving and feeding the treating solution from/to the liquid passage, and a chamber driver electrically driven to vary the volume of the chamber. The liquid passage, chamber, and chamber driver are arranged in the stated order laterally.

Abstract: A chamber has at least three openings, or a first opening, a second opening, and a third opening formed therein that are in communication with a reservoir. The second opening is higher in level than the first opening. The third opening is used for discharging a liquid within the reservoir by introducing gas through at least one of the first opening and the second opening into the reservoir. Since the third opening is the lowest in level among the three openings, the liquid stored in the reservoir is able to be drained easily.

Abstract: A coating method of coating a substrate with a chemical includes a solvent supplying step and a chemical supplying step. In the solvent supplying step, a solvent is supplied to the substrate. After the solvent supplying step, the chemical is supplied to the substrate in the chemical supplying step. The solvent supplying step includes a first step. The first step causes the substrate to rotate at a first rotation speed, causes a solvent nozzle to move between a central position above a center portion of the substrate and a peripheral position above a peripheral portion of the substrate, and causes the solvent nozzle to dispense the solvent.

Abstract: The present invention provides a technique for measuring the efficiency of components in a computer. An echo server is provided which comprises several units. A socket generation unit generates a receiving server socket on the basis of information on a correspondence between a plurality of components in a computer. And generates a client socket that is a dedicated socket inheriting information of the receiving server socket when data is transmitted. A stream acquisition unit acquires a transmission path for acquiring data transmitted and received between components. A thread generation unit generates a transmission path by coupling streams. A transfer execution unit transfers data acquired via a thread to an original destination component. Using these units, the technique monitors and running verifies behavior by observing data running on the network.

Abstract: A mammography device is disclosed. The mammography device includes a container configured to surround the breast and a plurality of optical fibers attached to be directed inward in the container and configured to perform radiation and detection of light. The container has a base member having an opening, a plurality of annular members continuously disposed to come in communication with the opening, and a bottom member disposed inside the annular member spaced the farthest distance from the base member. The annular members and the bottom member are configured to relatively displace the adjacent annular member on the side of the base member or the base member in a communication direction. Some of the plurality of optical fibers is attached to the plurality of annular members.

Abstract: A substrate treating apparatus includes a first treating block and a second treating block disposed adjacent to the first treating block. Each of the first treating block and the second treating block include a plurality of stories arranged vertically. Each of the plurality of stories includes treating units for treating substrates and a main transport mechanism for transporting the substrates to and from the treating units. The substrates are transportable between the stories of the first treating block and the stories of the second treating block at same heights as corresponding stories of the first treating block. The substrates are transportable between the stories of the first treating block and the stories of the second treating block at different heights from corresponding stories of the first treating block.

Abstract: A breast measurement apparatus includes a distance measurement unit measuring a distance from a skin to a light absorption portion for a measurement region of a breast which is a normal region including no tumor or an object region including a tumor, a light measurement unit measuring a hemoglobin amount in the measurement region by a light measurement method using measurement light of a predetermined wavelength, a correlation data storage unit storing normal correlation data of the distance to the light absorption portion and a normal hemoglobin amount generated based on measurement results for normal regions, and an evaluation value calculation unit calculating a property evaluation value of the tumor based on the normal hemoglobin amount, obtained from the normal correlation data and the distance to the light absorption portion in the object region, and an object hemoglobin amount in the object region.

Abstract: When the drive mode of a hybrid vehicle is a dual motor drive mode, a counter C is incremented by value 1. When the drive mode is not the dual motor drive mode, the counter C is reset to value 0. When the counter C becomes equal to or higher than a reference value Cref1, a lubrication measure flag F is set to value 1. Setting the lubrication measure flag F to the value 1 causes a carrier of a planetary gear to be rotated and causes pinion gears to revolve around the carrier. In the dual motor drive mode, the hybrid vehicle is driven with stooping rotation of the carrier of the planet airy gear. This is likely to cause a shortage of lubricant oil at a pinion gear that rotates revolution at the upper position in the planetary gear. The control of rotating the carrier and thereby revolving the pinion gears around the carrier changes the position of the pinion gear from the upper position to the lower position and thereby reduces the shortage of lubricant oil.

Abstract: A breast measurement apparatus comprises a receptacle for surrounding a breast; a plurality of optical fibers for irradiating the breast with examination light and detecting transmitted scattered light from the breast; an inner image generation unit for generating an optical CT image concerning the breast according to a detection signal of the transmitted scattered light; an ultrasonic probe, arranged so as to face the inside of the receptacle, for scanning the breast with an ultrasonic wave and receiving a reflected wave from the breast; an image generation unit for generating an ultrasonic image concerning the breast according to the reflected wave; and a mechanism for injecting and discharging a liquid interface agent into and from the inside of the receptacle.

Abstract: A treating section has substrate treatment lines arranged one over the other for treating substrates while transporting the substrates substantially horizontally. An IF section transports the substrates fed from each substrate treatment line to an exposing machine provided separately from this apparatus. The substrates are transported to the exposing machine in the order in which the substrates are loaded into the treating section. The throughput of this apparatus can be improved greatly, without increasing the footprint, since the substrate treatment lines are arranged one over the other. Each substrate can be controlled easily since the order of the substrates transported to the exposing machine is in agreement with the order of the substrates loaded into the treating section.

Abstract: A substrate treating apparatus for treating substrates includes a plurality of substrate treatment lines arranged vertically for carrying out plural types of treatment on the substrates while transporting the substrates substantially horizontally, and a controller for changing processes of treatment carried out on the substrates for each of the substrate treatment lines. By changing the processes of treatment carried out for the substrates for each substrate treatment line, the processes of treatment carried out for the substrates can be changed for each substrate conveniently. Thus, a plurality of different processes of treatment corresponding to the number of substrate treatment lines can be carried out in parallel for the respective substrates.

Abstract: A slit opening of a slit nozzle extends unidirectionally in a longitudinal direction from near the center of a circular substrate to near an outer edge of the substrate, and has a length in the longitudinal direction equal to or smaller than a radius of the substrate. When the slit nozzle discharges chemical onto the substrate, a rotary holder rotates the substrate and the slit nozzle relatively to each other about the center of the substrate. Accordingly, the chemical from the slit nozzle all adheres to a surface of the substrate to form an excellent liquid column and a chemical film on an almost entire surface of the substrate along the outer edge of the circular substrate. This yields satisfactory coating of the substrate with the chemical while waste chemical is suppressed.

Abstract: A substrate treating apparatus for treating substrates includes a plurality of substrate treatment lines arranged vertically for carrying out plural types of treatment on the substrates while transporting the substrates substantially horizontally, and a controller for changing processes of treatment carried out on the substrates for each of the substrate treatment lines. By changing the processes of treatment carried out for the substrates for each substrate treatment line, the processes of treatment carried out for the substrates can be changed for each substrate conveniently. Thus, a plurality of different processes of treatment corresponding to the number of substrate treatment lines can be carried out in parallel for the respective substrates.

Abstract: A substrate treating method for treating substrates with a substrate treating apparatus having an indexer section, a treating section and an interface section includes performing resist film forming treatment in parallel on a plurality of stories provided in the treating section and performing developing treatment in parallel on a plurality of stories provided in the treating section.

Abstract: A substrate treating apparatus includes a first treating block and a second treating block disposed adjacent to the first treating block. Each of the first treating block and the second treating block include a plurality of stories arranged vertically. Each of the plurality of stories includes treating units for treating substrates and a main transport mechanism for transporting the substrates to and from the treating units. The substrates are transportable between the stories of the first treating block and the stories of the second treating block at same heights as corresponding stories of the first treating block. The substrates are transportable between the stories of the first treating block and the stories of the second treating block at different heights from corresponding stories of the first treating block.

Abstract: A substrate treating method for treating substrates with a substrate treating apparatus having an indexer section, a treating section and an interface section includes performing resist film forming treatment in parallel on a plurality of stories provided in the treating section and performing developing treatment in parallel on a plurality of stories provided in the treating section.

Abstract: A treating section includes a plurality of treating blocks juxtaposed horizontally. Each treating block is vertically divided into stories. Each story includes treating units and a main transport mechanism. Substrates are transportable between the same stories of the treating blocks. Further, the substrates are transportable between different stories. Thus, the apparatus can transport the substrates flexibly between the treating blocks.