Patents by Inventor Hiroyuki TAKADERA

Hiroyuki TAKADERA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20110212625
    Abstract: A substrate processing apparatus which is capable of improving a manufacture yield while processing a substrate with high precision, and a method of manufacturing a semiconductor device. The substrate processing apparatus includes a substrate support part provided within a process chamber and configured to support a substrate; a substrate support moving mechanism configured to move the substrate support part; a gas feeding part configured to feed a gas into the process chamber; an exhaust part configured to exhaust the gas within the process chamber; and a plasma generating part disposed to face the substrate support part.
    Type: Application
    Filed: February 25, 2011
    Publication date: September 1, 2011
    Applicant: HITACHI KOKUSAI ELECTRIC INC.
    Inventors: Kazuyuki TOYODA, Osamu KASAHARA, Yoshiro HIROSE, Hiroyuki TAKADERA, Daigi KAMIMURA