Patents by Inventor Hiroyuki Sugiuti

Hiroyuki Sugiuti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wet processing system
    Patent number: 6099686
    Abstract: In a wet processing system included in a semiconductor device production line, a wafer carrier has bars formed with grooves for receiving the edge portions of wafers, and a pair of support plates each having a width smaller than the diameter of the wafers. The carrier reduces a volume required of a processing bath and promotes the smooth flow of aqueous solutions. Hence, the system reduces the consumption of chemicals and pure water as well as the cleaning time and other processing times.
    Type: Grant
    Filed: July 20, 1995
    Date of Patent: August 8, 2000
    Assignee: NEC Corporation
    Inventor: Hiroyuki Sugiuti